JPH0294381U - - Google Patents
Info
- Publication number
- JPH0294381U JPH0294381U JP119289U JP119289U JPH0294381U JP H0294381 U JPH0294381 U JP H0294381U JP 119289 U JP119289 U JP 119289U JP 119289 U JP119289 U JP 119289U JP H0294381 U JPH0294381 U JP H0294381U
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- cryopump
- pump case
- conductive material
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989001192U JPH0415992Y2 (https=) | 1989-01-11 | 1989-01-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989001192U JPH0415992Y2 (https=) | 1989-01-11 | 1989-01-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0294381U true JPH0294381U (https=) | 1990-07-26 |
| JPH0415992Y2 JPH0415992Y2 (https=) | 1992-04-09 |
Family
ID=31200869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989001192U Expired JPH0415992Y2 (https=) | 1989-01-11 | 1989-01-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415992Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS606085A (ja) * | 1983-06-23 | 1985-01-12 | Arubatsuku Kuraio Kk | クライオポンプ装置 |
-
1989
- 1989-01-11 JP JP1989001192U patent/JPH0415992Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS606085A (ja) * | 1983-06-23 | 1985-01-12 | Arubatsuku Kuraio Kk | クライオポンプ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0415992Y2 (https=) | 1992-04-09 |