JPH0291338U - - Google Patents
Info
- Publication number
- JPH0291338U JPH0291338U JP71389U JP71389U JPH0291338U JP H0291338 U JPH0291338 U JP H0291338U JP 71389 U JP71389 U JP 71389U JP 71389 U JP71389 U JP 71389U JP H0291338 U JPH0291338 U JP H0291338U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- plasma processing
- blowing plate
- gas blowing
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP71389U JPH0291338U (pt) | 1989-01-06 | 1989-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP71389U JPH0291338U (pt) | 1989-01-06 | 1989-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0291338U true JPH0291338U (pt) | 1990-07-19 |
Family
ID=31199984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP71389U Pending JPH0291338U (pt) | 1989-01-06 | 1989-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0291338U (pt) |
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1989
- 1989-01-06 JP JP71389U patent/JPH0291338U/ja active Pending