JPH0290448A - Minimum joint device in vacuum sample chamber for electron microscope - Google Patents

Abstract

PURPOSE:To miniaturize a joint part and a enable it to be applicable to vacuum circumstances by integrally connecting a horizontal rotary shaft at one end of a sample holder and a rotary shaft of a rotary encoder to both ends of a bar member in the axial direction, and forming the intermediate part in an hourglass shape. CONSTITUTION:A horizontal rotary shaft 26 at one end of a spindle-like sample holder 12 having a sample holding part 12a, and a rotary shaft 28 of a rotary encoder 19 are integrally connected to both ends of a bar member 25a in the axial direction. The bar member 25a has an hourglass-shaped intermediate part 25b and the minimum diameter part 25c thereof is made to be elastic. In this way, a microjoint 25 can be constructed in miniaturized form and can be used in vacuum circumstances because it does not require lube oil or grease.

Description

Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a horizontal rotation axis of a spindle-shaped sample holder disposed in a vacuum sample chamber for an electron microscope, and a rotation of a rotary encoder for positioning the horizontal rotation axis. This invention relates to an extremely small shimming device that connects a shaft.

(Prior Art) Conventional commonly used joint devices are mechanically complex, have many parts, are large, and use lubricating oil, grease, etc. to lubricate the cross shaft, etc.

(Problems to be Solved by the Invention) However, even if the above-mentioned conventional technology is tried to be used in a vacuum sample chamber for an electron microscope, it is difficult to install it in a small chamber, and the lubricating oil, grease, etc. used for lubrication are difficult to install. There was a problem in that it could not be used because it evaporated in vacuum and released gas.

(Means for Solving the Problems) The present invention aims to solve the above-mentioned problems by connecting the horizontal rotating shaft at one end of a spindle-shaped sample holder having a sample holding part and the rotating shaft of a rotary encoder to a rod-shaped body. It is characterized by having both ends integrally connected in the axial direction, and the middle portion being formed in a tulle shape to provide elasticity.

Hereinafter, a detailed explanation will be given based on the illustrated embodiment. 1
is a vacuum sample chamber made of vacuum chamber materials such as aluminum alloy, stainless steel, glass, and ceramics;
Reference numeral 2 denotes an electron microscope head which is tightly fitted onto the top surface of the vacuum sample chamber 1 and is movable up and down. Reference numeral 3 denotes a posture control unit housing disposed directly below the electron microscope head, 4 an ultrasonic motor fixed at the center of the bottom of the housing 3, and its vertical rotation axis 5 connected to the housing 3.
The rotating table 10 is integrally fixed to the upper end of the rotary table 10, which is rotatably supported by bearings 8 and 9 of support stands 6 and 7 fixed to the table. A spindle-shaped sample holder 12 made of silicon nitride or stainless steel is rotatably supported in bearing housings 11, 11' on the upper surface of the rotary table 10 via rolling bearings. The sample holder 12 has a central upper half cut out to form a sample holding portion 12a. Reference numerals 13.13' and 14.14' represent two sets of piezo drive mechanisms arranged below both sides of the sample holder 12 on the rotating table 1°, and actuator shoes 14.14' and the part 14 that abuts the sample holder 12.
A is made of aluminum or the like. Therefore, since the contact with the sample holder 12 is different, there is no adhesion in vacuum, and since the difference in the coefficient of friction is large, the rotation of the sample holder 12 by the actuator shoes 14° 14' is performed effectively. 15.15' is piezo for feed, 1
6.16' is a piezo for clamping, 17.17' is a leaf spring, and 18.18' is a feed lever.

19 is a rotary encoder for horizontal rotational positioning of the sample holder 12. 20 is a rotary encoder for rotational positioning of the ultrasonic motor 4. Reference numeral 21 denotes a fixed base of the slip ring mechanism disposed between the support stands 6 and 7, and above and below thereof, rotating bases 22 and 23 integrally fixed to the vertical rotating shaft 5 face each other, and the fixed base 21 is
The electric power supplied to the rotary base 22, 23 is transmitted to the piezo element on the rotary table 10, the rotary encoder 19, and the ultrasonic motor 4° rotary encoder 20. 25 is a very small joint of the present invention, the middle part of the rod-shaped body 25a is made into a rib-shaped part 25b, the minimum diameter part 25c is made elastic, and holes 25d and 25e are formed in the axial direction of both ends,
The horizontal rotation shaft 26 of the sample holder 12 is fitted into one hole 25d and fixed with a screw 27a, and the rotation shaft 28 of the rotary encoder 19 is fitted into the other hole 25e and screwed into the screw 27b.
It is fixed at

Next, the effect will be explained. A sample is placed on the sample holding portion 12a of the sample holder 12. Next, the clamping piezo 16' of one piezo drive mechanism 13' of the two sets of piezo drive mechanisms 13, 13' and the actuator shoe 14' are brought out of contact to release the clamp state, and the clamping state of the other piezo drive mechanism 13 is released. The clamping piezo is raised and brought into contact with the actuator shoe 14 to be in a clamped state, and the feed piezo 15 is advanced, whereby the sample holder ~12 is rotated by the friction generated between the actuator shoe 14 and the sample holder 12. . and,
In order to maintain the current state, the clamping piezo 16' of one piezo drive mechanism 13' is raised and brought into contact with the actuator shoe 14' to be in the clamped state, and the piezo motor mechanism 13, which had been moving forward, is moved upward. Stop forward movement. Then, by releasing the clamp state of the piezo drive mechanism 13 that has stopped its forward movement and moving forward the feeding piezo 15' of one piezo drive mechanism 13', the sample holder 12 rotates in the opposite direction to the above. . By repeating this operation, the sample holder 12 can be rotated continuously. This positioning is performed by the rotary encoder 19.

In this case, even if there is a difference in axis between the horizontal rotation axis 26 of the sample holder 12 and the rotation axis 28 of the rotary encoder 19, the groove-shaped portion 25b can absorb this difference through elastic deformation, thereby ensuring rotation transmission. .

When the ultrasonic motor 4 is activated, the rotary table 10 rotates horizontally. This positioning is performed by the rotary encoder 20.

The posture of the sample on the sample holder 12 is controlled as described above.

(Effects) According to the present invention, the horizontal rotating shaft at one end of a spindle-shaped sample holder having a sample holding portion and the rotating shaft of a rotary encoder are integrally connected in the axial direction of both ends of the rod-shaped body, and the intermediate portion is connected to S'. Since it is formed into a groove shape and has elasticity, the joint part can be constructed from a single component, making it more compact.Also, since it does not require lubricating oil or grease, it can be installed in a small room and can be used in a vacuum environment. .

[Brief explanation of drawings]

Figure 1 is a front sectional view of an embodiment of the present invention, Figure 2 is a perspective view of the piezo drive mechanism in Figure 1, and Figure 3 is a front view of the portion where the actuator shoe in Figure 2 contacts the sample holder. ,
4 is a side view of the sample holder support device of FIG. 1, FIG. 5 is a front view of the minimal joint of the present invention, and FIG. 6 is a front sectional view of FIG. 5. 1... Vacuum sample chamber 2... Electron microscope head 3... Attitude control unit housing 4... Ultrasonic motor 5.
...Vertical rotation axis 6,7...Support stand 8.9...
・Bearing 10...Rotary table 11.11'
... Housing 12 ... Sample holder 12a ... Sample holding part 1
3.13'...Piezo drive mechanism 19.20...Rotary encoder 21...Fixed base 22.23...Rotating base 25...Minimum stain 25a...Bar-shaped body 25b... Grooved portion 25c...Minimum diameter portion 25d, 25e...Hole 27a, 27b-screw

Claims (1)

[Claims] A horizontal rotating shaft at one end of a spindle-shaped sample holder having a sample holding part and a rotating shaft of a rotary encoder are integrally connected in the axial direction of both ends of a rod-shaped body, and the middle part is formed into a string shape to provide elasticity. Miniature joint device in vacuum sample chamber for electron microscope.