JPH0281041U - - Google Patents
Info
- Publication number
- JPH0281041U JPH0281041U JP16161488U JP16161488U JPH0281041U JP H0281041 U JPH0281041 U JP H0281041U JP 16161488 U JP16161488 U JP 16161488U JP 16161488 U JP16161488 U JP 16161488U JP H0281041 U JPH0281041 U JP H0281041U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction
- suction nozzle
- back surface
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16161488U JPH0281041U (ko) | 1988-12-12 | 1988-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16161488U JPH0281041U (ko) | 1988-12-12 | 1988-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0281041U true JPH0281041U (ko) | 1990-06-22 |
Family
ID=31444712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16161488U Pending JPH0281041U (ko) | 1988-12-12 | 1988-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0281041U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017062490A (ja) * | 2011-12-29 | 2017-03-30 | 株式会社ニコン | 露光装置及び露光方法、並びにデバイス製造方法 |
-
1988
- 1988-12-12 JP JP16161488U patent/JPH0281041U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017062490A (ja) * | 2011-12-29 | 2017-03-30 | 株式会社ニコン | 露光装置及び露光方法、並びにデバイス製造方法 |