JPH0293730U - - Google Patents
Info
- Publication number
- JPH0293730U JPH0293730U JP224489U JP224489U JPH0293730U JP H0293730 U JPH0293730 U JP H0293730U JP 224489 U JP224489 U JP 224489U JP 224489 U JP224489 U JP 224489U JP H0293730 U JPH0293730 U JP H0293730U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- strain
- thin
- sensor chip
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP224489U JPH0293730U (cs) | 1989-01-12 | 1989-01-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP224489U JPH0293730U (cs) | 1989-01-12 | 1989-01-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0293730U true JPH0293730U (cs) | 1990-07-25 |
Family
ID=31202845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP224489U Pending JPH0293730U (cs) | 1989-01-12 | 1989-01-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0293730U (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001033328A (ja) * | 1999-07-27 | 2001-02-09 | Matsushita Electric Works Ltd | 半導体圧力センサ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5750479A (en) * | 1980-09-10 | 1982-03-24 | Hitachi Ltd | Detector for detecting pressure and pressure difference of semiconductor |
JPS59125032A (ja) * | 1982-12-29 | 1984-07-19 | Fuji Electric Co Ltd | 差圧測定装置 |
-
1989
- 1989-01-12 JP JP224489U patent/JPH0293730U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5750479A (en) * | 1980-09-10 | 1982-03-24 | Hitachi Ltd | Detector for detecting pressure and pressure difference of semiconductor |
JPS59125032A (ja) * | 1982-12-29 | 1984-07-19 | Fuji Electric Co Ltd | 差圧測定装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001033328A (ja) * | 1999-07-27 | 2001-02-09 | Matsushita Electric Works Ltd | 半導体圧力センサ |