JPH0281407U - - Google Patents
Info
- Publication number
- JPH0281407U JPH0281407U JP16102988U JP16102988U JPH0281407U JP H0281407 U JPH0281407 U JP H0281407U JP 16102988 U JP16102988 U JP 16102988U JP 16102988 U JP16102988 U JP 16102988U JP H0281407 U JPH0281407 U JP H0281407U
- Authority
- JP
- Japan
- Prior art keywords
- sided
- mirror
- angled
- shaped surface
- mirrors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Elements Other Than Lenses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988161029U JPH067290Y2 (ja) | 1988-12-12 | 1988-12-12 | レーザ干渉計用反射鏡 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988161029U JPH067290Y2 (ja) | 1988-12-12 | 1988-12-12 | レーザ干渉計用反射鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0281407U true JPH0281407U (un) | 1990-06-22 |
JPH067290Y2 JPH067290Y2 (ja) | 1994-02-23 |
Family
ID=31443617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988161029U Expired - Lifetime JPH067290Y2 (ja) | 1988-12-12 | 1988-12-12 | レーザ干渉計用反射鏡 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH067290Y2 (un) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009041921A (ja) * | 2007-08-06 | 2009-02-26 | Mitsutoyo Corp | 微細形状測定装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5411888U (un) * | 1977-06-27 | 1979-01-25 | ||
JPS63241306A (ja) * | 1986-11-05 | 1988-10-06 | Fuji Electric Co Ltd | 干渉計 |
-
1988
- 1988-12-12 JP JP1988161029U patent/JPH067290Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5411888U (un) * | 1977-06-27 | 1979-01-25 | ||
JPS63241306A (ja) * | 1986-11-05 | 1988-10-06 | Fuji Electric Co Ltd | 干渉計 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009041921A (ja) * | 2007-08-06 | 2009-02-26 | Mitsutoyo Corp | 微細形状測定装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH067290Y2 (ja) | 1994-02-23 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |