JPH0282026U - - Google Patents
Info
- Publication number
- JPH0282026U JPH0282026U JP16207888U JP16207888U JPH0282026U JP H0282026 U JPH0282026 U JP H0282026U JP 16207888 U JP16207888 U JP 16207888U JP 16207888 U JP16207888 U JP 16207888U JP H0282026 U JPH0282026 U JP H0282026U
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- post
- projection exposure
- projection
- exposure apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16207888U JPH0282026U (tr) | 1988-12-14 | 1988-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16207888U JPH0282026U (tr) | 1988-12-14 | 1988-12-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0282026U true JPH0282026U (tr) | 1990-06-25 |
Family
ID=31445582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16207888U Pending JPH0282026U (tr) | 1988-12-14 | 1988-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0282026U (tr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7060115B2 (en) | 2000-07-24 | 2006-06-13 | Tokyo Electron Limited | Substrate processing method, substrate processing apparatus and substrate carrying method |
| JP2008147315A (ja) * | 2006-12-07 | 2008-06-26 | Canon Inc | 露光装置、露光・現像システム及びデバイス製造方法 |
-
1988
- 1988-12-14 JP JP16207888U patent/JPH0282026U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7060115B2 (en) | 2000-07-24 | 2006-06-13 | Tokyo Electron Limited | Substrate processing method, substrate processing apparatus and substrate carrying method |
| JP2008147315A (ja) * | 2006-12-07 | 2008-06-26 | Canon Inc | 露光装置、露光・現像システム及びデバイス製造方法 |