JPH029570A - Processing method with two-side lapping machine - Google Patents

Processing method with two-side lapping machine

Info

Publication number
JPH029570A
JPH029570A JP63160532A JP16053288A JPH029570A JP H029570 A JPH029570 A JP H029570A JP 63160532 A JP63160532 A JP 63160532A JP 16053288 A JP16053288 A JP 16053288A JP H029570 A JPH029570 A JP H029570A
Authority
JP
Japan
Prior art keywords
speed
gear
planetary gear
lapping
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63160532A
Other languages
Japanese (ja)
Other versions
JPH0661698B2 (en
Inventor
Shinji Miyamoto
紳司 宮本
Akio Komura
明夫 小村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Zosen Corp
Original Assignee
Hitachi Zosen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Zosen Corp filed Critical Hitachi Zosen Corp
Priority to JP63160532A priority Critical patent/JPH0661698B2/en
Publication of JPH029570A publication Critical patent/JPH029570A/en
Publication of JPH0661698B2 publication Critical patent/JPH0661698B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To apply equal processing to the oversurface and undersurface of a work by rotating an upper and a lower lapping machine at approx. the same speed in the identical direction. CONSTITUTION:A planet gear 14 is rotated round its own axis and also orbited by means of relative rotation of a sun gear 12 and an internally cogged gear 13, and at the same time, an upper and a lower lapping machine 10, 11 are rotated to perform lapping of both the oversurface and undersurface of a work 16 rotating in a single piece with this planet gear 14. Therein the two lapping machines 10, 11 are rotated at approx. the same speed in the identical direction. Further, the direction and speed in rotation of these lapping machines 10, 11 relative to the orbit of the planet gear 14 shall be approx. the same as the direction and speed in turning round own axis of the planet gear 14. Consequently the mean value of the relative speed with the lapping machines 10, 11 is made approx. the same in different parts of the work 16, which is rotating in a single piece with the planet gear 14, and thus the oversurface and undersurface of the work 16 can be processed simultaneously in equal processing condition.

Description

【発明の詳細な説明】 産業上の利用分野 この発明は、上下にラップ定盤を備えた両面ラッピング
マシンにおける加工方法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to a processing method in a double-sided lapping machine equipped with upper and lower lapping plates.

従来の技術および発明の課題 両面ラッピングマシンとして、下部ラップ定盤、上部ラ
ップ定盤、これらのラップ定盤の中心に配置された太陽
歯車、ラップ定盤の周囲に配置された内歯歯車および太
陽歯車と内歯歯車の間に配置された遊星歯車を備え、遊
星歯車またはこれと一体に回転する部分にワークが取付
けられ、太陽歯車と内歯歯車の相対的な回転による遊星
歯車の自転および公転ならびに上下のラップ定盤の回転
によりワークの両面の加工が行われるものが知られてい
る。
Prior Art and Problems of the Invention A double-sided lapping machine includes a lower lapping surface plate, an upper lapping surface plate, a sun gear placed in the center of these lapping surfaces, an internal gear and a sun placed around the lapping surface plate. A planetary gear is placed between the gear and the internal gear, and a workpiece is attached to the planetary gear or a part that rotates together with the planetary gear, and the planetary gear rotates and revolves due to the relative rotation of the sun gear and the internal gear. Also known is a machine in which both sides of a workpiece are machined by rotating upper and lower lap plates.

ところが、従来のラッピングマシンでは、上下のラップ
定盤の回転方向が常に逆方向になっており、たとえ下部
ラップ定盤側で理想的な相対回転条件が成立していても
、上部ラップ定盤側では遊星歯車の自転回転速度の分だ
け加工相対速度が異なり、理想条件と離れた加工状態と
なる。したがって、上下両面の理想的な平面加工は不可
能である。
However, in conventional wrapping machines, the upper and lower lap plates always rotate in opposite directions, and even if ideal relative rotation conditions are established on the lower lap plate side, the upper lap plate side In this case, the relative machining speed differs by the amount of rotational speed of the planetary gear, resulting in a machining state that differs from the ideal condition. Therefore, ideal planar processing of both the upper and lower surfaces is impossible.

この発明の目的は、上記の問題を解決し、上下両面の理
想的な加工が可能な両面ラッピングマシンにおける加工
方法を提供することにある。
An object of the present invention is to solve the above-mentioned problems and provide a processing method for a double-sided lapping machine that can perform ideal processing on both the upper and lower surfaces.

課題を解決するための手段 この発明による加工方法は、 下部ラップ定盤、上部ラップ定盤、これらのラップ定盤
の中心に配置された太陽歯車、ラップ定盤の周囲に配置
された内歯歯車および太陽歯車と内歯mrLの間に配置
された遊星歯車を備え、遊星歯車またはこれと一体に回
転する部分にワークが取付けられ、太陽歯車と内歯歯車
の相対的な回転による遊星歯車の自転および公転ならび
に上下のラップ定盤の回転によりワークの両面の加工が
行われる両面ラッピングマシンにおいて、 上下のラップ定盤を同じ方向にほぼ等しい速度で回転さ
せ、かつ遊星歯車の公転に対するラップ定盤の相対回転
の方向および速度を遊星歯車の自転の方向および速度と
ほぼ等しくして、ワークの両面を加工することを特徴と
するものである。
Means for Solving the Problems The processing method according to the present invention includes a lower lap surface plate, an upper lap surface plate, a sun gear placed in the center of these lap surface plates, and an internal gear placed around the lap surface plate. and a planetary gear disposed between the sun gear and the internal gear mrL, a workpiece is attached to the planetary gear or a part that rotates integrally with the planetary gear, and the planetary gear rotates on its own axis due to the relative rotation of the sun gear and the internal gear. In a double-sided lapping machine, which processes both sides of a workpiece by revolution and rotation of the upper and lower lap surface plates, the upper and lower lap surface plates are rotated in the same direction at approximately the same speed, and the lap surface plate is This method is characterized in that both sides of the workpiece are machined by making the direction and speed of relative rotation approximately equal to the direction and speed of rotation of the planetary gear.

作   用 上下のラップ定盤が同じ方向にほぼ同じ速度で回転する
ので、ワークの上下両面の加工状態がほぼ同じになる。
Function: Since the upper and lower lap plates rotate in the same direction and at approximately the same speed, the machining conditions on both the upper and lower surfaces of the workpiece are approximately the same.

また、遊星歯車の公転に対する上下のラップ定盤の相対
回転の方向および速度が遊星歯車の自転の方向および速
度とほぼ等しいので、後に詳述するように、遊星歯車と
一体に回転するワークの各部分においてラップ定盤との
相対速度の平均値がほぼ等しくなり、理想的な平面加工
が行われる。
In addition, since the direction and speed of the relative rotation of the upper and lower lap surface plates relative to the revolution of the planetary gear are approximately the same as the direction and speed of rotation of the planetary gear, it is possible to The average values of the relative speeds with respect to the lapping surface plate are approximately equal in each part, and ideal planar processing is performed.

実  施  例 以下、図面を参照して、この発明の1実施例を説明する
Embodiment Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

第1図は、両面ラッピングマシンの主要部を概略的に示
す。
FIG. 1 schematically shows the main parts of a double-sided wrapping machine.

両面ラッピングマシンは、上下のラップ定盤(10)(
11)、太陽歯車(12)、内歯歯車(13)および遊
星歯車(14)を備えている。
The double-sided wrapping machine has upper and lower wrapping plates (10) (
11), a sun gear (12), an internal gear (13) and a planetary gear (14).

下部ラップ定盤(下部定盤) (11)は、上向きに配
置されている。
The lower lap surface plate (lower surface plate) (11) is arranged facing upward.

上部ラップ定盤(上部定盤) (10)は、下部定盤(
11)の上方に下向き対向状に配置されている。
The upper lap surface plate (upper surface plate) (10) is the lower surface plate (
11) are arranged in a downward facing manner above.

太陽歯車(12)は、上下の定盤(10)<11)の間
の中心に同心状に配置されている。
The sun gear (12) is arranged concentrically at the center between the upper and lower surface plates (10)<11).

内歯歯車(13)は、上下の定盤(10) (11)の
間の周囲に同心状に配置されている。
The internal gear (13) is arranged concentrically around the upper and lower surface plates (10) and (11).

遊星歯車(14)は、上下の定盤(10)(11)の間
で太陽歯車(12)と内歯歯車(13)の間に配置され
て、これらとかみ合っている。J足歯車(14)には、
ワーク収容ポケット(穴) (15)が形成され、この
ポケット(15)にワーク(16)が入れられて、その
上下両面が遊星歯車(14)から上下に出ている。
The planetary gear (14) is disposed between the upper and lower surface plates (10) and (11) and between the sun gear (12) and the internal gear (13), and meshes with them. The J foot gear (14) has
A workpiece storage pocket (hole) (15) is formed, a workpiece (16) is placed in this pocket (15), and both upper and lower surfaces of the workpiece (16) protrude upward and downward from the planetary gear (14).

定盤(10)(11)、太陽歯車(12)および内m歯
車(13)は、適宜な駆動手段により、互いに独立して
、または相互に関連して回転させられる。
The surface plates (10) (11), the sun gear (12) and the internal gear (13) are rotated independently of each other or in relation to each other by suitable drive means.

次に、上記のラッピングマシンによる加工方法すなわち
この発明による方法の1例を説明する。
Next, an example of a processing method using the above-mentioned lapping machine, that is, a method according to the present invention will be explained.

まず、上下の定盤(10)(11)を同じ方向に等しい
速度で回転させる。また、遊星歯車(14)の公転に対
する定盤(10)(11)の相対回転の方向(以下単に
相対回転方向という)および速度(以下単に相対回転速
度という)を遊星歯車(14)の自転の方向および速度
と等しくする。
First, the upper and lower surface plates (10) and (11) are rotated in the same direction at the same speed. In addition, the direction (hereinafter simply referred to as relative rotation direction) and speed (hereinafter simply referred to as relative rotation speed) of the relative rotation of the surface plates (10) and (11) with respect to the revolution of the planetary gear (14) are determined relative to the rotation of the planetary gear (14). Equal to direction and velocity.

このようにすると、上下の定ffi <10) (It
)が同じ方向に同じ速度で回転するので、ワーク(16
)の上下両面の加工状態が同じになる。また、定盤(1
0)(11)の相対回転方向および相対回転速度がi1
里歯車(14)の自転方向および自転速度と等しいので
、次に説明するように、遊星歯車(14)と一体に回転
するワーク(16)の各部分において定盤(10)(1
1)との相対速度の平均値がほぼ等しくなり、理想的な
平面加工が行われる。
In this way, the upper and lower constant ffi <10) (It
) rotates in the same direction at the same speed, so the workpiece (16
) will have the same machining status on both the top and bottom. Also, a surface plate (1
0) The relative rotation direction and relative rotation speed of (11) are i1
Since the rotation direction and rotation speed are equal to the rotation speed of the planetary gear (14), as will be explained next, the surface plate (10) (1
The average value of the relative speed with 1) becomes almost equal, and ideal planar processing is performed.

第2図において、定盤(10)(11)の相対回転方向
を反時計方向、相対回転速度をN (rpm)とし、遊
星歯車(14)の自転方向を反時計方向、自転速度をn
 (rpH)とする。また、太陽歯車(12)の中心0
5と遊星歯車(14)の中心Ocを通る直線上にあって
Ocから外側に「だけ離れたワーク(IB)上の点をA
、Ocから内側に「だけ離れたワーク(16)上の点を
Bとし、05からQCまでの距離をr。SO5からAま
での距離を「9、O5からBまでの距離をr9とする。
In Fig. 2, the relative rotation direction of the surface plates (10) and (11) is counterclockwise and the relative rotation speed is N (rpm), and the rotation direction of the planetary gear (14) is counterclockwise and the rotation speed is n.
(rpH). Also, the center 0 of the sun gear (12)
A point on the workpiece (IB) that is on a straight line passing through 5 and the center Oc of the planetary gear (14) and is outwardly away from Oc.
, Let B be the point on the workpiece (16) that is inwardly away from Oc, the distance from 05 to QC be r, the distance from SO5 to A be 9, and the distance from O5 to B be r9.

ラップ加工量Wは、次の式(1)で表わされる。The amount of lapping W is expressed by the following equation (1).

Wo=p*y/l ・・・・・・・・・(1)ここで、
p (kit / ci )はラップ圧力、v (cm
/1n)はラップ速度(ワーク(16)と定盤(10)
(11)の相対速度)、t(lIin)はラップ時間で
ある。
Wo=p*y/l ・・・・・・・・・(1) Here,
p (kit/ci) is the lap pressure, v (cm
/1n) is the lap speed (workpiece (16) and surface plate (10)
(11) relative velocity), t(lIin) is the lap time.

式(1)より、ワークを理想平面に加工するには、加工
平面内でpと■の積を一定にすればよく、理想平面ラッ
プ定盤ではpは一定であるから、■の平均値(平均ラッ
プ速度)Vuを一定にすればよい。
From equation (1), in order to process a workpiece into an ideal flat surface, it is sufficient to keep the product of p and ■ constant within the machining plane. Since p is constant on an ideal flat lap surface plate, the average value of ■ ( Average lap speed) Vu may be kept constant.

遊星歯車(14)が自転していないと仮定した場合のO
c、AおよびBにおけるラップ速度(仮のラップ速度)
をそれぞれvCRN V ARおよびV[lRとすると
、これらは次の式(2)〜(4)で表わされる。
O when assuming that the planetary gear (14) does not rotate
c, lap speed at A and B (tentative lap speed)
are expressed by the following equations (2) to (4), respectively.

V  CR””  2  π r(φ N   ・・・
 ・・・ ・・・ く2)VAR””2πr^ ・N 
・・・・・・・・・(3)v sR= 2 yr r 
B  −N  −−−−−−−−・(4)また、遊星歯
車(14)が速度nで自転している場合のoc 、Aお
よび已におけるラップ速度(Aのラップ速度)をそれぞ
れVC%VAおよびV3とすると、これらは次の式(5
)〜(7)で表わされる。
V CR”” 2 π r(φ N...
・・・ ・・・ Ku2) VAR""2πr^ ・N
・・・・・・・・・(3) v sR= 2 yr r
B -N ----------・(4) Also, when the planetary gear (14) is rotating at a speed n, the lap speed at oc, A, and 已 (lap speed of A) is VC%, respectively. Assuming VA and V3, these are the following equations (5
) to (7).

Ocにおいては、自転による速度は0であるから、 C−VCR −2π「c −N ・・・・・・・・・(5)Aにおい
ては、自転による速度の減少分が2πr’nであるから
、 VA−VAI+−2yr r lIn −2yr rAeN−2yr r IIn  −=(8
)Bにおいては、自転による速度の増加分が2πr’n
であるから、 VB−vBR+2πr ・n −2πra −N+2πr−n  =・(7)式(6)
および(7)より、VA−VBとなるときのnとNの関
係を求めれば、次の式(8)のようになる。
At Oc, the speed due to rotation is 0, so C-VCR -2π'c -N (5) At A, the decrease in speed due to rotation is 2πr'n From, VA−VAI+−2yr r lIn −2yr rAeN−2yr r IIn −=(8
) At B, the increase in speed due to rotation is 2πr'n
Therefore, VB−vBR+2πr ・n −2πra −N+2πr−n =・(7) Equation (6)
From (7), the relationship between n and N when VA-VB is obtained is as shown in the following equation (8).

n −(r、 −rB ) N/2 r  −・・・・
・(8)ここで、ra  rB−2rであるから、n−
N  ・・・・・・・・・(9) となる。
n - (r, -rB) N/2 r -...
・(8) Here, since ra rB-2r, n-
N ・・・・・・・・・(9)

式(6)に式(9)を代入すると、 vA−2π(rA−r)  ・N  =−=−410)
となり、rA−rawr。であるから、vA′″2πr
C−N mvc      ・・・・・・・・・(11)となる
Substituting equation (9) into equation (6), vA-2π(rA-r) ・N =-=-410)
So, rA-rawr. Therefore, vA′″2πr
CN mvc (11).

また、式(7)に式(9)を代入すると、v、−2x 
(rB+ r)  ・N  −・−−−(12)ここで
、rB+r−rcであるから、 vB12πrCIIN mvc         ・・・・・・・・・(13)
したがって、nmNとすると、 VA swvB mvcとなり、ワーク(1B)上の全
ての点について、平均ラップ速度VMがほぼ一定になる
Also, by substituting equation (9) into equation (7), v, -2x
(rB+ r) ・N −・−−−(12) Here, since rB+r−rc, vB12πrCIIN mvc ・・・・・・・・・(13)
Therefore, if nmN, then VA swvB mvc, and the average lap speed VM is approximately constant for all points on the workpiece (1B).

発明の効果 この発明の加工方法によれば、上述のように、上下のラ
ップ定盤が同じ方向にほぼ同じ速度で回転するので、ワ
ークの上下両面の加工状態がほぼ同じになる。また、遊
星歯車の公転に対する上下のラップ定盤の相対回転の方
向および速度が遊星歯車の自転の方向および速度とほぼ
等しいので、遊星歯車と一体に回転するワークの各部分
においてラップ定盤との相対速度の平均値がほぼ等しく
なり、理想的な平面加工が行われる。したがって、ワー
クの上下両面の理想的な加工が可能になる。
Effects of the Invention According to the processing method of the present invention, as described above, the upper and lower lap plates rotate in the same direction and at substantially the same speed, so that the processing conditions on both the upper and lower surfaces of the workpiece are substantially the same. In addition, since the direction and speed of relative rotation of the upper and lower lap surface plates with respect to the revolution of the planetary gear are approximately equal to the direction and speed of rotation of the planetary gear, each part of the workpiece that rotates together with the planetary gear has a rotational speed with respect to the lap surface plate. The average values of the relative velocities are approximately equal, and ideal planar machining is performed. Therefore, it is possible to ideally process both the upper and lower surfaces of the workpiece.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の1実施例を示す両面ラッピングマシ
ン主要部の斜視図、第2図は加工の原理を説明する説明
図である。 <10)・・・上部ラップ定盤、(11)・・・下部ラ
ップ定盤、(12)・・・太陽歯車、(13)・・・内
歯歯車、(14)−゛遊星歯車、(lB)・・・ワーク
。 以 特許出願人  日立造船株式会社
FIG. 1 is a perspective view of the main parts of a double-sided wrapping machine showing an embodiment of the present invention, and FIG. 2 is an explanatory diagram illustrating the principle of processing. <10)...Upper lap surface plate, (11)...Lower lap surface plate, (12)...Sun gear, (13)...Internal gear, (14)-゛Planetary gear, ( lB)...work. Patent applicant: Hitachi Zosen Corporation

Claims (1)

【特許請求の範囲】 下部ラップ定盤、上部ラップ定盤、これらのラップ定盤
の中心に配置された太陽歯車、ラップ定盤の周囲に配置
された内歯歯車および太陽歯車と内歯歯車の間に配置さ
れた遊星歯車を備え、遊星歯車またはこれと一体に回転
する部分にワークが取付けられ、太陽歯車と内歯歯車の
相対的な回転による遊星歯車の自転および公転ならびに
上下のラップ定盤の回転によりワークの両面の加工が行
われる両面ラッピングマシンにおいて、 上下のラップ定盤を同じ方向にほぼ等しい速度で回転さ
せ、かつ遊星歯車の公転に対するラップ定盤の相対回転
の方向および速度を遊星歯車の自転の方向および速度と
ほぼ等しくして、ワークの両面を加工することを特徴と
する両面ラッピングマシンにおける加工方法。
[Claims] A lower lap surface plate, an upper lap surface plate, a sun gear disposed at the center of these lap surface plates, an internal gear disposed around the lap surface plate, and a combination of the sun gear and the internal gear. A workpiece is attached to the planetary gear or a part that rotates together with the planetary gear, and the planetary gear rotates and revolves due to the relative rotation of the sun gear and internal gear, as well as the upper and lower lap surface plates. In a double-sided lapping machine, which processes both sides of a workpiece by rotation, the upper and lower lapping plates are rotated in the same direction at approximately the same speed, and the direction and speed of the relative rotation of the lapping plate to the revolution of the planetary gear is controlled by the planetary gear. A processing method in a double-sided lapping machine characterized by processing both sides of a workpiece in a direction and speed that are approximately equal to the rotational direction and speed of a gear.
JP63160532A 1988-06-28 1988-06-28 Processing method for double-sided lapping machine Expired - Fee Related JPH0661698B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63160532A JPH0661698B2 (en) 1988-06-28 1988-06-28 Processing method for double-sided lapping machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63160532A JPH0661698B2 (en) 1988-06-28 1988-06-28 Processing method for double-sided lapping machine

Publications (2)

Publication Number Publication Date
JPH029570A true JPH029570A (en) 1990-01-12
JPH0661698B2 JPH0661698B2 (en) 1994-08-17

Family

ID=15717006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63160532A Expired - Fee Related JPH0661698B2 (en) 1988-06-28 1988-06-28 Processing method for double-sided lapping machine

Country Status (1)

Country Link
JP (1) JPH0661698B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5349794A (en) * 1992-03-27 1994-09-27 Shimizu Construction Co., Ltd. Wall for damping vibration
US5462141A (en) * 1993-05-07 1995-10-31 Tayco Developments, Inc. Seismic isolator and method for strengthening structures against damage from seismic forces
JP2010139588A (en) * 2008-12-10 2010-06-24 Hoya Corp Method of manufacturing substrate for mask blank, method of manufacturing mask blank and method of manufacturing mask

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4036479Y1 (en) * 1965-07-03 1965-12-25
JPS5847459U (en) * 1981-09-29 1983-03-30 株式会社リコー lap board

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5847459B2 (en) * 1981-06-23 1983-10-22 株式会社 吉田鐵工所 Molten metal raw material briquette

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4036479Y1 (en) * 1965-07-03 1965-12-25
JPS5847459U (en) * 1981-09-29 1983-03-30 株式会社リコー lap board

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5349794A (en) * 1992-03-27 1994-09-27 Shimizu Construction Co., Ltd. Wall for damping vibration
US5462141A (en) * 1993-05-07 1995-10-31 Tayco Developments, Inc. Seismic isolator and method for strengthening structures against damage from seismic forces
US5727663A (en) * 1993-05-07 1998-03-17 Tayco Developments, Inc. Method for strengthening structures against damage from seismic forces
JP2010139588A (en) * 2008-12-10 2010-06-24 Hoya Corp Method of manufacturing substrate for mask blank, method of manufacturing mask blank and method of manufacturing mask

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