JPH0281630U - - Google Patents
Info
- Publication number
- JPH0281630U JPH0281630U JP16049188U JP16049188U JPH0281630U JP H0281630 U JPH0281630 U JP H0281630U JP 16049188 U JP16049188 U JP 16049188U JP 16049188 U JP16049188 U JP 16049188U JP H0281630 U JPH0281630 U JP H0281630U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- pressure
- liquid
- suction valve
- discharged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16049188U JPH059074Y2 (ro) | 1988-12-09 | 1988-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16049188U JPH059074Y2 (ro) | 1988-12-09 | 1988-12-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0281630U true JPH0281630U (ro) | 1990-06-25 |
| JPH059074Y2 JPH059074Y2 (ro) | 1993-03-05 |
Family
ID=31442600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16049188U Expired - Lifetime JPH059074Y2 (ro) | 1988-12-09 | 1988-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059074Y2 (ro) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11333359A (ja) * | 1998-05-27 | 1999-12-07 | Tokyo Electron Ltd | 塗布膜形成方法 |
| JP2004138178A (ja) * | 2002-10-18 | 2004-05-13 | Ckd Corp | 流体供給制御装置 |
-
1988
- 1988-12-09 JP JP16049188U patent/JPH059074Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11333359A (ja) * | 1998-05-27 | 1999-12-07 | Tokyo Electron Ltd | 塗布膜形成方法 |
| JP2004138178A (ja) * | 2002-10-18 | 2004-05-13 | Ckd Corp | 流体供給制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH059074Y2 (ro) | 1993-03-05 |
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