JPH02148552A - Slip ring device for vacuum sample chamber for microscope - Google Patents

Abstract

PURPOSE:To prevent emission of harmful gas and adhesion failure, and improve heat resistance by disposing rotary base plates facing a fixed base plate, and disposing energizing balls between ring electrodes of both contacting with them. CONSTITUTION:A fixed base plate 21 is fixed at an attitude control casing 3 at the periphery, and rotary shbase plates 22, 23 disposed over and under it is fixed at a vertical rotary shaft 5. Between ring electrodes 21b of the fixed base plate 21 and ring electrodes 22b, 23b of the rotary base plates 22, 23 are a plurality of conductive balls 23 disposed at a constant interval by means of a holding device contacting them.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a slip ring device that supplies power to a sample attitude control device disposed in a vacuum sample chamber for an electron microscope.

(Prior Art) A conventional slip ring device uses Bakelite, resin, or the like to form a disk-shaped fixed base and a rotating base, and electrodes are attached using adhesive.

(Problems to be Solved by the Invention) By the way, when the above-mentioned conventional technology is used in a vacuum chamber, a lot of harmful gases are released from the fixed base, rotating base, adhesive, solder, electric wires, etc. Since the adhesive is used, heat generation causes adhesion failure. On the other hand, since the electrode part has a flattening mechanism, frictional heat is accumulated in the vacuum chamber, resulting in a high temperature, which not only poses a problem in heat resistance but also increases wear.

(Means for Solving the Problems) The present invention aims to solve the above problems, and includes forming a plurality of concentric grooves on at least one surface of a disc-shaped base made of ceramics, A ring-shaped electrode is fitted and fixed in the groove to form a fixed base and a rotating base, the rotating base is disposed opposite to the fixed base, and several energized balls are arranged in contact between the two ring electrodes. It is characterized by:

Hereinafter, a detailed explanation will be given based on the illustrated embodiment. 1
A vacuum sample chamber is made of a material for the vacuum chamber, such as aluminum alloy, stainless steel, glass, or ceramics, and an electron microscope head 2 is tightly fitted onto the top surface of the vacuum sample chamber 1 and is movable up and down. Reference numeral 3 denotes a posture control unit housing disposed directly below the electron microscope head, 4 an ultrasonic motor fixed at the center of the bottom of the housing 3, and its vertical rotation axis 5 connected to support stands 6 and 7 fixed to the housing 3. is supported by bearings 8 and 9,
A rotary table 10 is integrally fixed to the upper end. A spindle-shaped sample holder 12 made of silicon nitride or stainless steel is rotatably supported by a bearing housing 11.11' on the upper surface of the rotary table 1°. The sample holder 12 has a cutout in its center upper half, and the sample holding part 1
2a is formed. 13°13' is rotary table 1o
There are two sets of piezo drive mechanisms arranged below both sides of the upper sample holder 12. 14.14' is an actuator shoe, and a portion 14a that contacts the sample holder 12 is made of aluminum. Therefore, the contact with the sample holder 12 becomes a different member, and there is no adhesion in vacuum, and the difference in the friction coefficient is large, so the actuator shoe 1
4.14' rotation of the sample holder 12 is effectively performed. 15°15' is piezo for feed, 16.1
6' is piezo for clamp, 17.17' is leaf spring,
18°18' is a feed lever. 19 is a rotary encoder for horizontal rotational positioning of the sample holder 12. 20 is a rotary encoder for rotational positioning of the ultrasonic motor 4.

Reference numeral 21 denotes a fixed base of the slip ring mechanism disposed between the support bases 6 and 7, and above and below it, rotating bases 22 and 23 integrally fixed to the vertical rotating shaft 5 face each other, and the fixed base 21 is The power supplied to the rotary base 22, 23 is transmitted to the piezo element on the rotary table lo, the rotary encoder 19, the ultrasonic motor 4, and the rotary encoder 20.

The fixed base 21 is a disc-shaped base made of ceramics, and has concentric grooves 21a on both sides.
・Multiple lines are formed. Ring-shaped electrodes 21b are fitted and fixed in each groove 21a. When used at high temperatures, the ring-shaped electrode 21b is made of ceramic!
The ring-shaped electrode 2 has a larger thermal expansion than 21 and is connected to the base 21.
The fitting of 1b becomes stronger. Note that the ring-shaped electrode 21
A raceway groove 21e for ball transfer is formed on the surface portion b. A wire embedding hole 21c is bored radially inward from the outer peripheral end surface of the fixed base 21, and a hole 21d communicating with the bottom of each groove 21a is formed in this hole 21c.
...... is drilled. An electric wire 24a connecting an external power source and the ring-shaped electrode 21b is disposed in these holes 21c and 21d. Rotating base 22.23
is a disk-shaped base made of ceramics, and one surface thereof has concentric grooves 22a, 23a,
... are formed in multiple rows. Each groove 22a, 23a
Inside is a ring-shaped f! ! Pole 22b..., 23b...
- are fitted and fixed. Note that each ring-shaped electrode 22b
, 23b has raceway grooves 22e for ball transfer on the surface part.
..., 23e... are formed in each groove 22a, 2.
A hole 22c for burying electric wires leads from the bottom of 3a to the other side.
. . 23c . . . are perforated, and a ring-shaped electrode 22b.

An Ml wire 24b is provided to connect the piezo element 23b to the piezo element, the rotary encoder 19, the ultrasonic motor 4, and the rotary encoder 20.

The fixed base 21 has its outer periphery fixed to the attitude control unit I body 3, and the rotating bases 22 and 23 disposed above and below it are fixed to the vertical rotating shaft 5, and the ring-shaped electrode 21b of the fixed base 21 and the rotating base 2
A plurality of energizing balls 2G are arranged in contact with each other at equal intervals between 2.23 ring-shaped electrodes 22b and 23b by means of a holder (not shown). Fixed L121 has electric wire 2 from external power supply
4a is connected to each ring-shaped electrode 21b, and each ring-shaped electrode 22b of the rotating base 22.23.

The electric wire 24b connected to the wire 23b passes through the inside of the vertical rotation shaft 5 and connects to the piezo element of the piezo vibration mechanism 13, 13' arranged on the rotary table 10 and the rotary encoder 1.
9 and is connected to an ultrasonic motor 4 and a rotary encoder 2° located at the bottom of the housing 3.

Next, the effect will be explained. A sample is placed on the sample holder 12a of the sample holder 12. A predetermined electric power is supplied to the electrode 21b of the fixed base 21 by each of the electric wires 24a, and the electric power is transmitted to the electrodes 22b and 23b of the rotating base 22.23. When the ultrasonic motor 4 is activated, the rotating cheeple 10 rotates horizontally, and the rotary encoder 20 performs positioning. Furthermore, two sets of piezo drive mechanisms 13.13'
Power is supplied to the rotary encoder 19. As a result, the clamped state of one piezo drive mechanism 13 is released, the actuator 14' of the other piezo drive mechanism 13' is brought into contact with the sample holder 12, and the feed piezo 16' is activated to move the actuator 14' forward. ,
Rotate the sample holder 12. At the same time, the other piezo drive mechanism 13, which has been unclamped, is returned to its original position, and at the same time, the operation of the piezo drive mechanism 13' is stopped, and at the same time, one piezo drive mechanism 13 is operated to move the sample holder 1.
2 in the same direction. This operation is repeated to continuously rotate the sample holder 12.

(Effects) According to the present invention, a plurality of concentric grooves are formed on at least one surface of a disc-shaped base made of ceramic,
A ring-shaped electrode was fitted and fixed in the groove to form a fixed base and a rotating base, and the rotating base was disposed opposite to the fixed base, and several energized balls were placed in contact between the two ring electrodes. Compared to conventional resin substrates with electrodes glued to them, there is no harmful gas emitted from the fixed or rotating substrates, and since no adhesive or solder is used on the electrodes, heat generation can cause adhesion failure. Since it does not cause any problem in current flow, it has improved heat resistance and is suitable for use in a vacuum environment.

[Brief explanation of the drawing]

Fig. 1 is a front sectional view of an embodiment of the present invention, Fig. 2 is a perspective view of the piezo northing mechanism shown in Fig. 1, and Fig. 3 is a front view of the part where the actuator shoe in Fig. 2 contacts the sample holder. figure,
Fig. 4 is a side view of the sample holder support device shown in Fig. 1, Fig. 5 is a plan view of the fixed base on which the ring-shaped base is fitted and fixed, and Fig. 6 is a side view of the sample holder support device shown in Fig. 1.
The figure is a plan view of a rotary base on which a ring-shaped base is fitted and fixed, and FIGS. 7 and 8 are sectional views of essential parts of the fixed base and the rotary base, respectively. 1... Vacuum sample chamber 2... Electron microscope head 3... Attitude control cylinder 4... Ultrasonic motor 5.
...Vertical rotation axis 6,7...Support stand 8.9...
・Bearing 10...Rotary table 11, LL'
... Housing 12 ... Sample holder 21 ... Fixed base 21a
... Concave groove 21b ... Ring-shaped electrode 22
．． 23... Rotating base 22a, 23a... Concave grooves 22b, 23b... Ring-shaped electrode 26... Current-carrying ball Fig. 2 15' Fig. 3 Cause 4 Patent applicant Koyo Seiko Co., Ltd. Fig. figure

Claims (1)

[Claims] A plurality of concentric grooves are formed on at least one surface of a disk-shaped base made of ceramic, and a ring-shaped electrode is fitted and fixed in the groove to form a fixed base and a rotating base,
A slip ring device for a vacuum sample chamber for an electron microscope, in which a rotating base is placed opposite a fixed base, and several energized balls are placed in contact between the ring electrodes of both.