JPH0287065U - - Google Patents
Info
- Publication number
- JPH0287065U JPH0287065U JP16589988U JP16589988U JPH0287065U JP H0287065 U JPH0287065 U JP H0287065U JP 16589988 U JP16589988 U JP 16589988U JP 16589988 U JP16589988 U JP 16589988U JP H0287065 U JPH0287065 U JP H0287065U
- Authority
- JP
- Japan
- Prior art keywords
- rotating container
- evaporation
- upward opening
- shaped rotating
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 2
- 238000009825 accumulation Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16589988U JPH0287065U (OSRAM) | 1988-12-21 | 1988-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16589988U JPH0287065U (OSRAM) | 1988-12-21 | 1988-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0287065U true JPH0287065U (OSRAM) | 1990-07-10 |
Family
ID=31452803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16589988U Pending JPH0287065U (OSRAM) | 1988-12-21 | 1988-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0287065U (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005247615A (ja) * | 2004-03-03 | 2005-09-15 | Ricoh Co Ltd | Ｉｉｉ族窒化物の結晶成長方法及び結晶成長装置 |
| JP2007204784A (ja) * | 2006-01-31 | 2007-08-16 | Bridgestone Corp | 粒子コーティング方法及び粒子コーティング装置 |
| JP2016176127A (ja) * | 2015-03-20 | 2016-10-06 | 株式会社豊田中央研究所 | 成膜装置および成膜方法 |
-
1988
- 1988-12-21 JP JP16589988U patent/JPH0287065U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005247615A (ja) * | 2004-03-03 | 2005-09-15 | Ricoh Co Ltd | Ｉｉｉ族窒化物の結晶成長方法及び結晶成長装置 |
| JP2007204784A (ja) * | 2006-01-31 | 2007-08-16 | Bridgestone Corp | 粒子コーティング方法及び粒子コーティング装置 |
| JP2016176127A (ja) * | 2015-03-20 | 2016-10-06 | 株式会社豊田中央研究所 | 成膜装置および成膜方法 |