JPH0289827U - - Google Patents
Info
- Publication number
- JPH0289827U JPH0289827U JP16950988U JP16950988U JPH0289827U JP H0289827 U JPH0289827 U JP H0289827U JP 16950988 U JP16950988 U JP 16950988U JP 16950988 U JP16950988 U JP 16950988U JP H0289827 U JPH0289827 U JP H0289827U
- Authority
- JP
- Japan
- Prior art keywords
- quartz boat
- shaft
- boat
- furnace
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 8
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16950988U JPH0289827U (no) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16950988U JPH0289827U (no) | 1988-12-28 | 1988-12-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0289827U true JPH0289827U (no) | 1990-07-17 |
Family
ID=31459634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16950988U Pending JPH0289827U (no) | 1988-12-28 | 1988-12-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0289827U (no) |
-
1988
- 1988-12-28 JP JP16950988U patent/JPH0289827U/ja active Pending