JPH028731Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field This invention relates to a workpiece holding device for a dicing machine that cuts a flat workpiece into pieces vertically and horizontally.

Conventional technology Conventionally, dicing involves fixing a flat workpiece to a table, bringing a rotating blade connected to a spindle into contact with the workpiece, and cutting the workpiece by moving the table and blade relative to each other. There is a machine. In addition, in order to hold the workpiece, a large number of small holes of 1 mm or less in diameter are arranged on the table at intervals of several mm, and these small holes are connected to a negative pressure generator to suction the workpiece on the table with negative pressure. A work holding device is used.

Problems that the invention aims to solve: However, as the chips formed by cutting the workpiece become smaller, the distance between the small holes becomes larger relative to the chips, and it is difficult to make the surface of the chip uniformly face the small holes. In some cases, the small holes may only face the ends of the chip. As a result, the force to attract the chips to the table is insufficient, and the chips are likely to fly away due to cutting resistance.

For this purpose, a pedestal member such as a sheet, ceramic, glass, etc. is adhered to the back surface of the work before cutting, and this pedestal member is sucked onto the table by negative pressure. Therefore, the pedestal member is held in close contact with the table in order to close the small hole on the table with its entire surface, and even if the cut chips are small, they are held in an adhesive state on the pedestal member and do not scatter. However, it requires time and equipment to bond the pedestal member to the workpiece, and requires time and equipment to peel the workpiece from the pedestal member even after cutting, which increases processing costs.

Means for Solving the Problems This invention includes a rotatable spindle connected to a motor, a blade held by the spindle, and a blade located below the blade and formed of a porous material to prevent the spindle from rotating. a table that moves in a direction perpendicular to the axial direction of the blade; a negative pressure generator that sends negative pressure to the table; and a pressing body that presses the table against the table.

Function: Therefore, since the table is made of a porous member, even if the workpiece is cut into a large number of chips, the entire surface of the workpiece blocks the holes in the porous member. As a result, the chips are attracted to the table with a strong suction force by the negative pressure of the negative pressure generating section, and furthermore, the chips are not scattered from the table because they are pressed against the table by the pressing body. This eliminates the work of adhering a pedestal member such as a sheet, ceramic, or glass to the workpiece.

Embodiment An embodiment of this invention will be described based on the drawings. 1 is a spindle connected to a motor (not shown), and a blade 2 is fixedly attached to this spindle 1. Reference numeral 3 denotes a table made of a porous material such as casting, and this table 3 has a large number of mutually continuous through holes 4 formed therein. The cross-sectional area of these through holes 4 may be large enough to allow gas to flow. Also, table 3
is fitted in a sealed state into a case 5 having an open top surface, and a connecting portion 7 for connecting the through hole 4 to the negative pressure generating portion 6 is formed in the case 5 . Furthermore, table 3
A breathable bottom plate 8 is placed on the upper surface of the holder.

Furthermore, a plurality of U-shaped supports 10 located on both sides of the lower part of the blade 2 are fixed to a blade cover 9 that covers the upper part and both sides of the blade 2, and a plurality of pressing bodies are mounted on the lower surface of these supports 10. A roller 11 is rotatably held with its axis parallel to the rotation axis of the blade 2. These rollers 11 are configured to elastically press the workpiece 12 on the bottom plate 8, for example, by being made of an elastic material.

Note that the spindle 1, blade cover 9, and support body 10 are arranged in the vertical direction (Z direction) and the longitudinal direction (Y direction).
The table 3 is movable in the left-right direction (X direction) and the turning direction (B direction).

Next, a microscope 13 for observing the surface of the workpiece 12 held on the bottom plate 8 of the table 3, and a microscope drive unit 14 for moving the microscope 13 in the vertical direction and the front-back direction are provided.

In such a configuration, when the negative pressure generator 6 is driven, outside air is sucked from above the table 3 through the bottom plate 8, so that the workpiece 1 is placed on the bottom plate 8.
2 is placed, the through hole 4 is closed by the workpiece 12, and the workpiece 12 is sucked into the table 3 by negative pressure. Then, the work 12 is cut by lowering the spindle 1 and reciprocating the table 3 in the left-right direction to bring the blade 2 into contact with the work 12. By performing such an operation every time the spindle 1 is moved back and forth, the workpiece 12
A plurality of cutting grooves are formed in parallel. Next, the table 3 is turned 90 degrees and the above-described operation is repeated to cut the workpiece 12, whereby the workpiece 12 is cut vertically and horizontally and shredded into a large number of fine chips.

At this time, since the through holes 4 of the table 3 are uniformly distributed, the chips block the through holes 4 over the entire surface.
Therefore, the chips are attracted to the bottom plate 8 on the table 3 by a strong suction force. Furthermore, roller 11
The blades press the workpiece 12 against the table 3 on both sides of the blade 2 while rolling as the table 3 moves. Therefore, the chips will not scatter even if they are subjected to strong cutting resistance.

In addition, since the workpiece 12 can be placed directly on the table 3 without being glued to the pedestal member,
The setup time before the cutting operation can be significantly shortened, and by stopping the negative pressure generating section 6, a large number of shredded chips can be easily removed from the table 3 together with the bottom plate 8 at once. .

Further, when the table 3 moves in the X direction, the rollers 11 roll on the workpiece 12, but the rollers 11 do not apply enough resistance to the workpiece 12 to impair the smoothness of the reciprocating movement of the table 3.

Note that the pressing body is not limited to the roller 11, and an elastic material, a leaf spring, or a sled-shaped plate may be used. Alternatively, the blade cover 9 may be used as a support and these pressing bodies may be directly attached to this support.

Furthermore, the porous material forming the table 3 is not limited to casting. For example, it may be a hard spongy material with a large number of irregularly arranged holes. Alternatively, the table 3 may be formed of a porous material in which thin plates are assembled in a fine lattice shape or honeycomb shape, and through holes are regularly arranged in a certain direction.

Effects of the invention Since this invention is constructed as described above, the through holes of the table formed by the porous material can be maintained in a negative pressure state, and thereby, even when the workpiece is cut into a large number of fine chips. It is possible to close the hole with the entire surface of the chip, and as a result, the chip can be strongly attracted to the table by the negative pressure of the negative pressure generating part, and furthermore, the chip can be pressed against the table by the pressing body. Therefore, it is possible to reliably prevent chips from scattering from the table, and as a result, it is possible to omit the work of gluing pedestal members such as sheets, ceramics, glass, etc. to the workpiece, reducing processing man-hours and costs. It has the effect of being able to aim for down.

[Brief explanation of the drawing]

The drawing shows one embodiment of this invention.
The figure is an enlarged longitudinal sectional front view, FIG. 2 is an enlarged longitudinal sectional side view, FIG. 3 is a front view, and FIG. 4 is a plan view. 1...Spindle, 2...Blade, 3...Table, 4...Through hole, 6...Negative pressure generating section, 7...
Connection part, 9...Blade cover (support body), 10
... Support body, 11 ... Roller (pressing body).

Claims (1)

[Scope of utility model registration request] A rotatable spindle connected to a motor,
A blade held by the spindle, a table located below the blade and made of porous material that moves in a direction perpendicular to the axial direction of the spindle, and a negative pressure generator that sends negative pressure to the table. 1. A workpiece holding device for a dicing machine, comprising: a support member that is fixedly provided, and a pressing member that is disposed on the lower side of the blade and presses the workpiece against the table.