JPH0282772U - - Google Patents
Info
- Publication number
- JPH0282772U JPH0282772U JP16013388U JP16013388U JPH0282772U JP H0282772 U JPH0282772 U JP H0282772U JP 16013388 U JP16013388 U JP 16013388U JP 16013388 U JP16013388 U JP 16013388U JP H0282772 U JPH0282772 U JP H0282772U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- flange
- attached
- lid body
- rotary substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16013388U JPH0282772U (de) | 1988-12-09 | 1988-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16013388U JPH0282772U (de) | 1988-12-09 | 1988-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282772U true JPH0282772U (de) | 1990-06-26 |
Family
ID=31441934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16013388U Pending JPH0282772U (de) | 1988-12-09 | 1988-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282772U (de) |
-
1988
- 1988-12-09 JP JP16013388U patent/JPH0282772U/ja active Pending
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