JPH0290664U - - Google Patents
Info
- Publication number
- JPH0290664U JPH0290664U JP16922388U JP16922388U JPH0290664U JP H0290664 U JPH0290664 U JP H0290664U JP 16922388 U JP16922388 U JP 16922388U JP 16922388 U JP16922388 U JP 16922388U JP H0290664 U JPH0290664 U JP H0290664U
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- sample
- thin film
- forming apparatus
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 3
- 229910021645 metal ion Inorganic materials 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000010891 electric arc Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16922388U JPH0290664U ( ) | 1988-12-29 | 1988-12-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16922388U JPH0290664U ( ) | 1988-12-29 | 1988-12-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0290664U true JPH0290664U ( ) | 1990-07-18 |
Family
ID=31459087
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16922388U Pending JPH0290664U ( ) | 1988-12-29 | 1988-12-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0290664U ( ) |
-
1988
- 1988-12-29 JP JP16922388U patent/JPH0290664U/ja active Pending