JPH0289826U - - Google Patents

Info

Publication number
JPH0289826U
JPH0289826U JP16824088U JP16824088U JPH0289826U JP H0289826 U JPH0289826 U JP H0289826U JP 16824088 U JP16824088 U JP 16824088U JP 16824088 U JP16824088 U JP 16824088U JP H0289826 U JPH0289826 U JP H0289826U
Authority
JP
Japan
Prior art keywords
furnace core
core tube
quartz glass
circumferential
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16824088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0729627Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988168240U priority Critical patent/JPH0729627Y2/ja
Publication of JPH0289826U publication Critical patent/JPH0289826U/ja
Application granted granted Critical
Publication of JPH0729627Y2 publication Critical patent/JPH0729627Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
JP1988168240U 1988-12-28 1988-12-28 縦型構造の炉芯管 Expired - Lifetime JPH0729627Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988168240U JPH0729627Y2 (ja) 1988-12-28 1988-12-28 縦型構造の炉芯管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988168240U JPH0729627Y2 (ja) 1988-12-28 1988-12-28 縦型構造の炉芯管

Publications (2)

Publication Number Publication Date
JPH0289826U true JPH0289826U (US20090163788A1-20090625-C00002.png) 1990-07-17
JPH0729627Y2 JPH0729627Y2 (ja) 1995-07-05

Family

ID=31457244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988168240U Expired - Lifetime JPH0729627Y2 (ja) 1988-12-28 1988-12-28 縦型構造の炉芯管

Country Status (1)

Country Link
JP (1) JPH0729627Y2 (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009272332A (ja) * 2008-04-30 2009-11-19 Shin Etsu Handotai Co Ltd 縦型熱処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101025A (ja) * 1985-10-28 1987-05-11 Toshiba Corp 半導体製造治具
JPS62162835U (US20090163788A1-20090625-C00002.png) * 1986-04-03 1987-10-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101025A (ja) * 1985-10-28 1987-05-11 Toshiba Corp 半導体製造治具
JPS62162835U (US20090163788A1-20090625-C00002.png) * 1986-04-03 1987-10-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009272332A (ja) * 2008-04-30 2009-11-19 Shin Etsu Handotai Co Ltd 縦型熱処理装置

Also Published As

Publication number Publication date
JPH0729627Y2 (ja) 1995-07-05

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