JPH0290053U - - Google Patents
Info
- Publication number
- JPH0290053U JPH0290053U JP16817388U JP16817388U JPH0290053U JP H0290053 U JPH0290053 U JP H0290053U JP 16817388 U JP16817388 U JP 16817388U JP 16817388 U JP16817388 U JP 16817388U JP H0290053 U JPH0290053 U JP H0290053U
- Authority
- JP
- Japan
- Prior art keywords
- insulating substrate
- rotating
- main shaft
- polishing
- interposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 16
- 238000005498 polishing Methods 0.000 claims description 15
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16817388U JPH0290053U (enExample) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16817388U JPH0290053U (enExample) | 1988-12-28 | 1988-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0290053U true JPH0290053U (enExample) | 1990-07-17 |
Family
ID=31457119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16817388U Pending JPH0290053U (enExample) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0290053U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6190870A (ja) * | 1984-10-09 | 1986-05-09 | Akiyama Akira | 両面研摩装置 |
-
1988
- 1988-12-28 JP JP16817388U patent/JPH0290053U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6190870A (ja) * | 1984-10-09 | 1986-05-09 | Akiyama Akira | 両面研摩装置 |
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