JPH0289000A - Laminated x-ray fresnel zone plate - Google Patents

Abstract

PURPOSE:To suppress occurrence of working distortion and to stabilize the laminated structure of a multilayered film by forming the X-ray blocking section and X-ray transmitting section of the zone plate of such high-hardness materials that do not diffuse to the other sections even when the temperature becomes high. CONSTITUTION:The X-ray blocking section 10 of a laminated X-ray Fresnel zone plate is formed of such a high-hardness material that does not diffuse into an X-ray transmitting section 11 even in a high-temperature state instead of the conventional material and, at the same time, the section 11 is also formed of such a high-hardness material that does not diffuse to the section 10 even when the temperature becomes high instead of the conventional material. Therefore, occurrence of working distortion can be prevented when a rod-like body 2 surrounded by a multilayered film is thinned and, at the same time, the unevenness on the surface of each layer can be minimized even when the number of laminated layers of the multilayered film is increased. Moreover, mutual diffusion does not take place between the X-ray blocking section 10 and X-ray transmitting section 11 even the temperature becomes high.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) This invention relates to a laminated X-ray Fresnel zone plate.

(Prior Art) There are various examples of conventional laminated X-ray Fresnel zone plates, but the first example is published in Japanese Patent Publication No. 5849841, and according to it, as shown in Around the rod-shaped body 2, an X-ray blocking section 10 using Au (gold) as a blocking material and an X-ray transmitting section 11 using Be (beryllium) as a transmitting material are laminated concentrically and alternately to form a multilayer structure. A film is formed, and the rod-shaped body 2 on which this multilayer film is formed is cut into thin pieces along a plane perpendicular to its axis. Also,
The second example is published in Japanese Patent Application Laid-Open No. 62-81602,
According to this, as shown in FIG. 4, an X-ray blocking section 10 using a PbFx layer as a blocking material and an X-ray transmitting section 11 using an 810 layer as a transmitting material are arranged in a concentric circle around the rod-shaped body 2. A multilayer film is formed by laminating the rods alternately, and the rod-shaped body 2 on which the multilayer film is formed is cut into thin pieces along a plane perpendicular to its axis.

(Problems to be Solved by the Invention) The materials for the blocking material and the transmitting material used in conventional laminated X-ray Fresnel zone plates each have their own drawbacks, resulting in the following problems.

(1) Because the hardness of the materials used for the blocking material and the transmitting material is low, processing distortion occurs when thinning a rod-shaped body with a multilayer film formed around it. structure) becomes distorted. This is particularly noticeable in the second example.

(2) When the number of laminated layers of a multilayer film is increased, the unevenness on the surface of each layer (boundary surface between each layer) becomes noticeable, and the laminated structure (concentric circle structure) of the multilayer film becomes disordered.

(3) When a radiation source with high X-ray intensity is used, the zone plate generates heat and reaches a high temperature, which causes mutual diffusion between the blocking material and the transmitting material, resulting in the formation of a laminated structure (concentric structure) of the multilayer film. Disturbances begin to occur.

(4) In the first example, Au is used as the blocking material and Be is used as the transmitting material.
After heat treatment at C for 10 minutes, blocking material Au and transmitting material B
Mutual diffusion occurs with e, and the laminated structure (concentric structure) of the multilayer film becomes disordered.

This invention solves the problems of the conventional products as described above, increases the hardness of the materials used for the blocking material and the transmitting material, and makes it possible to thin a rod-shaped body with a multilayer film formed around it. In addition to suppressing the occurrence of processing distortion during processing, even when the number of laminated layers of multilayer films is increased, unevenness on the surface of each layer (interface between each layer) is minimized, and the laminated structure (concentric circle structure) of multilayer films is maintained. In addition, the zone plate is kept at a high temperature (
To provide a laminated X-ray Fresnel zone plate in which mutual diffusion does not occur between a blocking material and a transmitting material and the laminated structure (concentric structure) of a multilayer film is not disturbed even when the temperature exceeds 200°C. The purpose is to

(Means for Solving the Problems) In order to achieve the above object, the present invention provides a laminated X-ray Fresnel zone plate having the above configuration, in which the X-ray blocking portion is made of a material instead of a conventional material. The X-ray transmitting part is made of a hard material that does not diffuse into the X-ray blocking part even at high temperatures, and the X-ray transmitting part is made of a hard material that does not diffuse into the It is characterized by being made of high quality material.

(Function) The laminated X-ray Fresnel zone plate of the present invention does not generate processing strain when thinning a rod-shaped body around which a multilayer film is formed, and even when the number of laminated multilayer films is increased. The unevenness on the surface of each layer (boundary surface between each layer) is minimized, and furthermore, even at high temperatures, mutual diffusion does not occur between the X-ray blocking part and the X-ray transmitting part.

(Example) Hereinafter, an example of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic diagram of a sputtering apparatus used for producing an embodiment of the present invention, viewed from above. In the figure, a rod-shaped body 2 is suspended in a vertical direction (perpendicular to the drawing) from above in a vacuum chamber 1 via a rotation introduction mechanism (not shown). Furthermore, a blocking material target 4 and a transmitting material target 5 are attached to the cathode 3. A shutter 6 is disposed in the space near the cathode 3, and the shutter 6 prevents the unused target from being sputtered when either the blocking material target 4 or the transmitting material target 5 is not used. It plays a role. 7 is a crystal vibration type film thickness monitor, 8 is an Ar gas introduction passage, and 9 is a vacuum exhaust passage.

Therefore, when using the above sputtering apparatus, a potential difference is created between the vacuum chamber 1 into which Ar gas is introduced and the cathode 3, and a discharge is generated between them.
The r gas is excited or ionized to generate plasma. Then, a target 4 for blocking material A "ions" in the plasma is used.
By alternately colliding with the transparent material target 5, the target is sputtered, and the particles of the target are attached and laminated around the rotating rod-shaped body 2, thereby forming a multilayer film around the rod-shaped body 2. . The rod-shaped body 2 on which the multilayer film has been formed in this manner is then cut along a plane perpendicular to the axis to form a thin section, thereby forming a laminated X-ray Fresnel zone plate.

FIG. 2 is an explanatory diagram showing an embodiment of the present invention, in which the rod-shaped body 2 is made of 80 (gold) wire with a diameter of 18 μm, W S i t is used as the material of the blocking material target 4, and the transparent material target is C (graphite) was used as the material of 5, and the pressure in the vacuum chamber 1 was 5X10-3T.

This is a laminated type X-ray Fresnel zone plate created under the condition that the rotation speed of the rod-shaped body 2 is 20 rpm. In FIG. 2, around the rod-shaped body 2, there is a blocking material W Si
[X-ray blocking section made of 2] X-ray blocking section 11 made of transparent material C (graphite) and X-ray transmitting section 11 made of transparent material C (graphite) are laminated concentrically and alternately to form a multilayer film.

Next, in order to compare with the laminated X-ray Fresnel zone plate of the embodiment of this invention, the following comparative example was prepared.

[First Comparative Example] A laminated X-ray Fresnel zone plate ( Hereinafter, a first comparative example) was created.

[Second Comparative Example] Instead of WSi as the material of the blocker target 4,
A laminated X-ray Fresnel zone plate (hereinafter referred to as a second comparative example) was manufactured using a relatively soft AuPd alloy and under the same conditions as in the example of the present invention.

Therefore, when comparing the laminated X-ray Fresnel zone plate according to the embodiment of this invention and the first comparative example, it is found that the laminated X-ray Fresnel zone plate according to the embodiment of this invention has the following characteristics:
Compared to the first comparative example, there is no processing strain during thinning, and even when the number of laminated multilayer films is increased, there is no unevenness on the surface of each layer (boundary surface between each layer), and the multilayer There was little disturbance in each layer composing the film. To investigate the reason for this, we observed the laminated X-ray Fresnel zone plate with a scanning electron microscope and found that in the first comparative example, crystal grains had grown large in the X-ray blocking section made of W. On the other hand, in the laminated X-ray Fresnel zone plate of the example of the present invention, no crystal grains were observed in the X-ray blocking section 10 made of WSi2. This seems to be because the addition of Si makes the crystal grains finer and contributes to the flattening of the surface. Furthermore, when the laminated X-ray Fresnel zone plate of the embodiment of the present invention was heat-treated in vacuum at 500°C for 10 minutes, there was no mutual diffusion between the X-ray blocking part and the X-ray transmitting part, and the multilayer film It was confirmed that the laminated structure (concentric structure) was not disturbed and was thermally stable.

Next, when comparing the laminated X-ray Fresnel zone plate of the embodiment of the present invention and a second comparative example by observing them with a scanning electron microscope, it was found that in the second comparative example,
While disturbances in the laminated structure (concentric circular structure) were observed, such was not observed at all in the laminated X-ray Fresnel zone plate of the embodiment of the present invention.

In addition, instead of the above-mentioned embodiment of the present invention, Hf5Ta, Hf5Ta,
B, C, N, 0, S to 1M or more elements of W, Re, Os, Ir5Pi and Au or their compounds
As a transparent material with high X-ray transmittance used in the X-ray transmitting part, B
Several types of laminated X
Line Fresnel zone plates were prepared and compared with the above-mentioned first comparative example and second comparative example, and it was found that the results were similar to those of the above-mentioned embodiment of the present invention.

Incidentally, although a sputtering apparatus is used as an apparatus for producing the above embodiments of the present invention, the present invention is not limited to this apparatus, and may be a film forming apparatus such as a vacuum evaporation apparatus or a CVD apparatus.

(Effects of the Invention) According to the present invention, the occurrence of processing strain when thinning a rod-shaped body around which a multilayer film is formed is suppressed, and even if the number of laminated multilayer films is increased, the surface of each layer is The unevenness at the interface between each layer can be minimized, and the laminated structure (concentric structure) of the multilayer film will not be disturbed. Mutual diffusion with the X-ray transparent portion does not occur, and effects such as stabilization of the laminated structure (concentric structure) of the multilayer film are produced.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram of a sputtering device used for producing an embodiment of this invention, viewed from above, and FIG. 2 is an explanatory diagram showing the configuration of a laminated X-ray Fresnel zone plate of an embodiment of this invention. . FIGS. 3 and 4 are explanatory diagrams showing the structure of a conventional laminated X-ray Fresnel zone plate. In the figure, 2... Rod-shaped body 10... X-ray blocking section 11... X-ray transmitting section Patent applicant Japan Vacuum Technology Co., Ltd. Figure 2 Figure 38 Fourth section

Claims (1)

[Claims] A multilayer film is formed by alternately laminating X-ray blocking parts and X-ray transmitting parts concentrically around a rod-shaped body, and the rod-shaped body on which this multilayer film is formed is aligned in a plane perpendicular to its axis. In the laminated X-ray Fresnel zone plate cut into thin pieces, the above-mentioned X
The ray blocking portion is formed of a material with high hardness that does not diffuse into the X-ray transmitting portion even when the temperature becomes high, and the X-ray transmitting portion also has such hardness that it does not diffuse into the X-ray blocking portion even when the temperature becomes high. A laminated X-ray Fresnel zone plate characterized by being made of a material with high viscosity.