JPH0280375A - Sintering jig for ceramic base plate - Google Patents

Abstract

PURPOSE:To make the contractility of each part uniform without the deformation of ceramic green sheet by disposing alumina plane plates with a specified distance between each other on the alumina balls disposed on the bottom surface of an alumina outer frame. CONSTITUTION:The alumina plane plates 3 are disposed with a specified distance between each other on the alumina balls 2 disposed on the bottom surface of the alumina outer frame 1. The ceramic green sheet 4 passed through the burned-out process is set on the alumina plane plates 3 to be sintered. When the green sheet 4 is contracted during sintering, the alumina plane plate 3 are moved to the direction of the center of the green sheet 4 and the alumina balls 2 are rotated to prevent the contractility of the green sheet 4 from being locally uneven by the contact friction.

Description

[Detailed Description of the Invention] [Summary] Regarding the improvement of the firing jig used in the firing process of ceramic green sheets, it is simple and easy to procure, the ceramic green sheets are not deformed during the firing process, and are green. The purpose of the present invention is to provide a firing jig for ceramic substrates that can uniformize the shrinkage rate of each part of the sheet. It is configured to include alumina balls arranged on the bottom surface of an outer frame and an alumina flat plate arranged at a constant interval above the alumina balls.

[Industrial application field]

The present invention relates to a method for manufacturing a ceramic substrate, and particularly to an improvement in a firing jig used in a process of firing ceramic green sheets.

In order to improve the processing power of large computers, the number of logic elements such as LSIs is increasing, and this increased L
It has become necessary to increase the wiring density of printed wiring boards used for mounting SI, and ceramic substrates have come to be used as printed wiring boards.

The ceramic green sheet, which is the raw material for the ceramic substrate, shrinks by about 17% during the firing process, so a ceramic green sheet with a diameter of 300 Longjiku before firing becomes a ceramic substrate with a diameter of 250 Dragonkaku.

Because the friction coefficient of the contact area between the firing jig used in this firing process and the ceramic green sheet is uneven, the shrinkage rate of each part of the ceramic green sheet may not be uniform, and considering the variation in finished dimensions, It becomes impossible to increase the pattern density.

Under the above circumstances, there is a need for a firing jig for ceramic substrates that can make the shrinkage rate of each part of the ceramic green sheet uniform during the firing process.

[Conventional technology]

Figures 3 to 4 about conventional firing jigs for ceramic substrates
This will be explained using figures.

The conventional firing jig for ceramic substrates is an alumina-made firing jig with a thickness of 5 mm called "Se-tsuta-11" as shown in Fig. 3 fa), and the ceramic green sheet 4 to be fired has a dimension of 30 mm. In the case of m, the size is 320 dragon horns.

Raw materials such as alumina are formed into ceramic green sheets 4 using a ceramic green sheet forming device, and organic vehicles contained in the raw materials of the ceramic green sheets 4 are decomposed in a burnout process using a ceramic green sheet firing device.

It is vaporized and then fired using this ceramic substrate firing jig to form a sintered body as shown in FIG.

In addition to the above example, there is an example in which a ceramic ball 12 is interposed between the green sheet 4 and the surface of a ceramic substrate firing jig called a center 11 having a shape as shown in FIG. In this case, the green sheet 4 softens during the firing process, causing the green sheet 4 to dent, and the ceramic balls 12 to enter into the dent, causing the ceramic ball 12 to no longer rotate, resulting in a shape in which the ceramic ball 12 is inserted into the fired green sheet 4. However, there are still cases of wavering.

be.

[Problem to be solved by the invention]

In the conventional firing jig for ceramic substrates described above, a burned-out green sheet with a flat shape is mounted on the surface of a firing jig for ceramic substrates with a similar shape and fired. The problem is that the contact between the ceramic substrate and the firing jig for ceramic substrates becomes uneven, and the shrinkage rate due to firing becomes uneven depending on the part, making it impossible to increase the density of the pattern considering the variation in finished dimensions. Also, when alumina balls are interposed between the green sheet and the firing jig, there is a problem that the ceramic substrate may be deformed and waved.

The present invention is a ceramic substrate for ceramic substrates that can be easily and easily procured in view of the above circumstances, that prevents the ceramic green sheet from deforming during the firing process, and that allows the shrinkage rate of each part of the green sheet to be uniform. [Means for Solving the Problems] The firing jig for ceramic substrates of the present invention is a firing jig used for firing ceramic green sheets, and includes an alumina outer frame. The device is configured to include alumina balls disposed on the bottom surface of the alumina outer frame, and an alumina flat plate disposed at a constant interval above the alumina balls.

[Effect]

That is, in the present invention, alumina balls are arranged on the bottom surface of an alumina outer frame, alumina flat plates are arranged on the alumina balls at regular intervals, and a green sheet that has undergone a burnout process is placed on top of the alumina balls. Since the green sheet shrinks during firing, the alumina ball rotates as the alumina flat plate moves toward the center of the green sheet, so the contraction rate of the green sheet decreases due to contact friction. It is possible to prevent unevenness depending on the part.

〔Example〕

An embodiment of the present invention in which the ceramic green sheet has a fin angle of 300 will be described below with reference to FIGS. 1 and 2.

In this example, the length of one side of the ceramic green sheet 4 before firing is 300 mm, and the shrinkage rate during firing is 17 mm.
%, the dimensions of the ceramic substrate 5 after firing are: If five alumina flat plates 3 with -side Awm are used in each direction, then at least three alumina balls 2 are required under the three alumina flat plates. Therefore, if the diameter of the alumina ball 2 is d fin, and the interval between the alumina flat plates 3 before firing is S, then (49
,8m x 5) + (S w x 4) 2300m
Therefore, S≧12.75**.

Based on the above conditions, in Figure 1 showing the state before firing,
Directly on the bottom of the alumina outer frame 1 with an inner diameter of 3401 m.

Tightly tighten alumina ball 2 with a diameter of 16■■, and place 5 on top of it.
25 alumina flat plates 3 having an angle of 0 are arranged at intervals of 131 m.

The ceramic green sheet 4 that has undergone the burnout process is mounted on the alumina flat plate 3 of the ceramic substrate firing jig arranged in this manner, and fired.

As the firing process progresses, the ceramic green sheet 4 contracts toward the center, so in response to this contraction, the alumina flat plate 3 gradually moves toward the center due to the rotation of the alumina ball 2, and finally the ceramic green sheet 4 When it shrinks by about 17%, as shown in FIG. 2, the interval between the alumina flat plates 3 becomes almost 0, the firing process is completed, and the production of the ceramic substrate 5 is completed.

〔Effect of the invention〕

As is clear from the above description, according to the present invention, by firing a green sheet using a firing jig for ceramic substrates having an extremely simple configuration, the green sheet is not deformed and the green sheet is partially shrunk. It is possible to provide a firing jig for ceramic substrates which has the advantage of being able to prevent non-uniformity of the ratio.

In the figure, l is aluminum 2 is aluminum 3 is aluminum 4 is cerami 5 is cerami shows.

outer frame, Nabooru, Na flat plate, ivy green sheet, Tsuku board,

[Brief explanation of the drawing]

Fig. 1 is a diagram showing the state before firing of an embodiment according to the present invention, Fig. 2 is a diagram showing the state after firing of an embodiment according to the present invention, and Fig. 3 is a diagram showing a conventional firing jig for ceramic substrates. FIG. 4 is a diagram showing the firing state using another conventional ceramic substrate firing jig. ial Plan view bl A side sectional view Diagram showing the state before firing of an embodiment according to the present invention ar Plan view■) Side sectional view

Claims (1)

[Claims] A firing jig used for firing a ceramic green sheet, comprising: an alumina outer frame (1); alumina balls (2) disposed on the bottom of the alumina outer frame (1); A firing jig for a ceramic substrate, comprising: an alumina flat plate (3) arranged on the alumina ball (2) at a constant interval.