JPH0296728U - - Google Patents

Info

Publication number
JPH0296728U
JPH0296728U JP461389U JP461389U JPH0296728U JP H0296728 U JPH0296728 U JP H0296728U JP 461389 U JP461389 U JP 461389U JP 461389 U JP461389 U JP 461389U JP H0296728 U JPH0296728 U JP H0296728U
Authority
JP
Japan
Prior art keywords
equipment
pressure cvd
wafer boat
alloy material
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP461389U
Other languages
English (en)
Other versions
JPH0622982Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP461389U priority Critical patent/JPH0622982Y2/ja
Publication of JPH0296728U publication Critical patent/JPH0296728U/ja
Application granted granted Critical
Publication of JPH0622982Y2 publication Critical patent/JPH0622982Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図及び第２図は夫々本考案を説明する為の
断面図及び平面図である。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 熱膨張係数が１．０乃至１０．０cm／cm℃
    の合金材料から成ることを特徴とする減圧ＣＶＤ
    装置用ウエハボート。 (2) 前記合金材料が４−２アロイ合金であるこ
    とを特徴とする請求項第１項に記載の減圧ＣＶＤ
    装置用ウエハボート。
JP461389U 1989-01-19 1989-01-19 減圧ｃｖｄ用ウエハボート Expired - Lifetime JPH0622982Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP461389U JPH0622982Y2 (ja) 1989-01-19 1989-01-19 減圧ｃｖｄ用ウエハボート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP461389U JPH0622982Y2 (ja) 1989-01-19 1989-01-19 減圧ｃｖｄ用ウエハボート

Publications (2)

Publication Number Publication Date
JPH0296728U true JPH0296728U (ja) 1990-08-01
JPH0622982Y2 JPH0622982Y2 (ja) 1994-06-15

Family

ID=31207278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP461389U Expired - Lifetime JPH0622982Y2 (ja) 1989-01-19 1989-01-19 減圧ｃｖｄ用ウエハボート

Country Status (1)

Country Link
JP (1) JPH0622982Y2 (ja)

Also Published As

Publication number Publication date
JPH0622982Y2 (ja) 1994-06-15

Similar Documents

Publication Publication Date Title
USD300693S (en) Embossed fabric
USD300932S (en) Windmill
USD293292S (en) Covered entree plate
JPH0296728U (ja)
USD290640S (en) Valve diaphragm
USD297019S (en) General map symbols template
USD282750S (en) Typeface
USD306313S (en) Typeface
USD289773S (en) Typeface design
USD271250S (en) Ventilated hat
USD302488S (en) Sock
USD289421S (en) Typeface design
USD289422S (en) Typeface
USD266006S (en) Typeface
USD261210S (en) Tablecloth
USD281046S (en) Plate or similar article
USD288741S (en) Visored headband
USD312733S (en) Shawl
USD272700S (en) Rug
USD272790S (en) Rug
USD278297S (en) Plate or the like
USD282334S (en) Plate or the like
JPS6395391U (ja)
USD300415S (en) Top shell for expansion bracelet link
JPS61164040U (ja)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term