JPH0280245U - - Google Patents

Info

Publication number
JPH0280245U
JPH0280245U JP16056788U JP16056788U JPH0280245U JP H0280245 U JPH0280245 U JP H0280245U JP 16056788 U JP16056788 U JP 16056788U JP 16056788 U JP16056788 U JP 16056788U JP H0280245 U JPH0280245 U JP H0280245U
Authority
JP
Japan
Prior art keywords
pulley
slide
idler pulley
screw groove
idler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16056788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452514Y2 (h
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988160567U priority Critical patent/JPH0452514Y2/ja
Priority to US07/431,171 priority patent/US5022619A/en
Publication of JPH0280245U publication Critical patent/JPH0280245U/ja
Application granted granted Critical
Publication of JPH0452514Y2 publication Critical patent/JPH0452514Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)
JP1988160567U 1988-12-09 1988-12-09 Expired JPH0452514Y2 (h)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1988160567U JPH0452514Y2 (h) 1988-12-09 1988-12-09
US07/431,171 US5022619A (en) 1988-12-09 1989-10-26 Positioning device of table for semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988160567U JPH0452514Y2 (h) 1988-12-09 1988-12-09

Publications (2)

Publication Number Publication Date
JPH0280245U true JPH0280245U (h) 1990-06-20
JPH0452514Y2 JPH0452514Y2 (h) 1992-12-10

Family

ID=31442743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988160567U Expired JPH0452514Y2 (h) 1988-12-09 1988-12-09

Country Status (1)

Country Link
JP (1) JPH0452514Y2 (h)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347947U (h) * 1986-09-17 1988-03-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347947U (h) * 1986-09-17 1988-03-31

Also Published As

Publication number Publication date
JPH0452514Y2 (h) 1992-12-10

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