JPH0281034U - - Google Patents
Info
- Publication number
- JPH0281034U JPH0281034U JP16146488U JP16146488U JPH0281034U JP H0281034 U JPH0281034 U JP H0281034U JP 16146488 U JP16146488 U JP 16146488U JP 16146488 U JP16146488 U JP 16146488U JP H0281034 U JPH0281034 U JP H0281034U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- shaft
- plate
- spacers
- penetrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16146488U JPH0281034U (show.php) | 1988-12-12 | 1988-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16146488U JPH0281034U (show.php) | 1988-12-12 | 1988-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0281034U true JPH0281034U (show.php) | 1990-06-22 |
Family
ID=31444424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16146488U Pending JPH0281034U (show.php) | 1988-12-12 | 1988-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0281034U (show.php) |
-
1988
- 1988-12-12 JP JP16146488U patent/JPH0281034U/ja active Pending