JPH0281034U - - Google Patents

Info

Publication number
JPH0281034U
JPH0281034U JP16146488U JP16146488U JPH0281034U JP H0281034 U JPH0281034 U JP H0281034U JP 16146488 U JP16146488 U JP 16146488U JP 16146488 U JP16146488 U JP 16146488U JP H0281034 U JPH0281034 U JP H0281034U
Authority
JP
Japan
Prior art keywords
plasma
shaft
plate
spacers
penetrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16146488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16146488U priority Critical patent/JPH0281034U/ja
Publication of JPH0281034U publication Critical patent/JPH0281034U/ja
Pending legal-status Critical Current

Links

JP16146488U 1988-12-12 1988-12-12 Pending JPH0281034U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16146488U JPH0281034U (enrdf_load_stackoverflow) 1988-12-12 1988-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16146488U JPH0281034U (enrdf_load_stackoverflow) 1988-12-12 1988-12-12

Publications (1)

Publication Number Publication Date
JPH0281034U true JPH0281034U (enrdf_load_stackoverflow) 1990-06-22

Family

ID=31444424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16146488U Pending JPH0281034U (enrdf_load_stackoverflow) 1988-12-12 1988-12-12

Country Status (1)

Country Link
JP (1) JPH0281034U (enrdf_load_stackoverflow)

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