JPH0281035U - - Google Patents

Info

Publication number

JPH0281035U

JPH0281035U JP16002988U JP16002988U JPH0281035U JP H0281035 U JPH0281035 U JP H0281035U JP 16002988 U JP16002988 U JP 16002988U JP 16002988 U JP16002988 U JP 16002988U JP H0281035 U JPH0281035 U JP H0281035U

Authority

JP

Japan

Prior art keywords

furnace

portion located

semiconductor manufacturing

furnace tube

quartz

Prior art date

1988-12-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 5
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
• 239000004065 semiconductor Substances 0.000 claims description 4
• 238000004519 manufacturing process Methods 0.000 claims description 3
• 238000002791 soaking Methods 0.000 claims description 3
• 238000010438 heat treatment Methods 0.000 claims 2
• 239000000758 substrate Substances 0.000 claims 1

Cited By (1)