JPH0292179U - - Google Patents

Info

Publication number
JPH0292179U
JPH0292179U JP68189U JP68189U JPH0292179U JP H0292179 U JPH0292179 U JP H0292179U JP 68189 U JP68189 U JP 68189U JP 68189 U JP68189 U JP 68189U JP H0292179 U JPH0292179 U JP H0292179U
Authority
JP
Japan
Prior art keywords
valve
opening
vacuum
valve body
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP68189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0540384Y2 (US08124317-20120228-C00060.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989000681U priority Critical patent/JPH0540384Y2/ja
Publication of JPH0292179U publication Critical patent/JPH0292179U/ja
Application granted granted Critical
Publication of JPH0540384Y2 publication Critical patent/JPH0540384Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP1989000681U 1989-01-07 1989-01-07 Expired - Lifetime JPH0540384Y2 (US08124317-20120228-C00060.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989000681U JPH0540384Y2 (US08124317-20120228-C00060.png) 1989-01-07 1989-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989000681U JPH0540384Y2 (US08124317-20120228-C00060.png) 1989-01-07 1989-01-07

Publications (2)

Publication Number Publication Date
JPH0292179U true JPH0292179U (US08124317-20120228-C00060.png) 1990-07-23
JPH0540384Y2 JPH0540384Y2 (US08124317-20120228-C00060.png) 1993-10-13

Family

ID=31199927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989000681U Expired - Lifetime JPH0540384Y2 (US08124317-20120228-C00060.png) 1989-01-07 1989-01-07

Country Status (1)

Country Link
JP (1) JPH0540384Y2 (US08124317-20120228-C00060.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0439480A (ja) * 1990-05-31 1992-02-10 Kokusai Electric Co Ltd 真空装置用両圧対応型ロードロックバルブ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676777U (US08124317-20120228-C00060.png) * 1979-11-16 1981-06-23
JPS6058981U (ja) * 1983-09-28 1985-04-24 株式会社 徳田製作所 真空バルブ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1109078A (en) * 1975-11-05 1981-09-15 Alfred A. Schleppnik Malodor counteractants

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676777U (US08124317-20120228-C00060.png) * 1979-11-16 1981-06-23
JPS6058981U (ja) * 1983-09-28 1985-04-24 株式会社 徳田製作所 真空バルブ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0439480A (ja) * 1990-05-31 1992-02-10 Kokusai Electric Co Ltd 真空装置用両圧対応型ロードロックバルブ

Also Published As

Publication number Publication date
JPH0540384Y2 (US08124317-20120228-C00060.png) 1993-10-13

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