JPH0288480U - - Google Patents
Info
- Publication number
- JPH0288480U JPH0288480U JP16622288U JP16622288U JPH0288480U JP H0288480 U JPH0288480 U JP H0288480U JP 16622288 U JP16622288 U JP 16622288U JP 16622288 U JP16622288 U JP 16622288U JP H0288480 U JPH0288480 U JP H0288480U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- laminated piezoelectric
- element bodies
- base
- fine movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
第１図は本考案の一実施例の微動機構の側面図
、第２図はその上面図、第３図は本考案の一実施
例の微動機構を組み込んだ走査型トンネル顕微鏡
の構成図、第４図は積層圧電素子体４ｘに電圧を
印加した時の微動機構の側面図、第５図は積層圧
電素子体４ｙに電圧を印加した時の微動機構の側
面図である。
１……探針、３ａ，３ｂ，３ｃ……支持部材、
４ｘ，４ｙ……積層圧電素子体、５……基台。
Fig. 1 is a side view of a fine movement mechanism according to an embodiment of the present invention, Fig. 2 is a top view thereof, and Fig. 3 is a configuration diagram of a scanning tunneling microscope incorporating a fine movement mechanism according to an embodiment of the present invention. FIG. 4 is a side view of the fine movement mechanism when a voltage is applied to the laminated piezoelectric element body 4x, and FIG. 5 is a side view of the fine movement mechanism when a voltage is applied to the laminated piezoelectric element body 4y. 1... probe, 3a, 3b, 3c... support member,
4x, 4y...Laminated piezoelectric element body, 5...Base.
Claims (1)
を固定する基台と、前記積層圧電素子体と前記基
台とに支持部材を介して保持される動作部とから
なることを特徴とする微動機構。 A fine movement characterized by comprising a plurality of laminated piezoelectric element bodies, a base for fixing the laminated piezoelectric element bodies, and an operating section held by the laminated piezoelectric element bodies and the base via a support member. mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16622288U JPH0288480U (en) | 1988-12-22 | 1988-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16622288U JPH0288480U (en) | 1988-12-22 | 1988-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0288480U true JPH0288480U (en) | 1990-07-12 |
Family
ID=31453418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16622288U Pending JPH0288480U (en) | 1988-12-22 | 1988-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0288480U (en) |
-
1988
- 1988-12-22 JP JP16622288U patent/JPH0288480U/ja active Pending