JPH01118304U - - Google Patents
Info
- Publication number
- JPH01118304U JPH01118304U JP1244188U JP1244188U JPH01118304U JP H01118304 U JPH01118304 U JP H01118304U JP 1244188 U JP1244188 U JP 1244188U JP 1244188 U JP1244188 U JP 1244188U JP H01118304 U JPH01118304 U JP H01118304U
- Authority
- JP
- Japan
- Prior art keywords
- fine movement
- movement mechanism
- probe
- sample
- shield cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 4
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本実施例を示す斜視図、第２図は本考
案による別の実施例を示す斜視図、第３図は従来
の例を示す斜視図である。
１…探針、２…微動素子、３…微動素子ブロツ
ク、４…試料、５…シールドカバー。
FIG. 1 is a perspective view showing this embodiment, FIG. 2 is a perspective view showing another embodiment according to the present invention, and FIG. 3 is a perspective view showing a conventional example. 1... Probe, 2... Fine movement element, 3... Fine movement element block, 4... Sample, 5... Shield cover.
Claims (1)
動素子を有する微動機構において、該微動機構に
シールドカバーを付加したことを硫徴とする微動
機構。 A fine movement mechanism having a fine movement element for driving a probe in three axial directions with respect to the sample, the fine movement mechanism having a feature that a shield cover is added to the fine movement mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1244188U JPH01118304U (en) | 1988-02-01 | 1988-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1244188U JPH01118304U (en) | 1988-02-01 | 1988-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01118304U true JPH01118304U (en) | 1989-08-10 |
Family
ID=31221881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1244188U Pending JPH01118304U (en) | 1988-02-01 | 1988-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01118304U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01270602A (en) * | 1988-04-22 | 1989-10-27 | Mitsubishi Electric Corp | Fine adjustment mechanism of scanning type tunnel microscope |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4343993A (en) * | 1979-09-20 | 1982-08-10 | International Business Machines Corporation | Scanning tunneling microscope |
-
1988
- 1988-02-01 JP JP1244188U patent/JPH01118304U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4343993A (en) * | 1979-09-20 | 1982-08-10 | International Business Machines Corporation | Scanning tunneling microscope |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01270602A (en) * | 1988-04-22 | 1989-10-27 | Mitsubishi Electric Corp | Fine adjustment mechanism of scanning type tunnel microscope |