JPH028756A - Detector for surface potential distribution - Google Patents

Abstract

PURPOSE:To detect a surface potential of an object to be inspected at a high sensitivity by using a detection head wherein a transparent electrode, optical modulation material layer member and a reflector are laminated. CONSTITUTION:A laser luminous flux transmitted through a beam splitter 4 is made incident into a detection head RA and passes through a transparent electrode Et and an optical modulation material layer member PML to be reflected with a reflector MM made of conducting material. Then, it passes through the member PML again and emitted from the electrode Et to be turned to light changing corresponding to a potential distribution of a charged image in an object O to be inspected. Then, outgoing light from the head RA is reflected with a splitter 4 to be incident into an analyzer 6 after transmitted through a wavelength plate 5 for adjusting quantity of light. An output light of the analyzer 6 is outputted through a photoelectric converter 7.

Description

[Detailed description of the invention] (Industrial application field) The present invention relates to a surface potential distribution detection device.

(Prior Art) In recent years, as the demand for high-quality and high-resolution reproduced images has increased, new television systems such as so-called EDTV and HDTV have been proposed. As is well known, in order to obtain high-quality, high-resolution playback images, an imaging device that can reproduce high-quality, high-resolution playback images and generate clear video signals is required. Although it is needed,
In imaging devices that use an image pickup tube as an image pickup element, there is a limit to miniaturization of the electron beam diameter in the image pickup tube, so it is impossible to achieve high resolution by miniaturizing the electron beam diameter, and the image pickup tube Since the target capacitance of the For some reasons, such as the fact that the frequency band of the video signal is tens of MHz to hundreds of MHz or more, which poses a problem in terms of S/N, it is difficult to use an imaging device to reproduce high-quality, high-resolution images. It is difficult to generate such a video signal.

As described above, conventional imaging devices have been unable to adequately generate video signals that can reproduce high-quality, high-resolution images due to the presence of an essential image sensor for their configuration. In order to solve the above-mentioned problems, the applicant company first obtained a high-resolution optical image using an imaging device using a light-to-light conversion element, and then converted the optical image to a light-to-charge conversion element. We proposed an imaging method and a recording method that record high-resolution charge images on a recording medium having a charge storage layer.

Incidentally, a high-resolution optical image is obtained by an imaging device using the above-mentioned light-to-light conversion element, and the optical image is transferred to a high-resolution charge image on a recording medium having a charge storage layer using the light-to-charge conversion element. When implementing the imaging method and recording method by the applicant's company, which records the charge image as an electrical signal, it is necessary to read out the charge image recorded on the recording medium as an electrical signal. In the case where the reading is carried out optically, for example, a transparent electrode and a light modulating material layer member (a light modulating material layer member exhibiting characteristics that can change the state of light depending on an applied voltage (e.g. electrical A detection device constructed by laminating a dielectric mirror and a layer of light modulating material such as a single crystal of niobium oxide having an optical effect or a layer of nematic liquid crystal exhibiting an electric field scattering effect. head was used.

(Problems to be Solved by the Invention) In the conventional device described above, a transparent electrode and a light modulating material layer member (a light modulating material layer exhibiting a property of changing the state of light depending on an applied voltage) are used as the detection head. parts (e.g.
A material layer for light modulation such as a single crystal of niobium oxide having an electro-optic effect or a layer of nematic liquid crystal showing an electric field scattering effect may be used) and a dielectric mirror. However, the dielectric mirror described above is not easy to manufacture because it has a multilayer structure, and a portion of the light incident on it is transmitted through the dielectric mirror, causing reflection. Since the ratio is not 100%, it is difficult to construct a detection head with high sensitivity, and there has been a demand for improvement measures.

(Means for Solving the Problems) The present invention provides a transparent electrode that allows a laser beam to enter one of two opposing surfaces in an optical member that changes the state of light according to the intensity distribution of an applied electric field. A detection head comprising a reflective mirror made of a conductive material on the other of the two surfaces described above is provided on the object to be detected, which has a surface potential distribution on which both reflective mirrors made of the conductive material are targeted for detection. means for arranging the laser beam in close proximity to the detection head; means for making the laser beam incident from the transparent electrode side of the detection head; and a means for making the laser beam incident on the detection head from the transparent electrode side; is fed to the photoelectric converter via the analyzer.

A surface potential distribution detection device comprising means for photoelectric conversion using the photoelectric converter, and one of two opposing surfaces of an optical member that changes the state of light according to the intensity distribution of an applied electric field. A transparent electrode is provided on the surface to allow the laser beam to enter, and a reflective mirror made of a conductive material is provided on the other of the two surfaces, and a needle-like electrode made of a conductive material is provided on the reflective mirror made of the conductive material. A detection head is provided with an electrostatic shield that protrudes and is further provided with a through hole through which the needle-like electrode made of the conductive material described above is inserted.
means for arranging the electrostatic shield described above in a manner close to the object to be detected having a surface potential distribution; and means for making the laser beam incident on the transparent electrode side of the detection head. , means for applying the light reflected by the reflective mirror made of a conductive material in the above-mentioned detection head and emitted from the transparent electrode to a photoelectric converter via an analyzer, and photoelectrically converted by the above-mentioned photoelectric converter. The present invention provides a surface potential distribution detection device.

(Example) Hereinafter, specific contents of the surface potential distribution detection device of the present invention will be described in detail with reference to the accompanying drawings. FIGS. 1 and 2 are block diagrams of different embodiments of the surface potential distribution detection apparatus of the present invention.

In the block diagram of the surface potential distribution detection device of the present invention shown in FIG. 1, 1 is a laser light source, 2 is a lens,
3 is a polarizer provided as necessary.

4 is a beam splitter, 5 is a wavelength plate provided as necessary, 6 is an analyzer, 7 is a photoelectric converter, RA is a detection head, and O is the object to be detected whose surface potential is to be detected (
recording medium).

The detection head RA used in the surface potential distribution detection device shown in FIG. The light modulating material layer member PML (
For example, a material layer for light modulation such as a monocrystalline niobium oxide having an electro-optical effect or a layer of nematic liquid crystal having an electric field scattering effect may be used) and a reflective mirror MM made of a conductive material. For the reflective mirror MM made of a conductive material, for example, an aluminum thin film formed by applying a vacuum film forming method may be used.

In the surface potential distribution detection device of the present invention shown in FIG. 1, the laser beam emitted from the laser light source 1 is
It is made into parallel light by a lens 2 provided as necessary,
Next, the light is converted into linearly polarized light having a predetermined plane of polarization by a polarizer 3 provided as necessary, and then enters a beam splitter 4 .

The laser beam transmitted through the beam splitter 4 is incident on the detection head RA, and the light modulating material layer member PML (e.g., an electrically A layer of material for light modulation, such as a single crystal of niobium oxide with an optical effect, or a layer of nematic liquid crystal with an electric field scattering effect, etc., may be used. The light reaches the reflection ff1MM and is reflected by the reflection surface.

As mentioned above, the detection head RA includes the transparent IT pole Et and the light modulating material layer member PML (the light modulating material layer member PML exhibiting a characteristic that the state of light can be changed by the applied voltage).
(For example, a material layer for light modulation such as a single crystal of niobium oxide having an electro-optic effect or a layer of nematic liquid crystal showing an electric field scattering effect may be used)) and a reflective fiMM made of a conductive material. It is made up of layers of conductive material that makes it reflective! The IMM side is arranged so as to approach and face the surface of the detected object O, and the detected object O is connected to the light modulating material layer member PML in the detection head RA via the reflective MMM made of the conductive material described above. Since the electric field is applied to the optical modulating layer member PML made of a birefringent material in the detection head RA as described above, the laser beam incident on the optical modulation layer member PML made of a birefringent material in the detection head RA is applied to the reflection fiMM made of a conductive material in the detection head RA described above. The states of normal light and extraordinary light (in this example, the angle of the plane of polarization) generated in the light modulating material layer member PML made of a birefringent material change in accordance with the electric field generated by the electric charge pattern generated.

Therefore, as described above, the laser beam incident from the transparent electrode Et side of the detection head RA passes through the light modulating material layer member PML, is reflected by the reflective mirror MM made of a conductive material, and then passes through the light modulating material layer member PML again. The light emitted from the surface of the transparent electrode Et changes in accordance with the potential distribution of the charge image on the object ◯ to be detected.

As described above, the emitted light from the detection head RA is reflected by the beam splitter 4, passes through the wavelength plate 5 for adjusting the light amount provided as necessary, and then enters the analyzer 6. The light transmitted through the analyzer 6 is converted into an electrical signal by the photoelectric converter 7 as shown in FIG.

The above-mentioned surface potential distribution detection device of the present invention shown in the first diagram uses a detection head RA configured by laminating a transparent electrode Et, a light modulating material layer member PML, and a reflective mirror MM made of a conductive material. Therefore, the laser beam incident on the detection head RA is 100% reflected by the reflective mirror MM made of a conductive material.

The surface potential of the object to be detected can be detected with high sensitivity. Further, the above-mentioned reflective mirror MM made of a conductive material can be manufactured extremely easily by applying a vacuum film forming method, for example.

In the above-described surface potential distribution detection device of the present invention shown in the first figure, the transparent electrode Et, the light modulating material layer members PML and R'Ifl
Since the detection head RA is constructed by stacking reflector mirrors MM manufactured by Monog, the resolution of surface potential distribution detection of the object to be detected detected by this detection head RA is The surface potential distribution of the object to be detected detected by the detection head RA is determined by the shape and dimensions of the reflective mirror MM made of aluminum and the distance between the surface of the object O and the reflective mirror MM made of a conductive material in the detection head. In order to improve the resolution, the distance between the surface of the object to be detected 0 and the reflective mirror MM made of a conductive material in the detection head is made small, and the distance between the reflective mirror MM made of a conductive material in the detection head is
It is necessary to make the shape and dimensions of
The shape and dimensions of the detection head can be made minute, and the reflective mirror MM made of a conductive material can be used on the surface of the object O to be detected and on the detection head.
It may be difficult to perform a detection operation while maintaining a constant, minute interval.

The detection head RA used in the surface potential distribution detection device shown in FIG. 2 is a detection head RA configured to solve the above-mentioned problems.
The detection head RA shown in FIG. , a layer of material for light modulation, such as a monocrystalline niobium oxide having an electro-optical effect, or a layer of nematic liquid crystal exhibiting an electric field scattering effect) and a reflective fiMM made of a conductive material (e.g. A thin aluminum film formed by applying a film formation method) is laminated, a needle-like electrode ED made of a conductive material is protruded from the reflective ff1MM made of the conductive material, and a needle-like electrode FD made of the conductive material is further formed. The electrostatic shield S is provided with a through hole 8 through which the electrostatic shield S is inserted.

In the detection head RA shown in FIG.
D makes it possible to detect the surface potential distribution on the detection object 0 with high resolution. The configurations of the incident light side of the beam splitter 4 and the output light side of the beam splitter 4 in FIG. 2 may be the same as those of the surface potential distribution detection device shown in FIG. 1.

In the surface potential distribution detection device of the present invention shown in FIG. 2, the laser beam emitted from the laser light source is made into parallel light by a lens provided as necessary, and then After the light is converted into linearly polarized light having a predetermined plane of polarization by a polarizer, the light is incident on the beam splitter 4.

The laser beam transmitted through the beam splitter 4 is incident on the detection head RA, and the light modulating material layer member PML (for example, an electrically A layer of material for light modulation, such as a single crystal of niobium oxide with an optical effect, or a layer of nematic liquid crystal with an electric field scattering effect, etc., may be used. It reaches the reflection fltMM and is reflected by the reflection surface.

As mentioned above, the detection head RA includes the transparent electrode Et and the light modulating material layer member PML (the light modulating material layer member PML (which exhibits a property that the state of light can be changed by the applied voltage).
For example, a material layer for light modulation such as a monocrystalline niobium oxide having an electro-optical effect or a layer of nematic liquid crystal having an electric field scattering effect may be used) and a reflective mirror MM made of a conductive material. are laminated, and a needle-like electrode ED made of a conductive material is attached to the reflective mirror MM made of a conductive material.
The electrostatic shield S is provided with a through hole 8 through which the needle-shaped electrode ED made of the above-mentioned conductive material is inserted. The needle-shaped electrode ED is arranged so as to approach and face the surface of the object to be detected O, and the light modulating material layer member PML in the detection head RA includes the needle-shaped electrode E made of the conductive material described above.
Since an electric field is applied by the object O to be detected through D and the reflective fiMM made of a conductive material, the light modulating material layer member PM made of a birefringent material in the detection head RA as described above
The laser beam incident on L is picked up by the needle-shaped electrode ED made of a conductive material in the detection head RA, and is applied to a birefringent material according to the electric field generated by the charge pattern applied to the reflective mirror MM made of a conductive material. The states (in this example, the angle of the plane of polarization) of normal light and extraordinary light generated in the light modulating material layer member PML change.

Therefore, as described above, the laser beam incident from the transparent electrode Et side of the detection head RA passes through the light modulating material layer member PML, is reflected by the reflective mirror MM made of a conductive material, and then passes through the light modulating material layer member PML again. The light emitted from the surface of the transparent electrode Et changes in accordance with the potential distribution of the charge image on the object O described above.

As described above, the emitted light from the detection head RA is reflected by the beam splitter 4, passes through a wavelength plate for adjusting the light amount provided as necessary, and then enters the analyzer. The light that passes through the analyzer is converted into an electrical signal by a photoelectric converter.

The above-mentioned surface potential distribution detection device of the present invention shown in FIG. ! Since the detection head RA is constructed by laminating the detection head RA, the laser beam incident on the detection head RA is 100% reflected by the reflective mirror MM made of a conductive material, and therefore the detection head RA is The surface potential can be detected with high sensitivity, and the needle-like electrode is inserted into the hole 8 provided in the electrostatic shield S and is electrostatically shielded from other parts. By using an extremely fine ED, the surface potential distribution of the object to be detected can be detected with high resolution.

(Effects of the Invention) As is clear from the above detailed explanation, the surface potential distribution detection device of the present invention has the following advantages: A detection head is provided with a transparent electrode that allows the laser beam to enter on one of the two surfaces, and a reflective mirror made of a conductive material on the other of the two surfaces,
A means for arranging the above-mentioned reflective mirror made of a conductive material in close proximity to the object to be detected having a surface potential distribution, and a laser beam incident on the transparent electrode side of the above-mentioned detection head. and means for applying the light reflected by the reflective mirror made of a conductive material in the detection head and emitted from the transparent electrode to a photoelectric converter via an analyzer, and photoelectrically converted by the photoelectric converter. a surface potential distribution detection device comprising a surface potential distribution detection device, and a transparent electrode for making a laser beam incident on one of two opposing surfaces of an optical member that changes the state of light according to the intensity distribution of an applied electric field; A reflective mirror made of a conductive material is provided on the other of the two surfaces, and a needle-shaped electrode made of a conductive material is provided protruding from the reflective mirror made of the conductive material, and a needle-shaped electrode made of the conductive material is further provided on the other surface of the two surfaces. A detection head comprising an electrostatic shield provided with a through hole through which an electrode is inserted is placed in close proximity to an object to be detected having a surface potential distribution with the electrostatic shield being detected. means for arranging the laser beam from the transparent electrode side of the detection head; and means for transmitting the laser beam reflected by a reflective mirror made of a conductive material in the detection head and emitted from the transparent electrode to an analyzer. A detection device for detecting surface potential distribution, comprising a means for applying it to a photoelectric converter via a photoelectric converter and performing photoelectric conversion in the photoelectric converter, the detection head being a transparent electrode Et, a light modulating material layer member PML, and a conductive Since the detection head RA is constructed by laminating a reflective mirror MM made of a material, the laser beam incident on the detection head RA is 100% reflected by the reflective mirror MM made of a conductive material. , Therefore, the surface potential of the object to be detected can be detected with high sensitivity, and it is inserted into the hole 8 provided in the electrostatic shield S and is electrostatically shielded from other parts. By using an extremely fine needle-like electrode ED in the state where the needle is present, the surface potential distribution of the object to be detected can be detected with high resolution.According to the present invention, the above-mentioned conventional problems can be overcome Solvable.

[Brief explanation of the drawing]

FIGS. 1 and 2 are block diagrams of different embodiments of the surface potential distribution detection apparatus of the present invention. DESCRIPTION OF SYMBOLS 1... Laser light source, 2... Lens, 3... Polarizer, 4... Beam splitter, 5... Wave plate, 6...
・Analyzer. 7...Photoelectric converter, RA...detection head, 0
...The object to be detected whose surface potential is to be detected, Et.
...Transparent electrode, PML...Light modulating material layer member, MM...
・Reflector made of conductive material, ED...Acicular electrode made of conductive material, Patent applicant: Japan Victor Co., Ltd. Procedural amendment (voluntary) Procedural amendment (voluntary) March 9, 1989, 1, Incident Indication of Patent Application No. 43868 of 1988 2 Title of the invention Surface potential distribution detection device 3 Relationship to the amended case Patent Applicant Address 3-12 Moriya-cho, Kanayō-ku, Yokohama-shi, Kanagawa Prefecture Name (432) Japan Victor Co., Ltd. 4, Agent Patent Application No. 43868 of 1988 2, Name of the invention Surface potential distribution detection device 3, Relationship with the amended person case Patent Applicant location Yokohama, Kanagawa Prefecture 3-12 Moriyamachi, Kanayo-ku, Ichi Name (432) Victor Company of Japan Co., Ltd. 4, Agent 5, Date of amendment order (voluntary) Specification page 20, line 5 r Detection head, 0...''
is corrected as follows. Facsimile No. 03 (472) 2257 5. Date of amendment order (voluntary) 6. Number of claims increased by amendment 17. Target of amendment [detection head, 0...'' i. Contents of amendment (1) Patent claims Correct the range as shown in the attached sheet. (2) Page 6, line 5 of the specification “The present invention applies...
Correct the light according to... as follows. rThe present invention provides a transparent electrode that allows an electromagnetic radiation flux to be incident on one of two opposing surfaces of an optical member that changes the state of light according to the intensity distribution of an applied electric field, and Conductive material on the other side! means for arranging a detection head provided with a reflective mirror made of f.f. in such a manner that the side of the reflective mirror made of a conductive material is close to an object to be detected having a surface potential distribution to be detected;
A surface potential distribution comprising means for making an electromagnetic radiation flux incident from the transparent electrode side of the detection head described above, and means for emitting the electromagnetic radiation flux reflected by a reflective mirror made of a conductive material in the detection head from the transparent electrode. (3) Specification, page 8, line 2 [1 is a laser light source, J is corrected as follows. [1 is the source of the electromagnetic radiation flux, J (4) [Surface potential distribution detection device shown in FIG. 1] on page 8, line 9 of the specification is corrected as follows. 1. In the surface potential distribution detection device shown in FIG. It is written as follows. Furthermore, electromagnetic radiation is light in a broad sense. In other words, the entire spectral range of radiation called electromagnetic waves (
It is well known that this term refers to radiation in the range from γ-rays, X-rays, etc. to long-wave radio waves. )Page 17, line 5 of the specification: ``Surface of the present invention...''
... is applied," is corrected as follows. [1] The surface potential distribution detection device of the present invention includes a transparent electrode that allows an electromagnetic radiation flux to be incident on one of two opposing surfaces of an optical member that changes the state of light according to the intensity distribution of an applied electric field. and a detection head having a reflective mirror made of a conductive material on the other of the two surfaces described above, and a detection head having a surface potential distribution where the reflective mirror made of the conductive material is targeted for detection. means for arranging the electromagnetic radiation flux from the transparent electrode side of the above-mentioned detection head; (6) Specification, page 20, line 3, "1...laser light source,"
... is applied," is corrected as follows. "1... Source of electromagnetic radiation flux (laser light source)" [
Claim 1: In an optical member that changes the state of light according to the intensity distribution of an applied electric field, a transparent electrode is provided on one of two opposing surfaces, and a transparent electrode is provided to cause a heavy beam to be incident on one side, and the above-mentioned 2 A detection head having a reflective mirror made of a conductive material on the other surface is placed in close proximity to an object to be detected with the reflective mirror made of a conductive material having a surface potential distribution to be detected. means for arranging the electric current reflected by the reflective mirror made of a conductive material in the above-mentioned detection head from the transparent electrode side of the above-mentioned detection head;
A surface potential distribution detection device 2 comprising means for detecting a surface potential distribution, which makes a laser beam incident on one of two opposing surfaces of an optical member that changes the state of light according to the intensity distribution of an applied electric field. A detection head is provided with a transparent electrode and a reflective mirror made of a conductive material on the other of the two surfaces described above.
means for arranging J- in a manner close to an object to be detected having a surface potential distribution to be detected; means for causing a laser beam to enter the detection head from the transparent electrode side of the detection head; A means for applying the light reflected by a reflective mirror made of a conductive material in the head and emitted from the transparent electrode to a photoelectric converter via an analyzer, and photoelectrically converting the light in the photoelectric converter. When the detection device is turned on, the electricity generated in the head becomes more electric.Amendment to the procedures filed on July 13, 1989, Director General of the Patent Office, 1) Moon Yi, 1988, Display of the case Patent Application No. 43868 2, Name of the invention: Device for detecting surface potential distribution 3, Relationship with the amended person case Patent Name of applicant, location 3-12 Moriya-cho, Kanayō-ku, Yokohama-shi, Kanagawa Prefecture Name (432) Japan Victor Co., Ltd. 4, agent facsimile 03 (472) 2257 No. 5, date of amendment order: May 17, 1989 (shipment date: July 11, 1989) 6,
Target of amendment Column 7 of the content of amendment of the written procedural amendment submitted on March 14, 1989, Contents of amendment (1) (3) of the content of amendment of the written procedural amendment submitted on March 14, 1989 ) should be amended as follows. ``(3) Page 8, line 3 of the specification, ``1 is a laser light source,'' is corrected as follows. [1 is a source of electromagnetic radiation flux,” J (2,) The statement in paragraph (5) in the content of amendment column of the procedural amendment submitted on March 14, 1989 is amended as follows. ++' (s) On page 17, line 15 of the specification, "...is applied to the surface of the present invention" is corrected as follows. [Secondly, the surface potential distribution detection device of the present invention includes a transparent electrode that allows an electromagnetic radiation flux to be incident on one of two opposing surfaces of an optical member that changes the state of light according to the intensity distribution of an applied electric field. and a detection head having a reflective mirror made of a conductive material on the other of the two surfaces described above, and a detection head having a surface potential distribution where the reflective mirror made of the conductive material is targeted for detection. means for arranging the electromagnetic radiation flux from the transparent electrode side of the above-mentioned detection head; a surface potential distribution detection device comprising means for emitting radiation from an electrode;

Claims (1)

[Scope of Claims] 1. A transparent electrode is provided on one of two opposing surfaces of an optical member that changes the state of light according to the intensity distribution of an applied electric field, and the above-mentioned 2 A detection head having a reflective mirror made of a conductive material on the other surface of the detection head is arranged such that the reflective mirror made of the conductive material is close to an object having a surface potential distribution to be detected. means for arranging the laser beam from the transparent electrode side of the detection head; and means for making the laser beam incident on the transparent electrode side of the detection head; A detection device for surface potential distribution, comprising means for applying the voltage to a photoelectric converter and performing photoelectric conversion with the photoelectric converter. 2. In an optical member that changes the state of light according to the intensity distribution of the applied electric field, a transparent electrode is provided to make the laser beam incident on one of the two opposing surfaces, and the other of the two surfaces mentioned above is provided. A reflective mirror made of a conductive material is provided in the reflector, and a needle-shaped electrode made of a conductive material is provided protruding from the reflective mirror made of a conductive material, and a through-hole is provided through which the needle-shaped electrode made of a conductive material is to be inserted. means for arranging a detection head provided with an electrostatic shield in such a manner that the electrostatic shield is close to an object to be detected having a surface potential distribution to be detected; , a means for making a laser beam incident from the transparent electrode side of the detection head, and a means for applying the light reflected by a reflective mirror made of a conductive material in the detection head and emitted from the transparent electrode to a photoelectric converter via an analyzer. and a means for performing photoelectric conversion using the photoelectric converter described above.