JPH0286138U - - Google Patents
Info
- Publication number
- JPH0286138U JPH0286138U JP16587888U JP16587888U JPH0286138U JP H0286138 U JPH0286138 U JP H0286138U JP 16587888 U JP16587888 U JP 16587888U JP 16587888 U JP16587888 U JP 16587888U JP H0286138 U JPH0286138 U JP H0286138U
- Authority
- JP
- Japan
- Prior art keywords
- support rod
- wafer
- receivers
- longitudinal direction
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
Description
図面は本考案の実施例を示し、第１図は横型支
持キヤリアの斜視図、第２図は第１図の側面図、
第３図は第２図の−視断面図、第４図は縦型
支持キヤリアの側面図、第５図は第４図の−
視断面図である。
１，１ａ……支持杆、２……ウエハ、３，３ａ
……突条、４，４ａ……受け体、５，５ａ……受
け面。
The drawings show an embodiment of the invention, FIG. 1 being a perspective view of a horizontal support carrier, FIG. 2 being a side view of FIG.
Figure 3 is a cross-sectional view of Figure 2, Figure 4 is a side view of the vertical support carrier, and Figure 5 is a - of Figure 4.
FIG. 1, 1a... Support rod, 2... Wafer, 3, 3a
... protrusion, 4, 4a... receiver, 5, 5a... receiving surface.
Claims (1)
えた支持杆に、前記ウエハの裏面が接当する受け
面を備えた受け体を、支持杆の長手方向に適宜間
隔で複数個突設し、該各受け体における受け面を
、前記支持杆の長手方向に対して適宜角度に傾斜
したことを特徴とするウエハ用支持キヤリア。 A support rod having a pair of right and left protrusions with which the outer peripheral surface of the wafer comes into contact is provided with a plurality of receivers each having a receiving surface with which the back surface of the wafer comes into contact at appropriate intervals in the longitudinal direction of the support rod. A wafer support carrier characterized in that the receiving surface of each of the receivers is inclined at an appropriate angle with respect to the longitudinal direction of the support rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16587888U JPH0286138U (en) | 1988-12-22 | 1988-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16587888U JPH0286138U (en) | 1988-12-22 | 1988-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0286138U true JPH0286138U (en) | 1990-07-09 |
Family
ID=31452762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16587888U Pending JPH0286138U (en) | 1988-12-22 | 1988-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0286138U (en) |
-
1988
- 1988-12-22 JP JP16587888U patent/JPH0286138U/ja active Pending