JPH0284332U - - Google Patents
Info
- Publication number
- JPH0284332U JPH0284332U JP1988164630U JP16463088U JPH0284332U JP H0284332 U JPH0284332 U JP H0284332U JP 1988164630 U JP1988164630 U JP 1988164630U JP 16463088 U JP16463088 U JP 16463088U JP H0284332 U JPH0284332 U JP H0284332U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stopping mechanism
- belt
- quartz arm
- transported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988164630U JPH0284332U (enExample) | 1988-12-20 | 1988-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988164630U JPH0284332U (enExample) | 1988-12-20 | 1988-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0284332U true JPH0284332U (enExample) | 1990-06-29 |
Family
ID=31450410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988164630U Pending JPH0284332U (enExample) | 1988-12-20 | 1988-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0284332U (enExample) |
-
1988
- 1988-12-20 JP JP1988164630U patent/JPH0284332U/ja active Pending