JPH029181Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an ultra-high vacuum connection device used in an Augier scanning electron microscope or the like used in an ultra-high vacuum region.

[Prior Art] For example, the sample chamber of an Augier scanning electron microscope or the like is required to be removable for sample exchange or the like. Therefore, such a sample chamber is constructed by connecting a plurality of containers each having a flange. Furthermore, since such sample chambers require an ultra-high vacuum, a so-called ICF flange (international conflate), which has a specially shaped edge surface on its opposing surface, is used as a flange to connect each container. A metal seal member is sandwiched between the flange (hereinafter abbreviated as ``conflat flange'') for connection.

By the way, if the container and the conflat flange are integrally formed of a material such as iron (Fe) that is not very hard, and the metal seal member is made of copper (Cu), for example, the conflat flange may be too soft. Therefore, there was a problem that the edge portion was deformed and could not withstand multiple uses. Therefore, in the conventional ultra-high vacuum connection device of this type, the container 12 and the conflat flange 13 are integrally formed of stainless steel (hereinafter referred to as SUS), and the conflat flanges are connected together. Some are connected via a metal sealing member 14 made of copper or the like, which is softer than the member used for the conflat flange. or,
As shown in Fig. 4, a container 15 is made of iron (Fe), and only the conflat flange 16 is made of a metal relatively harder than the container, such as SUS, and welded (in the figure, N indicates the welded part). ) and connected in the same manner via a metal seal member 14 made of copper, etc. are used. In addition, in FIGS. 3 and 4, E represents the edge portion.

[Problems to be solved by the invention] Among these conventional connection devices for ultra-high vacuum, the former connection device, in which both the container and the conflat flange are made of SUS, can be used for devices that handle electron beams such as electron microscopes. When used in a sample chamber, a shielding member must be used for magnetic shielding inside the container, which is uneconomical, and the sample moving mechanism, detector, etc. are located inside the sample chamber. It is difficult to provide complete magnetic shielding. On the other hand, in the latter case, where the container is made of iron, only the flange is made of SUS, and these are integrally formed by welding, the welding process is difficult because dissimilar metals are welded together. It had some drawbacks that were said to be difficult.

The present invention solves the above-mentioned drawbacks and is capable of withstanding multiple uses without welding the flange when a material with insufficient hardness is used for the container due to requirements such as magnetic shielding properties. The purpose is to provide a connection device for high vacuum.

[Means for Solving the Problems] Therefore, the present invention includes two connecting members 1 and 2 that connect the flange portions 1A and 2A facing each other, and an annular ring provided on each of the opposing surfaces of the flange portions. It includes grooves 5 and 6, rings 7 and 8 that are inserted into each of the grooves in close contact with the groove surfaces, and a seal member 10 that is held between the pair of rings. The ring has an edge portion E in a portion that contacts the sealing member, and each of the rings has an edge portion E′ in a portion that contacts the groove surface, and each of the groove surfaces fits into the edge portion E′. each ring is formed of a harder material than the connecting member.

[Operation of the device] Annular grooves 5 and 6 are provided on each of the opposing surfaces of the flange portions 1A and 2A, and rings 7 and 8 are inserted into each of the grooves in close contact with the groove surfaces. A material with higher hardness than the connecting members 1 and 2 is selected. Therefore, even if connecting members 1 and 2 are made of a material with insufficient hardness, the flange portions 1A and 2A are provided with rings with high hardness without welding dissimilar metals, and these rings The sealing member 10 is held between the two. As mentioned above, since each of the rings is made of a harder material than the connecting member, the edge portion E that contacts the sealing portion will not be damaged even after multiple uses, and therefore, this configuration is suitable for the rings. It has the effect of making the seal required to ensure an ultra-high vacuum between the seal member and the seal member durable for multiple uses. Furthermore,
Each of the rings has an edge portion E' in a portion that contacts the surface of the groove, and the surface of each of the grooves is shaped to fit into the edge portion E', so that the ring is made of a harder material than the connecting member. The ring can be inserted into the groove provided on the opposing surface of the flange portion with sufficient adhesion necessary to ensure an ultra-high vacuum, and
This configuration has the effect of making the seal between the groove surface and the ring, which is the other seal necessary to ensure an ultra-high vacuum, durable for multiple uses.

[Example] Hereinafter, an example of the present invention will be described in detail based on the accompanying drawings.

FIG. 1 is a sectional view of an embodiment of the present invention. In FIG. 1, 1 and 2 are containers made of iron (Fe), for example, which are connected to each other to form an ultra-high vacuum connection device such as a sample chamber.
Flange portions 1A and 2A formed of the same material as the containers are formed for connecting the respective containers. A suitable number of connecting holes 3 and 4 are bored in the flange parts 1A and 2A, and annular grooves 5 and 6 are formed in the connecting surfaces. The grooves 5, 6
Rings 7 and 8 are inserted into the grooves in close contact with the respective groove surfaces. Furthermore, a vacuum sealing gasket 10 is provided which is held between rings 7 and 8. Gasket 10 is made of copper (Cu). As shown in FIG.
The gasket 10 is held at these edge portions E. Each of the rings 7 and 8 has an edge portion E' in a portion that contacts the surface of the groove, and the surface of each of the grooves 5 and 6 is shaped to fit into the edge portion E'. In FIG. 2, 7a, 7b, 8a, and 8b represent grooves formed in the ring as a result of forming the tapered edge portions E and E'. Further, each of the rings 7 and 8 is fixed to the flange portions 1A and 2A with an appropriate number of fixing screws 9. 11 is a connecting bolt.

To connect the ultra-high vacuum connecting device configured as described above, first fit the gasket 10 into the groove 8a of the ring 8 fixed to the flange portion 2A of the container 2, and then cover it with the other ring 7. and are connected by a connecting bolt 11. At this time, gasket 1
0 is sandwiched and pressed by the edge portions E of both rings 7 and 8, so the outer periphery of the gasket 10 is pressed against the surface U of the rings 7 and 8, and the joint of the rings 7 and 8 is well vacuum-sealed. Ru. Since each of the rings 7 and 8 is made of a hard material SUS, the edge portion E that contacts the sealing portion will not be damaged even after multiple uses, and therefore there will be no damage between the rings and the sealing member. The seals needed to ensure high vacuum can withstand multiple uses.
Furthermore, each of the rings 7 and 8 has an edge portion E' in the portion that contacts the groove surface, and each of the groove surfaces is shaped to fit into the edge portion E'.
A ring made of a hard material SUS can be inserted into the groove provided on the opposing surface of the flange portion with sufficient adhesion necessary to ensure an ultra-high vacuum, and
This configuration makes the seal between the groove surface and the ring, which is the other seal necessary to ensure an ultra-high vacuum, durable for multiple uses.

As mentioned above, the device of this embodiment is constructed so that the container and flange are integrally formed of iron, and the ring is formed of SUS, which is a harder metal than the container, and is attached with fixing screws. This method avoids the difficulties associated with welding dissimilar metals, has excellent magnetic shielding properties, and has the advantage of being able to withstand multiple uses.

It should be noted that the present invention is not limited to the above embodiments, and can be modified.

In this example, iron was used for the container and its flange, and SUS was used for the ring, but the ring may also be made of hardened iron, which further improves the magnetic shielding properties. do.

Furthermore, the present invention can be similarly applied to cases where aluminum or the like, which is softer than SUS, is used for the container and the flange.

[Effects of the invention] As explained in detail above, in this invention,
2 connected with the flange parts 1A and 2A facing each other
connecting members 1 and 2, annular grooves 5 and 6 provided on each of the opposing surfaces of the flange portion, and rings 7 and 8 that are inserted into each of the grooves in close contact with the groove surfaces.
and a sealing member 10 held between the pair of rings, each of the rings having an edge portion E at a portion that contacts the sealing member, and each of the rings contacting the surface of the groove. Edge part on the part
E′ and the surface of each groove is at the edge portion.
Since each ring is made of a harder material than the connecting member, even if the connecting member is made of a material with insufficient hardness, dissimilar metals at the flange can be used. It is possible to provide an ultra-high vacuum connection device that can withstand multiple uses without welding, which is a troublesome and expensive process. Therefore, from the viewpoints of magnetic shielding properties and light weight, soft connecting members can be easily used as connecting members for scanning microscopes, etc. that may be repeatedly disconnected and connected, increasing the range of selection of connecting members. can be expanded.

[Brief explanation of the drawing]

Figure 1 is a sectional view of one embodiment of the present invention, Figure 2 is an enlarged view of the main parts of the embodiment of Figure 1, Figures 3 and 4.
The figure is a diagram for explaining a conventional device. 1, 2, 12: Container, 3, 4: Connection hole, 5,
6: Groove, 7, 8: Ring, 7a, 8a: Groove, 9:
Fixing screw, 10: Gasket, 11: Connection bolt, 13, 16: Conflat flange, 14:
Seal member, E, E': edge part.

Claims (1)

[Claims for Utility Model Registration] (1) Two connecting members 1 and 2 connecting the flanges 1A and 2A facing each other, and an annular groove 5 provided on each of the facing surfaces of the flanges, 6, rings 7 and 8 that are inserted into each of the grooves in close contact with the groove surface, and a seal member 10 that is held between the pair of rings, and each of the rings is attached to the seal member. Each of the rings has an edge portion E at a contacting portion, and each of the rings has an edge portion E′ at a portion contacting the groove surface, and each groove surface is shaped to fit into the edge portion E′. A connecting device for ultra-high vacuum, wherein each of the rings is made of a harder material than the connecting member. (2) The ultra-high vacuum connection device according to claim 1, wherein the ring is made of stainless steel or hardened iron.