JPH0293346A - Foreign matter analyser - Google Patents
Foreign matter analyserInfo
- Publication number
- JPH0293346A JPH0293346A JP24576888A JP24576888A JPH0293346A JP H0293346 A JPH0293346 A JP H0293346A JP 24576888 A JP24576888 A JP 24576888A JP 24576888 A JP24576888 A JP 24576888A JP H0293346 A JPH0293346 A JP H0293346A
- Authority
- JP
- Japan
- Prior art keywords
- foreign matter
- foreign object
- foreign
- light
- liquid crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 238000004458 analytical method Methods 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 6
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 27
- 210000002858 crystal cell Anatomy 0.000 abstract description 23
- 210000004027 cell Anatomy 0.000 abstract description 11
- 230000001678 irradiating effect Effects 0.000 abstract description 5
- 239000011521 glass Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000011179 visual inspection Methods 0.000 description 3
- 239000004952 Polyamide Substances 0.000 description 2
- 208000003464 asthenopia Diseases 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002073 fluorescence micrograph Methods 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 102000004169 proteins and genes Human genes 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 241000519995 Stachys sylvatica Species 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6456—Spatial resolved fluorescence measurements; Imaging
- G01N2021/646—Detecting fluorescent inhomogeneities at a position, e.g. for detecting defects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明は異物の分析装置に係わり、特に、液晶セル用ガ
ラス基板等の透明基板に付着した異物を検出してその種
類を分析する異物の分析装置に関する。[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a foreign matter analysis device, and in particular, the present invention relates to a foreign matter analysis device, and in particular, detects foreign matter attached to a transparent substrate such as a glass substrate for a liquid crystal cell, and determines the type of foreign matter. This invention relates to a foreign substance analysis device for analyzing foreign matter.
（従来の技術）
一対の透明基板の間に配置されて電気信号を印加するこ
とにより、所定の文字や画像を表示する表示器、例えば
、液晶表示器やエレクトロクロミンク表示器は、通常、
埃や塵等の異物のセル内への混入を防ぐために、クリー
ンルーム内で組立てられている。しかし、表示器の中に
は、セル内にポリアミド系化合物や蛋白質等の有機物が
混入し、この異物が核となって黒色あるいは白色のスポ
ットが表示面上に生じて、画像が映出できないものがあ
った。これらの有機物は製造装置に用いられている樹脂
の摩耗粉や組立作業者の着衣等から生じたものであり、
クリーンルーム等の製造環境を整えたとしても、製造装
置の摩耗粉や組立て作業者の着衣からの繊維等の異物を
完全に除去するのは限界がある。(Prior Art) A display device, such as a liquid crystal display or an electrochromic display, which is placed between a pair of transparent substrates and displays predetermined characters or images by applying an electric signal, usually
It is assembled in a clean room to prevent foreign matter such as dust from entering the cell. However, in some display devices, organic substances such as polyamide compounds and proteins get mixed into the cells, and these foreign substances act as nuclei, forming black or white spots on the display surface, making it impossible to project an image. was there. These organic substances are generated from abrasion powder of resin used in manufacturing equipment and clothes of assembly workers, etc.
Even if a manufacturing environment such as a clean room is prepared, there is a limit to completely removing foreign matter such as wear particles from manufacturing equipment and fibers from the clothes of assembly workers.
そこで、組立てを終了した液晶セルについて、異物の混
入の有無を検査する必要がある。この検査は、従来、作
業者が肉眼によって目視で行っていた。即ち、液晶セル
内に混入した異物は、セルの電極に通電して文字や図形
を表示した時に、黒点あるいは白点等のスポットを与え
ることが知られており、この現象を利用して、判定して
いる。Therefore, it is necessary to inspect the assembled liquid crystal cell for the presence or absence of foreign matter. Conventionally, this inspection has been performed visually by an operator. In other words, it is known that foreign matter mixed into a liquid crystal cell causes spots such as black dots or white dots when electricity is applied to the cell's electrodes to display characters or figures, and this phenomenon can be used to make judgments. are doing.
しかし、目視による判定は、作業者によって判断基準が
まちまちであるために、客観性にかけるとともに、作業
者の目の疲労も大きいという問題点がある。また、この
異物の混入は、液晶セルに通電して行うために、液晶注
入前の半完成品のガラス基板の内面に付着した異物を検
出することが困難であった。However, visual judgment has a problem in that the criteria for judgment vary depending on the operator, and it not only lacks objectivity but also causes significant eye fatigue for the operator. Furthermore, since this foreign matter is introduced by energizing the liquid crystal cell, it is difficult to detect foreign matter that has adhered to the inner surface of the semi-finished glass substrate before the liquid crystal is injected.
さらに、この異物が混入した原因を明らかにして十分な
製造工程の管理を行うために、異物の種類を分析する必
要がある。しかし、従来は、異物を分析するためには、
液晶セルを分解して異物を採取しなければならなかった
。Furthermore, it is necessary to analyze the type of foreign matter in order to clarify the cause of the foreign matter being mixed in and to adequately control the manufacturing process. However, conventionally, in order to analyze foreign substances,
The liquid crystal cell had to be disassembled to collect the foreign matter.
（発明が解決しようとする課題）
前述した様に、従来の液晶表示器のガラス基板等の透明
基板への異物の付着の有無は、組立てられた液晶パネル
に通電して、作業者の目視により行われていたために、
その判定は客観性にかけるとともに、作業者の目の疲労
も大きく、しかも、半完成品のガラス基板に対しては行
なえないという問題点があった。(Problem to be Solved by the Invention) As mentioned above, the presence or absence of foreign matter adhering to a transparent substrate such as a glass substrate of a conventional liquid crystal display can be determined by visual inspection by an operator by energizing the assembled liquid crystal panel. Because it was done,
This judgment requires objectivity, causes great eye fatigue for the operator, and is problematic in that it cannot be carried out on semi-finished glass substrates.
本発明の目的は、表示器の電極に通電することなく、ま
た、作業者の目視によらず、ガラス基板等の透明基板に
付着した異物を検出して分析する異物の分析装置を提供
することにある。An object of the present invention is to provide a foreign matter analysis device that detects and analyzes foreign matter attached to a transparent substrate such as a glass substrate without energizing the electrodes of a display and without visual inspection by an operator. It is in.
［発明の構成〕
（課題を解決するための手段および作用）本発明は、透
明基板に対して第１の光路を介して第１の光を照射する
第１の光手段と、透明基板に対して第２の光路を介して
第２の光を照射する第２の光手段と、前記透明基板と第
１および第２の光路との間の相対位置を変化させる位置
決め機構と、第１の光が照射された部分の基板表面の画
像情報を得る検出手段と、この検出手段からの画像情報
に基づき異物の有無を認知し、透明基板上の異物の位置
情報を得る位置情報検出手段と、この異物の位置情報を
記憶する記憶手段と、第２の光路を異物の位置に相対的
に移動するように異物の位置情報に基づいて位置決め機
構をυ制御する制御手段と、第２の光を照射することに
より異物から発生された蛍光を検知して異物の種類を判
別する判別手段とを有することを特徴とする異物の分析
装置である。[Structure of the Invention] (Means and Effects for Solving the Problems) The present invention includes a first light means for irradiating a first light onto a transparent substrate via a first optical path; a second optical means for irradiating second light through a second optical path; a positioning mechanism for changing the relative position between the transparent substrate and the first and second optical paths; a detection means for obtaining image information of the substrate surface of the irradiated portion; a position information detection means for recognizing the presence or absence of a foreign object based on the image information from the detection means and obtaining position information of the foreign object on the transparent substrate; a storage means for storing positional information of the foreign object; a control means for controlling the positioning mechanism υ based on the positional information of the foreign object so as to move the second optical path relative to the position of the foreign object; and irradiation of the second light. This is a foreign matter analysis device characterized by having a discriminating means for detecting fluorescence generated from the foreign matter and determining the type of the foreign matter.
本発明の異物の分析装置は、第１の光手段から放射され
、透明基板上における異物の付着の有無を検出するため
の光としてはレーザ光を、また、第２の光手段から放射
され、検出された異物の種類を検知するための光として
は紫外線を用いることができる。さらに、異物から発せ
られた蛍光を検知して異物の種類を判別するのに、蛍光
顕微鏡を用いることができる。The foreign matter analysis device of the present invention includes a laser beam emitted from the first optical means to detect the presence or absence of foreign matter adhering to the transparent substrate, and a laser beam emitted from the second optical means, Ultraviolet light can be used as light for detecting the type of foreign matter detected. Furthermore, a fluorescence microscope can be used to detect the fluorescence emitted from a foreign object and determine the type of foreign object.
本発明の異物の分析装置では、透明基板の表面を第１の
光により走査し、表面上の異物の有無および異物の位置
を検出し、この検出された位置情報に基づいて第２の光
を照射する位置合せが行われるので、第２の光を異物に
正確に照射でき、しかも、第２の光が照射されて異物か
ら発せられる蛍光を蛍光顕微鏡写真もしくは、画像処理
された画像に基づいて、異物の種類を検知することがで
きる。In the foreign matter analysis device of the present invention, the surface of a transparent substrate is scanned with the first light, the presence or absence of foreign matter on the surface and the position of the foreign matter are detected, and the second light is emitted based on the detected position information. Since the irradiation position is adjusted, the foreign object can be accurately irradiated with the second light, and the fluorescence emitted from the foreign object when the second light is irradiated can be measured based on a fluorescence microscope photograph or an image processed image. , the type of foreign object can be detected.
（実施例） 以下、本発明の実施例について図面を用いて説明する。(Example) Embodiments of the present invention will be described below with reference to the drawings.
図面は、一対の透明なガラス基板がスペーサを介して保
持された液晶セルに適応した分析装置の構成を説明する
ブロック図である。この分析装置は単色レーザ光（１）
を放射するレーザ光発生装置（４）と、紫外線（２）を
放射する光源（８）と、測定用液晶セル（３）が載置さ
れ、図中の矢印で示される方向に移動自在であると共に
、これらレーザ光（１）および紫外線（２）が照射され
る液晶セル（３）上の照射位置を変える位置決めｉ構（
７）とを有する。この位置決め機構（７）はコントロー
ラ（２１）の制御の下に、パルスモータ（６）により、
レーザ光（１）が液晶セル（３）の全面を走査できる様
に、また、紫外線（２）が液晶セル（３）内の異物に照
射される様に、２方向に可動自在に構成されている。レ
ーザ光（１）による液晶セル（３）内の異物の有無およ
び異物の位置を表わす画像情報を１ｑるための受光素子
（５）が液晶セル（３）を挟んでレーザ発生装置（４）
と対向して配置されている。この受光素子（５）は補助
位置決め機構（２６）に取付けられて、常にレーザ光（
１）を受光する様にコントローラ（２１）の制御の下で
、パルスモータ（１６）により、その位置が微調整され
る。The drawing is a block diagram illustrating the configuration of an analysis device adapted to a liquid crystal cell in which a pair of transparent glass substrates are held via a spacer. This analyzer uses a monochromatic laser beam (1)
A laser light generator (4) that emits ultraviolet light (4), a light source (8) that emits ultraviolet light (2), and a measurement liquid crystal cell (3) are mounted, and are movable in the direction indicated by the arrow in the figure. At the same time, there is a positioning structure (i) that changes the irradiation position on the liquid crystal cell (3) where these laser beams (1) and ultraviolet rays (2) are irradiated.
7). This positioning mechanism (7) is operated by a pulse motor (6) under the control of a controller (21).
It is configured to be movable in two directions so that the laser beam (1) can scan the entire surface of the liquid crystal cell (3), and so that the ultraviolet rays (2) can be irradiated to foreign matter within the liquid crystal cell (3). There is. A light-receiving element (5) for receiving image information indicating the presence or absence of a foreign object in the liquid crystal cell (3) and the position of the foreign object by the laser beam (1) is connected to the laser generator (4) with the liquid crystal cell (3) in between.
is placed opposite. This light-receiving element (5) is attached to the auxiliary positioning mechanism (26) and is always connected to the laser beam (
1), its position is finely adjusted by the pulse motor (16) under the control of the controller (21).
また、この分析装置は紫外線（２）を照射することによ
り異物から発生される蛍光を検知するために、蛍光顕微
鏡（１７）、テレビカメラ（１４）、画像処理装置（１
５）およびカメラ（１３）を有する。この蛍光顕微鏡（
１７）は紫外線除去フィルタ（９）、像を結ぶためのレ
ンズ（１０）、カメラ（１３）での泥影を行うためのハ
ーフミラ−（１１）、および、ミラー（１２）を含む。This analyzer also includes a fluorescence microscope (17), a television camera (14), an image processing device (1
5) and a camera (13). This fluorescence microscope (
17) includes an ultraviolet removal filter (9), a lens (10) for forming an image, a half mirror (11) for taking a shadow image with a camera (13), and a mirror (12).
このテレビカメラ（１４）および画像処理装置（１５）
は液晶セル（３）内の異物の有無および異物の位置情報
を１ｑるためにも同様に用いられる。This television camera (14) and image processing device (15)
is similarly used to determine the presence or absence of a foreign object in the liquid crystal cell (3) and the position information of the foreign object.
ざらに、この分析装置は、画像処理装置（１５）からの
アナログ信号をディジタル信号に変換するためのＡ／Ｄ
変換器（２３）、異物の有無を認知すると共に、異物の
位置情報をＬさらに、前述の位置決め機構（７）等を制
御するコンピュータ（２０）、コンピュータ（２０）か
ら伝送される位置情報等の測定データを記憶するメモリ
（２２）、および、適宜、コンピュータ（２０）のデー
タを入出力するためのフロッピーディスク（２４）並び
にプリンタ（２５）を有する。Roughly speaking, this analysis device includes an A/D for converting an analog signal from an image processing device (15) into a digital signal.
A converter (23) recognizes the presence or absence of a foreign object, and also transmits position information of the foreign object, and a computer (20) that controls the positioning mechanism (7), etc., transmits position information etc. from the computer (20). It has a memory (22) for storing measurement data and, if appropriate, a floppy disk (24) and a printer (25) for inputting and outputting data to the computer (20).
次に、この分析装置の動作を説明する。先ず、測定用液
晶セル（３）を位置決め機構（７）に載置し、セル（３
）内の異物の有無および異物の位置を検出するために、
セル（３）にレーザ光（１）を照射する。Next, the operation of this analyzer will be explained. First, the measurement liquid crystal cell (3) is placed on the positioning mechanism (7), and the cell (3) is placed on the positioning mechanism (7).
) to detect the presence or absence of a foreign object and the location of the foreign object.
The cell (3) is irradiated with the laser light (1).
このセル（３）を透過したレーザ光（１）は受光素子（
５）に入射して、画像情報に変換される。この間、受光
素子（５）はレーザ光（１）が照射される様に常に補助
位置決め機構（２６）を介してパルスモータ（１６）に
より、その位置が微調整される。The laser beam (1) transmitted through this cell (3) is transmitted to the light receiving element (
5) and is converted into image information. During this time, the position of the light receiving element (5) is always finely adjusted by the pulse motor (16) via the auxiliary positioning mechanism (26) so that the light receiving element (5) is irradiated with the laser beam (1).
受光素子（５）によって得られた画像または画像情報は
常にテレビカメラ（１４）を介して画像処理装置（１５
）に送られる。この画像情報は、付着した異物の有無が
判断できる様に画像処理装置（１５）で処理され、Ａ／
Ｄ変換器（２３）によりデジタル信号化された後、コン
ピュータ（２０）に送られる。このディジタル信号に基
づき、コンピュータ（２０）で異物の有無か認知される
と共に、異物の位置情報が得られる。この位置情報はメ
モリ（２２）で記憶される。The image or image information obtained by the light receiving element (5) is always sent to the image processing device (15) via the television camera (14).
) will be sent to. This image information is processed by an image processing device (15) so that the presence or absence of attached foreign matter can be determined.
After being converted into a digital signal by a D converter (23), it is sent to a computer (20). Based on this digital signal, the computer (20) recognizes the presence or absence of a foreign object and obtains position information of the foreign object. This position information is stored in memory (22).
次に、液晶セル（３）は図中で破線で示される位置に移
動された後、メモリ（２２）中の位置情報に基づき、セ
ル（３）内の異物が存在する位置に選択的に紫外線（２
）を照射する。この紫外線（２）の照射により、異物か
ら微弱な蛍光が発生し、この蛍光による蛍光顕微鏡像を
蛍光顕微鏡（１７）により、テレビカメラ（１４）を介
して画像処理装置（１５）で捕える。この顕微鏡像は異
物の種類により、変わるために、異物の種別を判定でき
る。即ち、この蛍光顕微鏡像は、異物が作業者の着衣や
製造装置に用いられる樹脂等から生じるポリアミド系化
合物の場合は発色せず、一方、作業者の皮膚等から生じ
る蛋白質の場合は黄緑色に発色する。また、この蛍光顕
微鏡像はハーフミラ−（１１）を介して、カメラ（１３
）によって捕えて、異物の種類を判別することができる
。Next, the liquid crystal cell (3) is moved to the position indicated by the broken line in the figure, and then, based on the positional information in the memory (22), the liquid crystal cell (3) is selectively exposed to ultraviolet light at the position where the foreign matter is present in the cell (3). (2
). By irradiating the ultraviolet rays (2), weak fluorescence is generated from the foreign matter, and a fluorescence microscopic image of this fluorescence is captured by a fluorescence microscope (17) via a television camera (14) and an image processing device (15). Since this microscopic image changes depending on the type of foreign object, the type of foreign object can be determined. In other words, this fluorescence microscopy image shows that if the foreign material is a polyamide compound derived from the worker's clothing or the resin used in manufacturing equipment, no color develops, whereas if it is a protein derived from the worker's skin, the foreign matter appears yellow-green. Develops color. This fluorescence microscope image is also captured by a camera (13) through a half mirror (11).
) can be used to determine the type of foreign object.
上記実施例において用いられる単色レーデ光に代えて、
液晶セルのガラス基板越しにセル内の異物を認識できる
様な光であれば、白色光を分光した単色光等の光を用い
ることができる。また、必要に応じて、レーザ光発生装
置から放射された単色レーザ光をより細く絞ったり、受
光素子上の画像情報をより鮮明にするために、光路内に
レンズ等の光学素子を配置しても良い。Instead of the monochromatic Rede light used in the above embodiment,
As long as the light is such that foreign matter inside the cell can be recognized through the glass substrate of the liquid crystal cell, light such as monochromatic light obtained by dividing white light can be used. In addition, if necessary, an optical element such as a lens may be placed in the optical path to narrow the monochromatic laser beam emitted from the laser beam generator or to make the image information on the light receiving element clearer. Also good.
紫外線を放射する光源は、高圧水銀灯に励起フィルタを
取付けたもの等、異物が蛍光を発するように励起できる
ものであれば良い。The light source for emitting ultraviolet rays may be any source that can excite foreign matter so that it emits fluorescence, such as a high-pressure mercury lamp with an excitation filter attached.
さらに、本発明の分析装置は、液晶セルを反射鏡の上に
置く等の変更を加えれば、受光素子をレーザ発生装置と
同じ側、もしくは、レーザ発生装置に組込むことができ
、補助位置決め機構を省略する等の変更が可能である。Furthermore, with the analyzer of the present invention, by making changes such as placing the liquid crystal cell on a reflecting mirror, the light receiving element can be installed on the same side as the laser generator or incorporated into the laser generator, and an auxiliary positioning mechanism can be installed. It is possible to make changes such as omitting it.
本発明の分析装置は液晶セル内の異物の分析のみならず
、ガラス基板等の透明基板単独についても、同様に適用
できる。The analyzer of the present invention can be applied not only to the analysis of foreign substances within a liquid crystal cell, but also to a single transparent substrate such as a glass substrate.
［発明の効果］
以上の様に、本発明によれば、表示器の電極に通電する
ことなく、また、作業者の目視によらず、ガラス基板等
の透明基板に付着した異物を検出して分析する異物の分
析装置を提供することができる。[Effects of the Invention] As described above, according to the present invention, foreign matter attached to a transparent substrate such as a glass substrate can be detected without energizing the electrodes of the display and without visual inspection by the operator. An apparatus for analyzing foreign substances can be provided.
図は、本発明の実施例に基づく分析装置の構成を示すブ
ロック図である。
１・・・単色レーザ光 ２・・・紫外線３・・・
測定用液晶セル
４・・・単色レーザ光発生装置
５・・・受光素子 ７・・・位置決め機構８
・・・光源 １４・・・テレビカメラ１
５・・・画像処理装置 １７・・・蛍光顕微鏡２
０・・・コンピュータ ２１・・・コントローフ
２２・・・メモリ
代理人 弁理士 大 胡 典 夫The figure is a block diagram showing the configuration of an analysis device based on an embodiment of the present invention. 1... Monochromatic laser light 2... Ultraviolet light 3...
Measurement liquid crystal cell 4... Monochromatic laser beam generator 5... Light receiving element 7... Positioning mechanism 8
...Light source 14...TV camera 1
5... Image processing device 17... Fluorescence microscope 2
0...Computer 21...Control 22...Memory agent Patent attorney Norifu Ogo
Claims (5)
照射する第１の光手段と、透明基板に対して第２の光路
を介して第２の光を照射する第２の光手段と、前記透明
基板と第１および第２の光路との間の相対位置を変化さ
せる位置決め機構と、第１の光が照射された部分の基板
表面の画像情報を得る検出手段と、この検出手段からの
画像情報に基づき異物の有無を認知し、透明基板上の異
物の位置情報を得る位置情報検出手段と、この異物の位
置情報を記憶する記憶手段と、第２の光路を異物の位置
に相対的に移動するように異物の位置情報に基づいて位
置決め機構を制御する制御手段と、第２の光を照射する
ことにより異物から発生された蛍光を検知して異物の種
類を判別する判別手段とを有することを特徴とする異物
の分析装置。(1) A first optical means that irradiates a first light onto a transparent substrate via a first optical path, and a second optical means that irradiates a second light onto a transparent substrate via a second optical path. a positioning mechanism that changes the relative position between the transparent substrate and the first and second optical paths, and a detection means that obtains image information of a portion of the substrate surface irradiated with the first light; a position information detection means for recognizing the presence or absence of a foreign object based on image information from the detection means and obtaining position information of the foreign object on the transparent substrate; a storage means for storing position information of the foreign object; a control means for controlling a positioning mechanism based on the position information of the foreign object so as to move it relative to the position of the foreign object; and a control means for controlling the positioning mechanism based on the position information of the foreign object so as to move the foreign object relative to the position of the foreign object; What is claimed is: 1. A foreign substance analysis device comprising: a determination means for determining a foreign substance;
徴とする請求項１記載の異物の分析装置。(2) The foreign substance analysis device according to claim 1, wherein the first optical means emits a laser beam.
とする請求項１記載の異物の分析装置。(3) The foreign substance analysis device according to claim 1, wherein the second light means emits ultraviolet light.
、露出時間を算出して自動的に写真撮影もしくは画像処
理を行うことができる装置を含むことを特徴とする請求
項１記載の異物の分析装置。(4) The foreign object according to claim 1, wherein the discrimination means includes a device capable of photometrically measuring the fluorescence emitted from the foreign object, calculating an exposure time, and automatically performing photographing or image processing. analysis equipment.
る請求項１記載の異物の分析装置。(5) The foreign substance analysis device according to claim 1, wherein the discrimination means includes a fluorescence microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24576888A JPH0293346A (en) | 1988-09-29 | 1988-09-29 | Foreign matter analyser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24576888A JPH0293346A (en) | 1988-09-29 | 1988-09-29 | Foreign matter analyser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0293346A true JPH0293346A (en) | 1990-04-04 |
Family
ID=17138522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24576888A Pending JPH0293346A (en) | 1988-09-29 | 1988-09-29 | Foreign matter analyser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0293346A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003262588A (en) * | 2001-12-05 | 2003-09-19 | Mitsubishi Rayon Co Ltd | Apparatus and method for reading microarray of organism-related substance |
| WO2008052667A1 (en) * | 2006-10-31 | 2008-05-08 | Bayer Materialscience Ag | Method and device for detecting defects in a transparent solid |
-
1988
- 1988-09-29 JP JP24576888A patent/JPH0293346A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003262588A (en) * | 2001-12-05 | 2003-09-19 | Mitsubishi Rayon Co Ltd | Apparatus and method for reading microarray of organism-related substance |
| WO2008052667A1 (en) * | 2006-10-31 | 2008-05-08 | Bayer Materialscience Ag | Method and device for detecting defects in a transparent solid |
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