JPH0294381U - - Google Patents

Info

Publication number
JPH0294381U
JPH0294381U JP119289U JP119289U JPH0294381U JP H0294381 U JPH0294381 U JP H0294381U JP 119289 U JP119289 U JP 119289U JP 119289 U JP119289 U JP 119289U JP H0294381 U JPH0294381 U JP H0294381U
Authority
JP
Japan
Prior art keywords
cryopanel
cryopump
pump case
conductive material
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP119289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0415992Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989001192U priority Critical patent/JPH0415992Y2/ja
Publication of JPH0294381U publication Critical patent/JPH0294381U/ja
Application granted granted Critical
Publication of JPH0415992Y2 publication Critical patent/JPH0415992Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1989001192U 1989-01-11 1989-01-11 Expired JPH0415992Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989001192U JPH0415992Y2 (enrdf_load_stackoverflow) 1989-01-11 1989-01-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989001192U JPH0415992Y2 (enrdf_load_stackoverflow) 1989-01-11 1989-01-11

Publications (2)

Publication Number Publication Date
JPH0294381U true JPH0294381U (enrdf_load_stackoverflow) 1990-07-26
JPH0415992Y2 JPH0415992Y2 (enrdf_load_stackoverflow) 1992-04-09

Family

ID=31200869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989001192U Expired JPH0415992Y2 (enrdf_load_stackoverflow) 1989-01-11 1989-01-11

Country Status (1)

Country Link
JP (1) JPH0415992Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS606085A (ja) * 1983-06-23 1985-01-12 Arubatsuku Kuraio Kk クライオポンプ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS606085A (ja) * 1983-06-23 1985-01-12 Arubatsuku Kuraio Kk クライオポンプ装置

Also Published As

Publication number Publication date
JPH0415992Y2 (enrdf_load_stackoverflow) 1992-04-09

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