JPH0280245U - - Google Patents
Info
- Publication number
- JPH0280245U JPH0280245U JP16056788U JP16056788U JPH0280245U JP H0280245 U JPH0280245 U JP H0280245U JP 16056788 U JP16056788 U JP 16056788U JP 16056788 U JP16056788 U JP 16056788U JP H0280245 U JPH0280245 U JP H0280245U
- Authority
- JP
- Japan
- Prior art keywords
- pulley
- slide
- idler pulley
- screw groove
- idler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Landscapes
- Transmission Devices (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988160567U JPH0452514Y2 (nl) | 1988-12-09 | 1988-12-09 | |
| US07/431,171 US5022619A (en) | 1988-12-09 | 1989-10-26 | Positioning device of table for semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988160567U JPH0452514Y2 (nl) | 1988-12-09 | 1988-12-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0280245U true JPH0280245U (nl) | 1990-06-20 |
| JPH0452514Y2 JPH0452514Y2 (nl) | 1992-12-10 |
Family
ID=31442743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988160567U Expired JPH0452514Y2 (nl) | 1988-12-09 | 1988-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452514Y2 (nl) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6347947U (nl) * | 1986-09-17 | 1988-03-31 |
-
1988
- 1988-12-09 JP JP1988160567U patent/JPH0452514Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6347947U (nl) * | 1986-09-17 | 1988-03-31 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0452514Y2 (nl) | 1992-12-10 |