JPH0291144U - - Google Patents
Info
- Publication number
- JPH0291144U JPH0291144U JP17111088U JP17111088U JPH0291144U JP H0291144 U JPH0291144 U JP H0291144U JP 17111088 U JP17111088 U JP 17111088U JP 17111088 U JP17111088 U JP 17111088U JP H0291144 U JPH0291144 U JP H0291144U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- magnetic field
- filament
- evaporation source
- source device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008020 evaporation Effects 0.000 claims description 9
- 238000001704 evaporation Methods 0.000 claims description 9
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 claims 2
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17111088U JPH0538049Y2 (https=) | 1988-12-30 | 1988-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17111088U JPH0538049Y2 (https=) | 1988-12-30 | 1988-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0291144U true JPH0291144U (https=) | 1990-07-19 |
| JPH0538049Y2 JPH0538049Y2 (https=) | 1993-09-27 |
Family
ID=31462649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17111088U Expired - Lifetime JPH0538049Y2 (https=) | 1988-12-30 | 1988-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538049Y2 (https=) |
-
1988
- 1988-12-30 JP JP17111088U patent/JPH0538049Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0538049Y2 (https=) | 1993-09-27 |
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