JPH029068A - Recording and/or reproducing method - Google Patents
Recording and/or reproducing methodInfo
- Publication number
- JPH029068A JPH029068A JP15896688A JP15896688A JPH029068A JP H029068 A JPH029068 A JP H029068A JP 15896688 A JP15896688 A JP 15896688A JP 15896688 A JP15896688 A JP 15896688A JP H029068 A JPH029068 A JP H029068A
- Authority
- JP
- Japan
- Prior art keywords
- recording
- head
- contact
- reproducing
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 7
- 230000005489 elastic deformation Effects 0.000 claims abstract description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000007261 regionalization Effects 0.000 description 3
- 238000001459 lithography Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 241001422033 Thestylus Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、記録及び／又は再生ヘッドを記録面に接触走
行させながらも接触による摩耗をなくした情報やパター
ンの記録、記録された情報の読み出し、記録されたパタ
ーンの状況の測定、′又は各種表面の形状の測定等がで
きるようにした記録及び／又は再生方法に関する。Detailed Description of the Invention [Industrial Field of Application] The present invention relates to the recording of information and patterns that eliminate wear caused by contact while the recording and/or reproducing head runs in contact with the recording surface, and the recording of recorded information. The present invention relates to a recording and/or reproducing method that allows reading out, measuring the state of a recorded pattern, measuring the shape of various surfaces, etc.
磁気記憶装置をはじめ、記憶媒体上に記録ヘッドを接触
摺動させて情報を記録及び読み出す記憶装置が広く実用
に供されている。また、リソグラフィ等に用いられるパ
ターンの形成においては、摩耗による損傷を避けるため
に非接触で行われるのが通常である。2. Description of the Related Art Storage devices, including magnetic storage devices, that record and read information by sliding a recording head on a storage medium are widely used in practical use. Furthermore, in forming patterns used in lithography and the like, it is usually done without contact in order to avoid damage due to wear.
接触摺動型の磁気記憶装置として、フロッピィ装置があ
る。これは、フレキシブルな磁気ディスク円盤に磁気ヘ
ッドを押圧させ、接触状態で記録再生する装置である。A floppy device is a contact sliding type magnetic storage device. This is a device in which a magnetic head is pressed against a flexible magnetic disk disk to perform recording and reproduction while in contact with the disk.
また別に、静電容量変化で情報を読み出す方式のビデオ
デイクスにＶＨＤ方式がある。この方式においては、デ
ィスク表面に容量検出型のヘッドが接触摺動する。Additionally, there is a VHD system for video disks that reads information by changing capacitance. In this method, a capacitive detection head slides in contact with the disk surface.
ところが、フロッピィディスク装置は、押し付は荷重が
十数グラムあり、数百刃から数千刃パスで摩耗による寿
命がくる。また、ＶＨＤ方式も、全く接触のな光記録型
のビデオディスクに比べ寿命の点で問題がある。このよ
うに、例示の従来の装置は、高い荷重による激しい摩耗
により、寿命が到来するのである。However, in a floppy disk device, the pressing load is ten or more grams, and the life span due to wear is reached after several hundred to several thousand blade passes. Further, the VHD system also has a problem in terms of lifespan compared to optical recording type video discs that are completely non-contact. Thus, the exemplary conventional device reaches the end of its life due to severe wear due to high loads.
そこで、摩耗を減じるために押し付は荷重を小さくする
と、ヘッド及び支持機構の質量が大きいために、正常な
接触を維持できなくなることがある。Therefore, if the pressing load is reduced in order to reduce wear, normal contact may not be maintained due to the large mass of the head and support mechanism.
一方、リソグラフィ等に用いられるパターン形成は、従
来光学的方法が採られていたが、光波長の制限により、
サブミクロンのパターン形成に困難があった。サブミク
ロンパターン形成は、高真空中での電子線利用等複雑且
つ高価な装置を必要とする。On the other hand, pattern formation used in lithography and the like has traditionally been done using optical methods, but due to limitations on the wavelength of light,
There were difficulties in forming submicron patterns. Submicron pattern formation requires complicated and expensive equipment such as the use of electron beams in a high vacuum.
また、鋭い針を導電体であるパターン形成表面にオンダ
ストロームオーダで接近させ、検出されるトンネル電流
を検出することによって、針をパターン形成表面に一定
間隔に制御し、針からのフィールドエミッション電流に
よって、１／１００ミクロンオーダのパターン形成を行
うことが研究されているが、微弱なトンネル電流による
制御は困難が多い。In addition, by bringing a sharp needle close to the patterned surface, which is an electrical conductor, in an on-dust order, and by detecting the detected tunnel current, the needle is controlled at regular intervals on the patterned surface, and the field emission current from the needle is Although research has been conducted to form patterns on the order of 1/100 microns, control using weak tunnel currents is often difficult.
更に、パターンや表面形状を触針で接触摺動し測定する
ことが広く用いられているが、触針による表面の破壊の
危険が大きいという問題がある。Furthermore, although it is widely used to measure patterns and surface shapes by contacting and sliding them with a stylus, there is a problem in that there is a large risk of the surface being destroyed by the stylus.
本発明は以上のような点に鑑みてなされたものであり、
その目的は、摩耗のない接触を実現し、簡単で長寿命な
情報及びパターンの記録及び／又は再生を行うことがで
きるようにすることである。The present invention has been made in view of the above points,
The aim is to achieve a wear-free contact and to be able to record and/or reproduce information and patterns in a simple and long-lasting manner.
このために本発明は、記録及び／又は再生ヘッドを記録
面に接触させる際に、真実接触面での上記ヘッド及び上
記記録面に加わる応力が弾性変形内となるように接触荷
重を制限した。For this reason, in the present invention, when the recording and/or reproducing head is brought into contact with the recording surface, the contact load is limited so that the stress applied to the head and the recording surface at the real contact surface is within the elastic deformation range.
以下、本発明の実施例について説明する。第１図はその
一実施例を示す図である。１は記録再生用のヘッド、２
は仮ばねであり、ヘッド１はこの仮ばね２の先端に固定
されている。３は記録媒体で、ヘッド１はこの面上を接
触摺動する。Examples of the present invention will be described below. FIG. 1 is a diagram showing one embodiment thereof. 1 is a head for recording and reproducing, 2
is a temporary spring, and the head 1 is fixed to the tip of this temporary spring 2. 3 is a recording medium, and the head 1 slides in contact with this surface.
第２図はヘッド１と記録媒体２の接触状態を示したもの
で、接触圧により両者は変形する。この変形とその時発
生する圧力は、ヘルツの式で算出でき、ヘッド１と記録
媒体３の弾性変形内に接触圧が留まっている限り、両者
は永久変形しない。FIG. 2 shows the state of contact between the head 1 and the recording medium 2, where both are deformed by the contact pressure. This deformation and the pressure generated at that time can be calculated using the Hertz equation, and as long as the contact pressure remains within the elastic deformation of the head 1 and the recording medium 3, both will not be permanently deformed.
また、ヘッド１と記録媒体３の表面の活性度が低いと、
両者の結合力はファンデアヴアールス力の領域にあり、
ヘッド１と記録媒体３の各表面層の結合力より小さい。Furthermore, if the surface activity of the head 1 and the recording medium 3 is low,
The bonding force between the two is in the range of Van der Vuars force,
This is smaller than the bonding force between each surface layer of the head 1 and the recording medium 3.
従って、各表面層での剥離は生じない。Therefore, no peeling occurs in each surface layer.
例えば、へ、ド１と記録媒体３のヤング率が１万〜３万
ｋｇ／ｍｍ” 、ヘッド１の先端半径０．１．ｃ＋ｍ、
接触荷重数十μｇとすると、平均面圧は数百から数十ｋ
ｇ／ｎｕｎ２となり、通常使用できる材料で弾性変形内
となる。For example, if the Young's modulus of the head 1 and the recording medium 3 is 10,000 to 30,000 kg/mm, the tip radius of the head 1 is 0.1.c+m,
When the contact load is several tens of μg, the average surface pressure is several hundred to several tens of kilograms.
g/nun2, which is within the elastic deformation of normally usable materials.
なお、ヘッド１と記録媒体３に大きな凹凸が存在する場
合、第３図に示すように、それらの凹凸による接触状態
が、第２図に例示されていることになる。よって、従来
のヘッドのように極めて大きな面でかつ荷重が大きい場
合、面のミクロな接触点では極めて高い圧力が発生して
しまうことに注意すべきである。よって、本発明の方法
を実施する場合、ヘッド１は小形で面積度が良いものが
、板ばね２は小形で剛性の低いものが要求される。Incidentally, when there are large irregularities between the head 1 and the recording medium 3, as shown in FIG. 3, the contact state due to those irregularities is illustrated in FIG. 2. Therefore, it should be noted that when a conventional head has an extremely large surface and a large load, extremely high pressure will be generated at the microscopic contact points of the surfaces. Therefore, when carrying out the method of the present invention, the head 1 is required to be small and have good surface area, and the leaf spring 2 is required to be small and low in rigidity.
本発明のヘッドは、その用途により種々の形態が用い得
る。例示すれば次の通りである。The head of the present invention can be used in various forms depending on its use. An example is as follows.
（１）、磁気記録再生：ヘッドはリング型の通常の磁気
ヘッド、垂直磁気記録の単磁極ヘッド等である。これら
は、本発明の実施に当たっては、薄膜形成技術等により
極めて小さな形状にすることによって、高い記録密度が
実現できる。(1) Magnetic recording/reproduction: The head is a ring-shaped normal magnetic head, a perpendicular magnetic recording single-pole head, or the like. In carrying out the present invention, high recording density can be achieved by making these into extremely small shapes using thin film forming technology or the like.
（２）、電子記録再生二ヘッドは鋭い先端を持つ導電性
針である。これは電流で表面を破壊若しくは物理的性質
を変化させる記録、又は電圧により表面に電荷を発生さ
せる記録等に用いられる。先端半径をサブミクロン若し
くはそれ以下にすることにより、極めて高い記録密度が
実現できる。また、この記録は情報記録だけでなく、パ
ターン形成にも利用できる。更に、静電容量変化で情報
を読み出すことにも用い得る。(2) The electronic recording/reproducing head is a conductive needle with a sharp tip. This is used for recording that destroys the surface or changes its physical properties with an electric current, or for recording that generates an electric charge on the surface using a voltage. By making the tip radius submicron or smaller, extremely high recording density can be achieved. Further, this recording can be used not only for information recording but also for pattern formation. Furthermore, it can also be used to read information by changing capacitance.
（３）６表面形状測定：ヘッドは鋭い先端を持つ針であ
る。これは、表面の凹凸をなぞらせて、表面凹凸による
針の変位を検出することによって、表面形状が測定でき
る。先端半径をサブミクロン若しくはそれ以下にするこ
とにより、極めて高い分解能が実現できる。(3) 6 Surface profile measurement: The head is a needle with a sharp tip. The surface shape can be measured by tracing the surface irregularities and detecting the displacement of the needle due to the surface irregularities. Extremely high resolution can be achieved by making the tip radius submicron or smaller.
以上述べたように、本発明によれば、摩耗のない接触記
録及び／又は再生が実現でき、次のような効果が発生す
る。As described above, according to the present invention, wear-free contact recording and/or reproduction can be realized, and the following effects are produced.
（１）、磁気や電荷等による摩耗のない高密度記録再生
を実現できる。(1) High-density recording and reproduction without wear due to magnetism, electric charge, etc. can be realized.
（２）、静電容量変化等で表面に記録された情報の摩耗
のない再生を実現できる。(2) Reproduction of information recorded on the surface without wear due to changes in capacitance or the like can be realized.
（３）、ｍ細パターンの形成が実現できる。(3) Formation of m-thin patterns can be realized.
（４）０表面形状の高分解能測定が実現できる。(4) High-resolution measurement of zero surface shape can be achieved.
第１図は本発明の実施例のヘッド部分の側面図、第２図
はヘッドと記録媒体の接触状況を示す図、第３図はヘッ
ドと記録媒体に大きな凹凸のある場合の説明図である。
１・・・記録再生用ヘッド、２・・・板ばね、３・・・
記録媒体。
代理人 弁理士 長 尾 常 明
第１
第２
第３FIG. 1 is a side view of the head portion of the embodiment of the present invention, FIG. 2 is a diagram showing the state of contact between the head and the recording medium, and FIG. 3 is an explanatory diagram when the head and recording medium have large irregularities. . 1... Recording/reproducing head, 2... Leaf spring, 3...
recoding media. Agent Patent Attorney Tsuneaki Nagao 1st 2nd 3rd
Claims (1)
る際に、真実接触面での上記ヘッド及び上記記録面に加
わる応力が弾性変形内となるように接触荷重を制限した
ことを特徴とする記録及び／又は再生方法。(1) When the recording and/or reproducing head is brought into contact with the recording surface, the contact load is limited so that the stress applied to the head and the recording surface at the real contact surface is within the elastic deformation range. recording and/or playback method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15896688A JPH029068A (en) | 1988-06-27 | 1988-06-27 | Recording and/or reproducing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15896688A JPH029068A (en) | 1988-06-27 | 1988-06-27 | Recording and/or reproducing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH029068A true JPH029068A (en) | 1990-01-12 |
Family
ID=15683261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15896688A Pending JPH029068A (en) | 1988-06-27 | 1988-06-27 | Recording and/or reproducing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH029068A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0745987A2 (en) * | 1995-05-30 | 1996-12-04 | Hewlett-Packard Company | Probe for memory device having movable media |
| US6229673B1 (en) * | 1992-01-20 | 2001-05-08 | Fujitsu Limited | Magnetic head assembly with contact-type head chip mounting and electrically connecting arrangements |
| JP2008046138A (en) * | 2001-09-10 | 2008-02-28 | Pioneer Electronic Corp | Dielectric constant measuring device, dielectric measuring method, and information recording/reproducing device |
-
1988
- 1988-06-27 JP JP15896688A patent/JPH029068A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6229673B1 (en) * | 1992-01-20 | 2001-05-08 | Fujitsu Limited | Magnetic head assembly with contact-type head chip mounting and electrically connecting arrangements |
| EP0745987A2 (en) * | 1995-05-30 | 1996-12-04 | Hewlett-Packard Company | Probe for memory device having movable media |
| EP0745987A3 (en) * | 1995-05-30 | 1997-02-26 | Hewlett Packard Co | Probe for memory device having movable media |
| JP2008046138A (en) * | 2001-09-10 | 2008-02-28 | Pioneer Electronic Corp | Dielectric constant measuring device, dielectric measuring method, and information recording/reproducing device |
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