JPH029438U - - Google Patents
Info
- Publication number
- JPH029438U JPH029438U JP8838188U JP8838188U JPH029438U JP H029438 U JPH029438 U JP H029438U JP 8838188 U JP8838188 U JP 8838188U JP 8838188 U JP8838188 U JP 8838188U JP H029438 U JPH029438 U JP H029438U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer stage
- region
- disposed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8838188U JPH029438U (me) | 1988-07-01 | 1988-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8838188U JPH029438U (me) | 1988-07-01 | 1988-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH029438U true JPH029438U (me) | 1990-01-22 |
Family
ID=31312951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8838188U Pending JPH029438U (me) | 1988-07-01 | 1988-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029438U (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999016121A1 (fr) * | 1997-09-23 | 1999-04-01 | Tokyo Electron Limited | Dispositif et procede de detection de substrat |
-
1988
- 1988-07-01 JP JP8838188U patent/JPH029438U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999016121A1 (fr) * | 1997-09-23 | 1999-04-01 | Tokyo Electron Limited | Dispositif et procede de detection de substrat |