JPH0286877A - Cleaning device - Google Patents

Abstract

PURPOSE:To remarkably decrease the amount of cleaning solvent dissipated and to reduce cleaning cost by providing a heat exchanger through which a refrigerant is passed to the inside of the wall surface of a device vessel in contact with bath tanks. CONSTITUTION:When operation is stopped and heaters 3A, 3B are shut off, a refrigerant is supplied by means of a refrigerant feeder 5 into a heat exchanger 4, by which bath tanks 2A, 2C in contact with the heat exchanger 4 are rapidly cooled by means of the heat exchanger 4 and the generation ot the vapor of the solvent can be prevented. As a result, the amount of the solvent dissipated can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cleaning device, and more particularly to a structural improvement of a cleaning device for cleaning IC parts and electronic parts to which oil, fat, flux, etc. have adhered.

[Prior Art] Such a cleaning device cleans objects to be cleaned, such as the above-mentioned IC parts, using an organic cleaning solvent such as chlorofluorocarbon or trichlorethylene, and an example thereof is shown in FIG.

In the figure, the device container 1 is a closed body in which a bottom wall 11 and side walls 12 and 13 are provided with a heat insulating material of a predetermined thickness.
A carry-in port 14 is provided at the upper end of 3. Inside the container 1, there are bathtubs 2A, 2B, 2 filled with cleaning solvent on the bottom wall 11.
C are provided adjacent to each other with a relatively thin heat insulating layer interposed therebetween.

In this example, the bathtubs 2A to 2C are a hot bathtub, a cold bathtub, and a hot bathtub, respectively.
The bathtubs 2A and 2C have U-shaped heaters 3A and 3B protruding from the bottom wall 11. Further, the bathtub 2B is provided with an ultrasonic vibrator 6 on the bottom surface, and a flexible pipe 71 through which cooling water flows is provided on the inner periphery of the side surface.

Further, a flexible pipe 72 is provided on the inner wall of the container 1 above each of these bathtubs 2A, 2B, and the flexible pipe 72 allows each of the bathtubs 2A and 2B to
The solvent vapor evaporated from ~2C is condensed and recovered.

A conveyor 8 is disposed inside the container 1, which passes through the cleaning solvent in each bathtub 2A, 2B and over the cleaning solvent in the bathtub 2C, and extends out of the container 1 through an inlet 14. . A magazine 81 containing items to be cleaned is attached to a jig provided on the conveyor 8, and the articles are sequentially placed in each of the bathtubs 2A to 2A as shown by the arrows in the figure.
Transfer to 2C and wash.

That is, in the hot bath 2A, oil and fat attached to the object to be cleaned is expanded and a part of it is dissolved in the cleaning liquid, and in the cold bath 2B, the oil and fat, etc. are peeled off by ultrasonic waves, and the object to be cleaned is cooled. Next, in the vapor tank 2C, the solvent vapor is condensed on the surface of the object to be rinsed.

Each of the flexible pipes 71 and 72 is connected to the cooling water supply device 5 outside the device container to receive cooling water (arrows in the figure).

[Problems to be Solved by the Invention] In the conventional cleaning apparatus described above, a large amount of solvent vapor is generated particularly from the heated hot tub and vapor tank. Most of these solvent vapors are recovered by the cooling coils as described above, but some of them are dissipated out of the container through the inlet and the like. Although some dissipation of solvent during operation is unavoidable,
Even after the operation is stopped, the temperature of the cleaning liquid in the bathtub decreases slowly due to the effect of the insulation material, and the inventors have estimated that the solvent dissipation will occur if the bathtub is operated for 8 hours a day, stopped for the remaining time, and operated for -month. The amount reaches more than 1001.

Therefore, countermeasures such as installing a new solvent recovery device have been taken, but this has the problem of significantly increasing equipment costs.

The present invention solves these problems, and aims to provide a cleaning device that can extremely reduce the amount of solvent dissipated at a relatively low cost.

[Means for Solving the Problems] The configuration of the present invention is explained with reference to FIG. 1.
A plurality of bathtubs 2A, 2B, and 2C filled with a cleaning solvent are provided in the apparatus container 1 constructed of the above to wash the objects to be cleaned carried into the apparatus container 1, and the bathtub 2A
A heater 3 that heats the cleaning solvent to at least one of ~2C
The cleaning device equipped with A and 3B has the above-mentioned heat insulating wall 12.
．． No. 13, bathtubs 2A and 2 equipped with the heaters 3A and 3B
A heat exchanger 4 is provided within the wall surface in contact with C, and a refrigerant supply device 5 is provided to supply refrigerant to the heat exchanger 4 when the heaters 3A and 3B are stopped.

[Function] In the cleaning device configured as described above, when the operation is stopped and the heater is stopped, the refrigerant is supplied to the heat exchanger, and the heat exchanger rapidly cools the bathtub in contact with the heat exchanger to prevent the generation of solvent vapor. As a result, the amount of -solvent dissipated can be kept small.

[Example] An example of the present invention will be described focusing on the differences from the conventional example.

In FIG. 1, a closed device container 1 having a bottom wall 11 and side walls 12,13 with internal heat insulating material includes a bottom wall 11 and a side wall 12,13.
Bathtubs 2A, 2B, and 2C are provided above, of which bathtub 2
Heaters 3A and 3B are provided protruding inside A and 2B to heat the cleaning solvent.

In the lower half of the stepped and smaller diameter side wall 12.13,
A heat exchanger 4 is provided within the wall surface in contact with the side surface of each of the bathtubs 2A, 2C. The heat exchanger 4 is provided vertically extending within the wall with a constant thickness, and is also provided within the front and rear side walls (not shown) so as to communicate with each other.
It is installed protrudingly.

Cooling water is supplied to the heat exchanger 4 from a cooling water supply device 5 outside the device container 1 via an automatic valve 51. It is activated to open by a signal.

Other structures are the same as before.

In such a cleaning device, the operation is stopped and the heater 3A,
When the power supply to 3B is stopped, cooling water is supplied to the heat exchanger 4, and the bathtubs 2A and 2C are rapidly cooled. This is the second
It is shown by line X in the figure, and line y shows a conventional example in which no heat exchanger 4 is provided.

As can be seen from the figure, the solvent temperature rapidly changes from near the boiling point (47, 57°C) to room temperature (20°C) due to the cooling action of the heat exchanger.
). Since the solvent temperature and its vapor pressure are in a proportional relationship as shown in FIG. 3, the higher the solvent temperature, the greater the amount of dissipation. Therefore, the shaded area in Figure 2 is the savings in the amount of solvent dissipated in the equipment equipped with a heat exchanger, and in the experiments conducted by the inventors, when the solvent is CFC, the above is achieved by installing a heat exchanger. The amount of dissipation is reduced by about 60% from about 5g to about 2g per operation.

Note that the structure of the heat exchanger 4 is not limited to the one described above, and may be one in which flexible pipes 42 are arranged in a stacked manner, for example, as shown in FIG.

The refrigerant is not limited to the above-mentioned cooling water, and oil, air, or the like can be used. Also, a manual valve may be used instead of the automatic valve.

In addition to CFCs, the organic solvent used in the cleaning solution is trichlorethylene,
Trichloroethane etc. can be used.

Furthermore, if a hot wire such as hot water is passed through the heat exchanger 4 before the start of operation, the cleaning solvent can be efficiently heated by the heater, and the start-up time of the device can be shortened.
Accordingly, the dissipation of the cleaning solvent can also be suppressed to a low level.

[Effects of the Invention] As described above, the cleaning device of the present invention has a simple and inexpensive structure in which a heat exchanger for passing a refrigerant is installed in the wall of the device container in contact with the bathtub, thereby significantly reducing the amount of cleaning solvent dissipated. This realized a reduction in cleaning costs.

[Brief explanation of drawings]

Figure 1 is a schematic sectional view of a cleaning device showing an embodiment of the present invention, Figure 2 is a diagram comparing the solvent cooling effect with conventional equipment, Figure 3 is a diagram showing the relationship between solvent temperature and its vapor pressure, and Figure 3 is a diagram showing the relationship between solvent temperature and its vapor pressure. FIG. 4 is a schematic cross-sectional view of a cleaning device showing another example of a heat exchanger, and FIG. 5 is a schematic cross-sectional view of a cleaning device showing a conventional example. 1... Equipment container 12.13... Side wall (insulation wall) 2A, 2B, 2C... Bathtub 3A, 3B... Heater 4... Heat exchanger 41... Fin 42... Corrugated pipe 5...Cooling water supply device (refrigerant supply device) 51...Automatic valve 6...Ultrasonic vibrator 8...Conveyor Figure 1 Figure 2 Discharge temperature Figure 4

Claims (1)

[Claims] A plurality of bathtubs filled with a cleaning solvent are provided in an apparatus container configured with a heat insulating wall to wash objects to be cleaned carried into the apparatus container, and the cleaning solvent is heated in at least one of the bathtubs. In the cleaning device equipped with a heater, a heat exchanger is provided in a wall surface of the heat insulating wall that is in contact with the bathtub provided with the heater, and a refrigerant supply device supplies refrigerant to the heat exchanger when the heater is stopped. A cleaning device characterized by being provided with.