JPH0295567A - Elastic sheet for pressing work and lapping machine using it - Google Patents

Abstract

PURPOSE:To surely and always stick a work to the lap surface plate of a lapping machine by forming a work or the holder holding it or the abutting face abutting to a pressurizing plate and the projection projecting toward the pressurizing plate side or work side on an elastic sheet. CONSTITUTION:The elastic sheet 10 which is arranged between the work W coming into contact with the lap surface plate 21 of a lapping machine and a pressurizing plate 22 and for elastically transmit for the work W the pressing force of this pressurizing plate 22 has the abutting face 11 abutting to the work W or a holder 24 holding it or the pressurizing plate 22 and the projection 12 projecting toward the pressurizing plate 22 side or work W side. As a result, each work W can be pressed and sticked elastically to the lap surface plate 21 of the lapping machine by the elastic force owned by this elastic sheet 10 itself.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention provides lapping abrasive grains between the workpiece and the lapping surface plate to make the workpiece relative Mgh to the lapping surface plate. This invention relates to an elastic sheet used for surface finishing a workpiece, and a lapping machine using the same.

(Prior Art) A lapping machine is used to form a finished surface with excellent dimensional accuracy on the surface of a workpiece.

Various types such as models and vertical molds have been proposed. An example of this conventional lapping machine is a vertical lapping machine that drives a lapping plate, as shown in FIGS. 9 and 1O.

The conventional wrap shown in Fig. 9 and Fig. 1θ (
200), the workpiece (W) is placed in the work holder (200).
Insert each work holder (24) into the support hole (25) of 4) and put it into the protective ring (2 pieces) and wrap it! ! (21) It is placed a on top of the workpiece (W
), and a pressure plate (22) is brought into contact with the work holder (24) I: through a flat elastic material. Then, press the pressure plate (2
The pressing force of 2) wraps each workpiece (W) on the lap surface plate (2).
1) While pressing against the surface and adding abrasive grains, this lap is fixed! ! (21) is used to flatten the surface of the workpiece (W) that is in contact with the lap constant It (21). Please note that this conventional lap board (
200), by bringing the protective ring (23) into contact with the roller (28) of the arm (27), as shown in Fig. 1θ, the protective ring (23) and a work holder (24).

Therefore, each workpiece (W) is configured to rotate relative to each other.

By the way, as a prerequisite for finishing the surface of the workpiece m using this type of lapping machine, the surface of the lapping surface plate (21) on which the workpiece (W) comes into contact is required to be a completely smooth surface. Since this lapping plate (21) itself is also polished by abrasive grains, it is generally difficult to always ensure the smoothness of the lapping plate 11 (21). Therefore, when attempting to perform a surface finish on the workpiece (W) in micron units, it is extremely difficult to manage the surface finish using a conventional lapping machine. For this reason, as shown in Fig. 11, the workpiece (Il+) is inclined relative to the lapping surface plate (21), and grinding scratches, etc. remain on the finished surface of the workpiece (W). Otherwise, it becomes necessary to perform wrapping for an extremely long time. This is a phenomenon that often occurs when the workpiece (ml) is a hard one made of so-called fine ceramics.

Of course, according to the study by the present inventors, the cause of lapping defects such as remaining grinding scratches is due to the above-mentioned lapping surface plate (2).
Problems in 1) are not serious (for example, incorrect setting of each workpiece (W) to the work holder (24), incorrect clearance setting of the work holder (24) etc. to the lap surface plate (21), or pressure play) It is thought that there is an imbalance in the pressing force on each workpiece (W) or workpiece holder (24) due to (22), and that these defects are intricately intertwined, resulting in a lap failure on the surface of the workpiece (ml). It will be done.

Regardless of the cause, it is necessary to take some means to form a highly accurate lapped surface.As a result of the inventor's extensive research, in short, each workpiece (W)
The surface to be machined is brought into complete contact with the lap surface plate (21), and each workpiece (W) is lapped at the surface plate (21).
I realized that I needed to press evenly against 1),
The present invention was completed.

(Problem to be solved by the invention) The present invention has been made based on the above circumstances.
The HN that we are trying to solve is the lack of lapping in surface finishing processing using a lapping machine.

The purpose of the invention according to the first claim is:
The pressing force by the pressure plate (22) is applied to each workpiece (If).
Elastic sheet (10) that can be applied evenly to
The goal is to provide this through a simple configuration. The invention according to the second claim also provides an elastic sheet (10) as described above.
An object of the present invention is to provide a lap It (20) that can finish the processed surface of a work (It) with high precision by using the lap It (20).

(Means for solving all) In order to solve the above problems, the means taken by the invention according to the first claim is as follows: an elastic sheet (lO) disposed between the pressure plate (22) and the pressure plate (22) for elastically transmitting the pressing force of the pressure plate (22) to the workpiece m;

This elastic sheet (10) is connected to the contact surface that contacts the workpiece (ml), the holder (24) that holds it, or the pressure plate (22), and the pressure plate (22).
22) side or the workpiece m side (12)
) is an elastic sheet for suppressing a workpiece.

That is, this elastic sheet (lO) is
Alternatively, in order to individually press the work holder (24) holding the work holder (24), the direction of the pressing force (pressing force) from the pressing plate (22) constituting the wrap W (20) is directed to the protrusion (1).
2).
This elastic sheet (IO) itself is used to elastically press each workpiece (W) against the lap surface plate (20) of the wrap It (20) by the elastic force that it has.

In addition, the invention according to the second claim employs the elastic sheet (IO) according to the first claim, while each workpiece (II)
It is a lapping machine (20) that performs precise flat finishing of
What is its specific composition?

[The workpiece (W) is pressed toward the lap platen II (20) by the pressure plate (22) via the elastic sheet (lO), and the workpiece (W) is pressed onto the lap platen (20).
In the lapping machine (21), the surface finish is achieved by applying a relatively slow effect to the surface.

The elastic sheet (0 openings) is connected to a contact surface that comes into contact with the workpiece (W), a holder (24) that holds it, or the pressure plate (22), and a
) side or the workpiece (lit) side (
12), and the protrusion (12) of the elastic sheet (lO) is brought into contact with the pressure plate (22) side or the workpiece m side, and the pressure plate (22) is A wrap characterized in that pressing force is transmitted from the elastic sheet (!0) to the workpiece (W) via the protrusion (12)! (21) J.

(Function of the invention) Each of the inventions has the following functions by being constructed as described below, and these will be explained in separate sections.

Regarding the elastic sheet (10) of the first claim, first, the elastic sheet (lO) has sufficient elastic force because it is entirely formed of an elastic material such as rubber, Pressure plate (22) of wrap fi (20)
), each workpiece (w) wraps at constant I
It deforms elastically to ensure reliable contact with I(21). In other words, the elastic sheet (lO) has a contact surface (1
1), but this contact surface (11) is in close contact with the workpiece (W) side or the pressure plate (22) side of the wrap 51k (20), as shown in FIG. do. In the case of the example shown in Fig. 1, the contact surface (11) of the elastic sheet (lO) is on the workpiece (W) side;
The elastic sheet (!0) comes into contact with the entire workpiece (W) through this contact surface (11), while in the case of the example shown in FIG. ) is on the pressure plate (22) side, and the first elastic sheet (10) is pressed against the pressure plate (!1) by this contact surface (!1).
As a result, the first elastic sheet (10) deforms elastically and presses against the pressure plate (22).
The pressing force of 2) is reliably transmitted to the workpiece (W), or the pressing force of the pressure plate (22) is reliably received.

Further, the protrusion (12) of the first elastic sheet (!0) functions as follows. In the case of the example shown in Figure 1, this protrusion (+
2) directly receives the pressing force from the pressure plate (22) and distributes it over the entire workpiece from the contact surface (11). At this time, if the surface with the wrap constant 91 (21) is not a completely parallel surface, but as shown in the 11th [2i1]
If it is partially tilted, the lap constant It of the work (W)
(21) and the pressing force of the pressure plate (2z) applied to the protrusion (12), the workpiece (W) is moved around the protrusion (12) approximately toward the workpiece (II).
The machined surface is rotated so that the upper surface of the lap constant @ (21) is perfectly aligned. Then, the lap constant It(2
Since 1) moves relative to the workpiece (fushi), the above action occurs at any time depending on the state of the plane of the wrap constant 'It (21), and the elastic sheet (! Since 0) is made of an elastic material,
Workpiece (W) according to the planar shape of lap constant a (21)
The rotation is not sudden but smooth.

The above also applies to the example shown in FIG.

That is, in this case, the pressing force from the pressure plate (22) is transmitted to the workpiece (W) or the workpiece holder (24) holding it via the protrusion (12), but if the workpiece m If the surface to be machined and the upper surface of the lap surface plate (21) are not in complete contact, the pressing force partially applied to the workpiece (W) from the protrusion (12) will cause the workpiece (W) to
W) rotates so as to be in complete contact with the lap surface plate (21).

Of course, there are more than one effects, both in the case of Fig. 1 and in the case of Fig. 5.
By forming the protrusion (12) at the center of the elastic sheet (10), it becomes more reliable.In other words, this protrusion (12) allows the pressure plate (22) to move the force from the workpiece (IF) approximately to the center. The work (W) or the work holder (24) that holds it by hanging it
The workpiece (ml) is rotated to a predetermined position without being affected by gravity or the like.

・Regarding the wrap 91 (20) according to the second claim, since this wrap II (20) employs the E valve control sheet (10), the elastic sheet (lO) is not used when processing the workpiece (W). It functions as described above, and thereby ensures that the surface of each workpiece (W) to be machined is finished.

(Examples) Next, each invention will be described in detail according to examples shown in the drawings.

- Regarding the elastic sheet (10) according to the first claim, first,
FIG. 1 shows a sectional view showing an example of the elastic sheet (10) according to item M, and this elastic sheet (1u) is integrally formed of an elastic material such as rubber. .

As shown in FIGS. 1 and 2, this elastic sheet (10) has a contact surface (11
), and a side wall (15) for fitting and holding the work (W) is formed on the outer periphery of this contact surface (11). A protrusion (!2) is integrally formed approximately at the center of this elastic sheet (lO) and on the opposite side from the contact surface (11). This allows this elastic sea) (10
) is said to elastically apply a pressing force from the pressure plate (22) to the held workpiece (W), and when the lap constant gl (21) is not a perfect plane, Workpiece (W) t[! approximately centered on protrusion (12). i
] by moving the workpiece (If) to a lap constant of '1'.
(21) shall be firmly attached to the upper surface.

This elastic sheet (1G) may be used independently as shown in Fig. 1, but in order to facilitate positioning with respect to the lapping machine (20), it may be used as shown in Fig. 3. It is also considered to be a composition. That is, a plurality of elastic sheets (lO) are connected by a connecting part (13) and configured as an integrated structure. In this case, each elastic sheet (lO) needs to independently suppress and rotate each workpiece (W) with respect to the upper surface of the wrap constant It (21), so each connecting portion (13) is connected to the elastic sheet ( 1O) is made of a material having the same elasticity as the material itself. In other words, each connection (
1) is of course capable of positioning each elastic sheet (10) when setting it against the protective ring (23) etc. that constitute the wrap It (20) described in S. The elastic sheets (10) are connected to each other to such an extent that the elastic sheets (10) independently perform the above-mentioned functions, and for this purpose, it is most preferable to use an elastic material.

It should be noted that each elastic sheet (10) may be constructed with a reinforcing material (14) interposed at its center, as shown in FIG. 4. In this case, the pressing force from the pressure plate (22) is applied to the reinforcing material (14).
This allows reliable and uniform transmission to the workpiece (W).

5F2N shows an example in which the elastic sheet (10) of FIG. 1 is used in reverse. That is, this elastic sheet (1
0) also has a contact surface (11) and a protrusion (12), but the contact surface (11) contacts the lower surface of the pressure plate (22) of the wrap l1 (20) at t1. The protrusion (12) on the - side is in contact with the workpiece (W) side. Even when used in this way, the elastic sheet (1
0) operates in the same way as the case shown in FIG. In addition, Fig. 6 shows an elastic sheet (■0) used in the same way as Fig. 61s5, but in this case, it holds multiple workpieces (W) instead of - workpieces (w). The pressing force from the pressure plate (22) is transmitted to the work holder (24). However, regarding the action of the elastic sheet (10) on the workpiece m, the fifth
The case shown in the figure is, of course, almost the same as the case shown in Fig. 1, but the elastic sheet (10) shown in Fig. 6 is suitable for surface processing of a relatively small workpiece (W). be.

・About the wrap li (2G) according to the second claim The elastic sheet (lO) as described above is applied to the wrap It (2G) according to the second claim as shown in FIG. It is something.

This wrap It (20) presses the workpiece (W) toward the wrap surface plate (21) by the pressure plate (22) via the elastic sheet (10), and also pushes the workpiece (w) at a wrap constant of 1 ( 21), the surface of the workpiece (toad) is finished by moving it relative N. That is, the lapping machine (20) of this example is as follows:
The lap constant @ (21) is rotated in a horizontal state, and each workpiece (tung) is rotated with respect to this lap constant @ (21).
The surface of the workpiece (1) is finished by pressing it at a certain position.

In this wrap @ (20), a primary type is used to press each workpiece (W) at a fixed position. That is, first, the auxiliary holder (26) is inserted into the protective ring (23), and the work holder (24) is housed in the plurality of openings formed in the auxiliary holder (26). The work holder (24) holds a work (W) inserted into each of its support holes (25), and may or may not be used depending on the size of the work (W). That is, the auxiliary holder (26) is the work holder (24).
) in some cases. The elastic sheet (10) is placed between the work holder (24) or the auxiliary holder (26) and the pressure plate (22) located above.
) are placed.

In addition, the wrap shown in this Figure 7! 1 (20), the arm (27) is fixedly arranged on the lap surface plate (21), and each roller (28) provided on this arm (27)
The protective ring (23) is supported by. As a result, when the lap constant 11 (21) rotates.

The protective ring (23) is supported at a fixed position by the arm (27), and the protective rings (2) are rotated by each roller (2B)M by the rotational force of the lap constant II (21). It is. This allows the protective ring (23
) is the planetary rotation M relative to the lap constant It(21)
lh.

(Effect of the invention) As explained above, in the invention according to the first claim,
As detailed in the above example.

"It is placed between the workpiece (W) in contact with the lap constant @ (21) of the lapping machine (20) and the pressure plate (22),
The pressing force of this pressure plate (22) is applied to the workpiece (w).
An elastic sheet (10) for elastically transmitting information to the user.

This elastic sheet (lO) is connected to the contact surface that contacts the workpiece (W), the holder (24) that holds it, or the pressure plate (22), and the pressure plate (22).
A protrusion (
12) is characterized by the elasticity that allows the pressing force of the pressure plate (22) to be applied equally to each workpiece (W). The sheet (lO) can be provided with a simple configuration.

That is, according to this elastic sheet (10), the workpiece (
11) 99puI (2G) Nolap constant'J (21)
This allows the surface of the work (W) to be reliably finished. In other words, when finishing the surface of a workpiece (W), with a conventional lapping machine, considerable attention is paid to the setting position and clearance of the workpiece (W), and the smoothness of the lapping surface plate. I had to use this elastic sheet (
By using 1O), the surface of the workpiece (W) can be precisely finished without paying the above-mentioned precautions. Furthermore, since the elastic sheet (10) is made of an elastic material, it can reliably and smoothly bring the workpiece (W) into close contact with the lap constant IF (21).

Furthermore, in the lapping machine (2o) according to the second claim,
Since the elastic sheet (10) having the above-mentioned effects is employed, this lapping machine (2G) can reliably finish the surface of the workpiece (toad). In addition, Wrap'II (20) that uses this elastic sheet (10)
The surface of the lapping surface plate (21) does not need to be always perfectly flat, and its maintenance can be reduced.

[Brief Description of the Drawings] Figure 1 is a sectional view showing an elastic sheet according to the first claim, w
Figure SZ is an open plan view, Figure W43 is a plan view showing an example in which a plurality of elastic sheets are connected by a connecting part, and No. 4rA is a sectional view showing another example of the elastic sheet. m! III is a sectional view showing a state where the elastic sheet is used upside down, and FIG. 6 is a sectional view corresponding to FIG. 5 showing a case where a plurality of workpieces are held by a work holder. FIG. 157 is an exploded perspective view showing essential parts of the lapping machine according to the second claim, and FIG. 8 is a partial sectional view showing a state in which the surface of a workpiece is being finished by the lapping machine shown in FIG. 7. Figure 9 is an exploded perspective view showing the end of a conventional lapping machine.
The θ diagram is a plan view of the protective ring supported by the arm;
FIG. 11 is a partial sectional view showing a workpiece being processed by a conventional lapping machine. Explanation of symbols 10-...Elastic sheet, 11-...Abutment surface, +2-...
・Protrusion, 20-...Lap plate, 21-...Lap surface plate, 22...Pressure plate, W...Work.

Claims (1)

[Claims] 1) A device for elastically transmitting the pressing force of the pressure plate to the workpiece, which is disposed between the workpiece that contacts the lapping surface plate of the lapping machine and the pressure plate. an elastic sheet, the elastic sheet having a contact surface that contacts the workpiece, a holder for holding the workpiece, or the pressure plate;
An elastic sheet for pressing a workpiece, characterized in that it has a protrusion that projects toward the pressure plate side or the workpiece side. 2) A lapping machine in which the workpiece is pressed against the lapping plate by a pressure plate via an elastic sheet, and the surface of the work is finished by moving the work relative to the lapping platen, a contact surface of the elastic sheet that contacts the workpiece, a holder for holding the workpiece, or the pressure plate;
and a protrusion protruding toward the pressure plate side or the workpiece side, and the protrusion of the elastic sheet is brought into contact with the pressure plate side or the workpiece side to prevent the pressure plate from being pressed. A lapping machine characterized in that pressure is transmitted from the elastic sheet to the workpiece via the protrusion.