JPH0279802A - Optical fiber having microlens and its production - Google Patents
Optical fiber having microlens and its productionInfo
- Publication number
- JPH0279802A JPH0279802A JP63231473A JP23147388A JPH0279802A JP H0279802 A JPH0279802 A JP H0279802A JP 63231473 A JP63231473 A JP 63231473A JP 23147388 A JP23147388 A JP 23147388A JP H0279802 A JPH0279802 A JP H0279802A
- Authority
- JP
- Japan
- Prior art keywords
- microlens
- optical fiber
- outer side
- inclination
- side face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000005530 etching Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 8
- 230000008878 coupling Effects 0.000 abstract description 11
- 238000010168 coupling process Methods 0.000 abstract description 11
- 238000005859 coupling reaction Methods 0.000 abstract description 11
- 230000007423 decrease Effects 0.000 abstract description 4
- 239000000835 fiber Substances 0.000 abstract description 3
- 230000003247 decreasing effect Effects 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 description 11
- 238000005253 cladding Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 4
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 3
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- YNTQKXBRXYIAHM-UHFFFAOYSA-N azanium;butanoate Chemical compound [NH4+].CCCC([O-])=O YNTQKXBRXYIAHM-UHFFFAOYSA-N 0.000 description 2
- 239000008213 purified water Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 102220043690 rs1049562 Human genes 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、光素子と組合させるための微小レンズを有
する光ファイバとその製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical fiber having a microlens for combination with an optical element and a method for manufacturing the same.
(従来の技術〕
光素子と光ファイバの結合において、光ファイバ端に微
小レンズを形成する方法は、簡単な構成で比較的高い結
合効率を得られるという特長を有する。これらは第5図
(a)〜(e)に示すように、微小レンズ1の形状によ
り半球形状(Electr−onics Letter
s、Vol、18.No、2.pp71) 、台形形状
。(Prior Art) When coupling an optical element to an optical fiber, the method of forming a microlens at the end of the optical fiber has the advantage of obtaining relatively high coupling efficiency with a simple configuration. ) to (e), the shape of the microlens 1 creates a hemispherical shape (Electr-onics Letter
s, Vol, 18. No, 2. pp71), trapezoidal shape.
円錐形状(APPLIED 0PTICS、Vol、2
1.No、19.pp3470−3474) とに分け
られる。なお、2はクラッド、3はコアである。Conical shape (APPLIED 0PTICS, Vol, 2
1. No, 19. pp3470-3474). Note that 2 is a cladding and 3 is a core.
しかしながら、第5図(a)、(b)のような半球形状
や台形形状のレンズでは、レンズの先端が光素子の開口
面に対し平行となるため、この部分での反射光が光素子
に戻り、例えば発光素子との結合の場合では、光出力の
変動やスペクトルの変化、信号対雑音比の劣化等、発光
素子の動作が不安定になるという問題が発生していた。However, in the case of hemispherical or trapezoidal lenses as shown in Figures 5(a) and (b), the tip of the lens is parallel to the aperture surface of the optical element, so the reflected light from this part does not reach the optical element. For example, in the case of coupling with a light-emitting element, problems such as fluctuations in optical output, changes in spectrum, and deterioration of signal-to-noise ratio have occurred, resulting in unstable operation of the light-emitting element.
一方、第5図(C)のような先端を尖らした円錐形状に
すれば、反射光は発光素子に戻らずこの問題は解消され
るが、結合効率や軸ずれ許容fit(結合効率が1dB
低下する光軸のずれ量で定義される)が低下するという
欠点があった。この問題は単一モード光ファイバと半導
体レーザとの結合において特に顕著である。On the other hand, if the tip is shaped like a cone with a sharp point as shown in Fig. 5(C), the reflected light will not return to the light emitting element and this problem will be solved.
This has the disadvantage that the amount of deviation of the optical axis (defined by the amount of optical axis deviation that decreases) decreases. This problem is particularly noticeable in coupling single mode optical fibers to semiconductor lasers.
この発明は、上記の問題点を解決するためになされたも
ので、結合効率をあまり低下させずに反射光の戻りを少
なくした微小レンズを有する光ファイバとその製造方法
を提供することを目的とする。The present invention was made in order to solve the above-mentioned problems, and an object of the present invention is to provide an optical fiber having a microlens that reduces the return of reflected light without significantly reducing the coupling efficiency, and a method for manufacturing the same. do.
(課題を解決するための手段)
この発明にかかる微小レンズを有する光ファイバは、微
小レンズを多段の円錐形に形成し各段の外側面の傾斜角
度をレンズの高さに応じて段階的に変えたものである。(Means for Solving the Problems) An optical fiber having a microlens according to the present invention has the microlens formed in a multi-stage conical shape, and the inclination angle of the outer surface of each stage is adjusted in stages according to the height of the lens. It has been changed.
また、この発明にかかる光ファイバの製造方法は、光フ
ァイバをエツチングレートが異なる複数のエツチング液
に所要時間ずつ浸すことにより、傾斜角度が段階的に変
わった多段の円錐形の微小レンズを形成させるようにし
たものである。Further, in the method for manufacturing an optical fiber according to the present invention, a multi-stage conical microlens with a stepwise change in inclination angle is formed by immersing an optical fiber in a plurality of etching solutions having different etching rates for a required period of time. This is how it was done.
(作用)
この発明の光ファイバによれば、結合効率や軸ずれ許容
量を損なうことなくファイバ先端での反射を低減できる
。この結果、発光素子への戻り光が減り、発光素子の安
定な動作に寄与する。(Function) According to the optical fiber of the present invention, reflection at the fiber tip can be reduced without impairing coupling efficiency or axis misalignment tolerance. As a result, the amount of light returning to the light emitting element is reduced, contributing to stable operation of the light emitting element.
また、この製造方法によれば、エツチングレートの異な
るエツチング液を用いるので、外側面の傾斜角度が段階
的に変わった多段の円錐形の微小レンズが製造できる。Furthermore, according to this manufacturing method, since etching liquids having different etching rates are used, it is possible to manufacture multi-stage conical microlenses in which the inclination angle of the outer surface changes stepwise.
第1図はこの発明の一実施例を示す正面図である。この
図で、10は微小レンズで、この実施例では3段の円錐
形にしである。すなわち、1番上の外側面11は傾斜角
度θ8、次の外側面12は同じくθ2.1番下の外側面
13は同じくθ3にとっである。そして、θ1〈θ2く
θ3の関係になるように構成されている。2.3は第5
図と同じくクラッドとコアである。FIG. 1 is a front view showing an embodiment of the present invention. In this figure, numeral 10 is a microlens, which in this embodiment has a three-stage conical shape. That is, the top outer surface 11 has an inclination angle of θ8, the next outer surface 12 has an inclination angle of θ2, and the bottom outer surface 13 has an inclination angle of θ3. The structure is such that the relationship θ1<θ2×θ3 holds. 2.3 is the fifth
As shown in the figure, it has a cladding and a core.
このように構成すると、第5図(a)、(b)に示した
ものと異なり反射光がレーザ側に戻らなくなる。しかも
、第5図(C)の場合のように結合効率が極端に低下す
ることがなくなる。With this configuration, unlike those shown in FIGS. 5(a) and 5(b), the reflected light does not return to the laser side. Moreover, the coupling efficiency does not decrease drastically as in the case of FIG. 5(C).
次に、この発明の光ファイバの製造方法について説明す
る。ふフ化アンモニウムNH4Fとぶつ酸(HF)の混
合液に光ファイバを浸した場合、クラッド2とコア3の
エツチング速度が違う原理をこの発明では応用する。こ
の方法において、エツチング形状の最初は台形であり、
一定時間がたつと円錐形になる。この時の傾斜角度はぶ
つ化アンモニウムNH4Fとぶつ酸(HF)の容量比で
決まる。第3図はぶつ化アンモニウム(40%)とぶつ
酸(50%)の混合比に対するレンズの傾斜角度の変化
の一例を示したものである。この図から分るように、任
意の傾斜角度を持つ台形レンズまたは円錐レンズを形成
できる。しかしながら、ぶつ化アンモニウムの容量比が
3以下の溶液は不安定なので精製水を加える。Next, a method for manufacturing an optical fiber according to the present invention will be explained. This invention applies the principle that when an optical fiber is immersed in a mixed solution of ammonium fluoride NH4F and butic acid (HF), the cladding 2 and the core 3 have different etching rates. In this method, the etching shape is initially trapezoidal;
After a certain amount of time, it becomes a cone shape. The angle of inclination at this time is determined by the capacity ratio of ammonium butyrate NH4F and butyric acid (HF). FIG. 3 shows an example of the change in the angle of inclination of the lens with respect to the mixing ratio of ammonium butyrate (40%) and butyric acid (50%). As can be seen from this figure, a trapezoidal or conical lens can be formed with any angle of inclination. However, since solutions with a volume ratio of ammonium fluoride of 3 or less are unstable, purified water is added.
第4図は精製水を加えたときの傾斜角度θの変化である
。この図に示すように、広い範囲にわたって安定した製
造方法が得られる。FIG. 4 shows the change in the inclination angle θ when purified water is added. As shown in this figure, a stable manufacturing method can be obtained over a wide range.
これを応用して、この発明のような段階的に角度の変化
するレンズを作る方法について第2図(a)、(b)を
参照して説明する。なお、第2図の実施例は簡単にする
ため、2段の円錐形の場合を示す。A method of applying this to create a lens whose angle changes stepwise as in the present invention will be described with reference to FIGS. 2(a) and 2(b). Note that, for the sake of simplicity, the embodiment shown in FIG. 2 shows a case of a two-stage conical shape.
まず、NH4F:HF:H20=3:1:3の液に3時
間つけておき、第2図(a)に示す上方の外側面11が
形成される。このエツチング時間はクラッド2のエツチ
ング速度と目的とする傾斜角度θ鳳により幾何学的に求
めることができる。First, it is soaked in a solution of NH4F:HF:H20=3:1:3 for 3 hours to form the upper outer surface 11 shown in FIG. 2(a). This etching time can be determined geometrically based on the etching rate of the cladding 2 and the intended inclination angle θ.
さらに、傾斜角度の大きいθ2の外側面12を作るため
、前記とエツチングレートの異なるN H4F:HF=
8:1の液に30分つけると下の段の外側面12が形成
され、これにより第2図(b)に示す2段の円錐形レン
ズができる。3段以上の多段の微小レンズも同様の手段
で形成することができる。Furthermore, in order to create the outer surface 12 with a large inclination angle θ2, N H4F:HF=
After soaking in the 8:1 solution for 30 minutes, the outer surface 12 of the lower stage is formed, resulting in the two-stage conical lens shown in FIG. 2(b). Multi-stage microlenses of three or more stages can also be formed by similar means.
なお、この発明において光ファイバは単一モード型だけ
でなく、マルチモード型にも適用可能であり、また、光
素子は発光素子のみならず他の光素子にも適用可能であ
る。In this invention, the optical fiber can be applied not only to a single mode type but also to a multimode type, and the optical element can be applied not only to a light emitting element but also to other optical elements.
(発明の効果〕
この発明の微小レンズを有する光ファイバは、微小レン
ズを多段の円錐形に形成し、各段の外側面の傾斜角度を
レンズの高さに応じて段階的に変えたので、結合効率や
軸ずれ許容量を損なうことなくファイバ先端での反射を
低減できる。この結果、例えば発光素子との結合では発
光素子への戻り光が減り、光出力の安定、信号対雑音比
の向上などの特性の改善がはかれる。また、他の光素子
との結合においても同様の理由により特性改善が期待で
きる。(Effects of the Invention) In the optical fiber having a microlens of the present invention, the microlens is formed into a multi-stage conical shape, and the inclination angle of the outer surface of each stage is changed in stages according to the height of the lens. Reflection at the fiber tip can be reduced without compromising coupling efficiency or misalignment tolerance.As a result, for example, when coupled with a light emitting device, the amount of light returned to the light emitting device is reduced, stabilizing the optical output and improving the signal-to-noise ratio. Further, improvements in characteristics can be expected when coupling with other optical elements for the same reason.
また、この発明の微小レンズを有する光ファイバの製造
方法によれば、光ファイバをエツチングレートが異なる
複数のエツチング液に所要時間ずつ浸すことにより外側
面の傾斜角度が段階的に変わった多段の円錐形の微小レ
ンズを形成させるので、きわめて簡単に目的とする微小
レンズを有する光ファイバを得ることができ、しかも微
小レンズの設計自由度も改善できる。Further, according to the method of manufacturing an optical fiber having a microlens of the present invention, the optical fiber is immersed in a plurality of etching solutions having different etching rates for a required period of time to form a multi-stage cone whose outer surface has a stepwise change in inclination angle. Since shaped microlenses are formed, an optical fiber having a desired microlens can be obtained very easily, and the degree of freedom in designing the microlens can also be improved.
第1図はこの発明の一実施例を示す正面図、第2図(a
)、(b)はこの発明の製造方法の工程を示す図、第3
図はぶつ化アンモニウムとふフ酸の容量比に対するレン
ズの傾斜角度の変化、第4図は水を加えたときの傾斜角
度の変化を示す図、第5図は従来の微小レンズの例で、
第5図(a)。
は半球形、第5図(b)は台形、第5図(C)は円錐形
を示す図である。
図中、2はクラッド、3はコア、10は微小レンズであ
る。
第1図
第2図
第5図
石
一−1革05
一1ll $[@G)屈゛FIG. 1 is a front view showing an embodiment of the present invention, and FIG.
), (b) are diagrams showing the steps of the manufacturing method of the present invention, and the third
The figure shows the change in the tilt angle of the lens with respect to the capacity ratio of ammonium fluoride and hydrofluoric acid, Figure 4 shows the change in the tilt angle when water is added, and Figure 5 shows an example of a conventional microlens.
Figure 5(a). is a hemispherical shape, FIG. 5(b) is a trapezoidal shape, and FIG. 5(C) is a conical shape. In the figure, 2 is a cladding, 3 is a core, and 10 is a microlens. Figure 1 Figure 2 Figure 5 Stone 1-1 Leather 05-1ll $[@G)
Claims (2)
前記微小レンズを多段の円錐形に形成し、前記各段の外
側面の傾斜角度をレンズの高さに応じて段階的に変えた
ことを特徴とする微小レンズを有する光ファイバ。(1) In an optical fiber having a microlens at the end,
An optical fiber having a microlens, characterized in that the microlens is formed into a multi-stage conical shape, and the inclination angle of the outer surface of each stage is changed stepwise according to the height of the lens.
ッチング液に所要時間ずつ浸すことにより、外側面の傾
斜角度が段階的に変わった多段の円錐形の微小レンズを
形成させることを特徴とする微小レンズを有する光ファ
イバの製造方法。(2) A microlens characterized by forming a multi-stage conical microlens with a stepwise change in the angle of inclination of the outer surface by immersing an optical fiber in a plurality of etching solutions with different etching rates for a required period of time. A method for manufacturing an optical fiber having the following.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63231473A JPH0279802A (en) | 1988-09-17 | 1988-09-17 | Optical fiber having microlens and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63231473A JPH0279802A (en) | 1988-09-17 | 1988-09-17 | Optical fiber having microlens and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0279802A true JPH0279802A (en) | 1990-03-20 |
Family
ID=16924046
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63231473A Pending JPH0279802A (en) | 1988-09-17 | 1988-09-17 | Optical fiber having microlens and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0279802A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2841657A1 (en) * | 2002-06-27 | 2004-01-02 | Commissariat Energie Atomique | DEVICE FOR AUTOMATICALLY CENTERING A LASER BEAM AND METHOD FOR MANUFACTURING THE SAME |
US7111992B2 (en) | 2003-02-10 | 2006-09-26 | Seiko Epson Corporation | Connection structure between optical element and optical fiber, connection method thereof, and optical module |
WO2008114869A1 (en) * | 2007-03-22 | 2008-09-25 | Fujikura Ltd. | Optical fiber bundle and light irradiating device |
-
1988
- 1988-09-17 JP JP63231473A patent/JPH0279802A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2841657A1 (en) * | 2002-06-27 | 2004-01-02 | Commissariat Energie Atomique | DEVICE FOR AUTOMATICALLY CENTERING A LASER BEAM AND METHOD FOR MANUFACTURING THE SAME |
US7111992B2 (en) | 2003-02-10 | 2006-09-26 | Seiko Epson Corporation | Connection structure between optical element and optical fiber, connection method thereof, and optical module |
WO2008114869A1 (en) * | 2007-03-22 | 2008-09-25 | Fujikura Ltd. | Optical fiber bundle and light irradiating device |
JP5077590B2 (en) * | 2007-03-22 | 2012-11-21 | 株式会社フジクラ | Optical fiber bundle and light irradiation device |
US8655128B2 (en) | 2007-03-22 | 2014-02-18 | Fujikura Ltd. | Optical fiber bundle and optical irradiator |
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