JPH0296726U - - Google Patents

Info

Publication number
JPH0296726U
JPH0296726U JP489189U JP489189U JPH0296726U JP H0296726 U JPH0296726 U JP H0296726U JP 489189 U JP489189 U JP 489189U JP 489189 U JP489189 U JP 489189U JP H0296726 U JPH0296726 U JP H0296726U
Authority
JP
Japan
Prior art keywords
cleaning tank
ultrasonic
tank
ultrasonic waves
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP489189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP489189U priority Critical patent/JPH0296726U/ja
Publication of JPH0296726U publication Critical patent/JPH0296726U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP489189U 1989-01-19 1989-01-19 Pending JPH0296726U (US07223432-20070529-C00017.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP489189U JPH0296726U (US07223432-20070529-C00017.png) 1989-01-19 1989-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP489189U JPH0296726U (US07223432-20070529-C00017.png) 1989-01-19 1989-01-19

Publications (1)

Publication Number Publication Date
JPH0296726U true JPH0296726U (US07223432-20070529-C00017.png) 1990-08-01

Family

ID=31207799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP489189U Pending JPH0296726U (US07223432-20070529-C00017.png) 1989-01-19 1989-01-19

Country Status (1)

Country Link
JP (1) JPH0296726U (US07223432-20070529-C00017.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996021242A1 (fr) * 1995-01-06 1996-07-11 Tadahiro Ohmi Procede de nettoyage
TWI824420B (zh) * 2020-08-25 2023-12-01 南韓商杰宜斯科技有限公司 基板清洗裝置及其控制方法
TWI824469B (zh) * 2021-04-21 2023-12-01 南韓商杰宜斯科技有限公司 基板清洗裝置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996021242A1 (fr) * 1995-01-06 1996-07-11 Tadahiro Ohmi Procede de nettoyage
TWI824420B (zh) * 2020-08-25 2023-12-01 南韓商杰宜斯科技有限公司 基板清洗裝置及其控制方法
TWI824469B (zh) * 2021-04-21 2023-12-01 南韓商杰宜斯科技有限公司 基板清洗裝置

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