JPH0291346U - - Google Patents
Info
- Publication number
- JPH0291346U JPH0291346U JP46689U JP46689U JPH0291346U JP H0291346 U JPH0291346 U JP H0291346U JP 46689 U JP46689 U JP 46689U JP 46689 U JP46689 U JP 46689U JP H0291346 U JPH0291346 U JP H0291346U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- tubular member
- pen
- wafer
- grounded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46689U JPH0291346U (en, 2012) | 1989-01-05 | 1989-01-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46689U JPH0291346U (en, 2012) | 1989-01-05 | 1989-01-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0291346U true JPH0291346U (en, 2012) | 1990-07-19 |
Family
ID=31199522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46689U Pending JPH0291346U (en, 2012) | 1989-01-05 | 1989-01-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0291346U (en, 2012) |
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1989
- 1989-01-05 JP JP46689U patent/JPH0291346U/ja active Pending