JPH0279354A - Microwave excitation type electrodeless luminous tube and manufacture thereof - Google Patents

Microwave excitation type electrodeless luminous tube and manufacture thereof

Info

Publication number
JPH0279354A
JPH0279354A JP22883488A JP22883488A JPH0279354A JP H0279354 A JPH0279354 A JP H0279354A JP 22883488 A JP22883488 A JP 22883488A JP 22883488 A JP22883488 A JP 22883488A JP H0279354 A JPH0279354 A JP H0279354A
Authority
JP
Japan
Prior art keywords
tube
glass tube
straight
arc tube
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22883488A
Other languages
Japanese (ja)
Other versions
JP2561902B2 (en
Inventor
Masami Togasaki
戸賀崎 正美
Shigeru Saito
滋 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP63228834A priority Critical patent/JP2561902B2/en
Publication of JPH0279354A publication Critical patent/JPH0279354A/en
Application granted granted Critical
Publication of JP2561902B2 publication Critical patent/JP2561902B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To simplify the manufacture and improve the quality by firmly attaching the second glass tube having an outside diameter suitable for an inside diameter of a straight-tube-like glass tube to the central part of the inside of the first straight-tube-like glass tube. CONSTITUTION:A microwave excitation type electrodeless luminous tube 10 is a luminous tube which radiate ultraviolet rays and visible light as spectral components, and the tube wall forming this luminous tube 10 of the first straight-tube like glass tube 11 is formed of quartz, and has a uniform inside diameter. And the second glass tube 12 with an outside diameter suitable for an inside diameter of the first straight-tube like glass tube 11 is firmly attached to the central part of the inside of the glass tube 11. Thereby, the luminous tube 10 free from recondensation of luminous materials can be easily manufactured and a product without dispersion, can be obtained.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は紫外線照射により処理される工程、例えば紫
外線硬化型樹脂を硬化させるプロセス等に使用される紫
外線発光装置に用いられるマイクロ波励起型無電極発光
管及びその製造方法に関するものである。
Detailed Description of the Invention [Industrial Application Field] The present invention relates to a microwave-excited light emitting device used in an ultraviolet light emitting device used in a process involving ultraviolet irradiation, such as a process for curing an ultraviolet curable resin. The present invention relates to an electrode arc tube and a method for manufacturing the same.

[従来の技術] 従来より主に50On+++以下の発光波長の紫外線及
び可視光からなる光源によって、ペンキ、インク、樹脂
、塗料等が塗布された面の表面硬化処理や、光化学反応
による化学物質の合成及び処理等の工程が行われている
。そして、これら工程に用いられる光源は高効率のもの
、及び適切な出力エネルギーレベルのものが要求され、
例えばマイクロ波によって励起される無電極発光装置が
用いられている(例えば、特公昭57−44228号公
報等参照)。
[Prior art] Conventionally, light sources mainly consisting of ultraviolet and visible light with emission wavelengths of 50 On+++ or less have been used to perform surface hardening treatments on surfaces coated with paint, ink, resin, coatings, etc., and to synthesize chemical substances through photochemical reactions. Processes such as processing and processing are being carried out. The light sources used in these processes are required to have high efficiency and an appropriate output energy level.
For example, an electrodeless light emitting device excited by microwaves is used (see, for example, Japanese Patent Publication No. 57-44228).

第2図は従来のマイクロ波励起型無電極発光装置の主要
部の概略を示す断面図で、lは水銀とアルゴンの混合ガ
スが充填されたマイクロ波励起型無電極発光管(以下発
光管という)、2a、2bはこの発光管1を支持する支
持柱、3は楕円鏡(ミラー)、4は非共振のマイクロ波
空洞を形成するマイクロ波空洞壁、5a、5bはマイク
ロ波を誘導する導波管て、側部には電磁波は通さないか
冷却用の風は通す孔を有している。また、4a、4bは
この導波管5a、5bとマイクロ波空洞壁4を結合する
カップリンクスロット、6a、6bはマイクロ波を発振
するマグネトロン、7a、7bは冷却風を通す通風筒、
8はこの発光装置を覆う外箱である。
Figure 2 is a cross-sectional view schematically showing the main parts of a conventional microwave-excited electrodeless light-emitting device. ), 2a and 2b are support columns that support the arc tube 1, 3 is an elliptical mirror, 4 is a microwave cavity wall forming a non-resonant microwave cavity, and 5a and 5b are guides for guiding microwaves. The wave tube has holes on the sides that do not allow electromagnetic waves to pass through, but allow cooling air to pass through. Further, 4a and 4b are cup link slots that connect the waveguides 5a and 5b to the microwave cavity wall 4, 6a and 6b are magnetrons that oscillate microwaves, and 7a and 7b are ventilation tubes that pass cooling air.
8 is an outer box that covers this light emitting device.

第2図の発光装置において、マクネトロン6a、6bか
ら発生した高密度のマイクロ波エネルギーはそれぞれ導
波管5a、5bを伝播し、カップリングスロット4a、
4bからマイクロ波空洞を介して発光管1内の気体に作
用して、プラズマを形成せしめ、さらにプラズマ中の粒
子と衝突してプロズマ中の粒子を励起させて、この過程
で紫外線及び可視光線が放出される。この放出された紫
外線及び可視光線は、直接及びミラー3て反射して不図
示のワークに照射されて処理が行われる。4′は、光は
透過するか、マイクロ波は透過しない金属メツシュであ
る。
In the light emitting device shown in FIG. 2, high-density microwave energy generated from the Macnetrons 6a and 6b propagates through the waveguides 5a and 5b, respectively, and the coupling slots 4a and
4b acts on the gas in the arc tube 1 through the microwave cavity to form a plasma, and further collides with particles in the plasma to excite the particles in the plasma, and in this process ultraviolet rays and visible light are emitted. released. The emitted ultraviolet rays and visible rays are irradiated directly and reflected by the mirror 3 onto a workpiece (not shown) to be processed. 4' is a metal mesh that transmits light but does not transmit microwaves.

尚、発光管lは直径10n+mてその内部の充填ガス(
例えば、水銀とアルゴン)は消灯時は水銀の凝縮で降圧
するか、点灯時は水銀が蒸発してlから2気圧程度にな
るような圧力で封入されている。そして、マイクロ波空
洞壁4はマクネトロン6a、6bて発生したマイクロ波
エネルギーが発光管1内に伝播する際に生ずる伝送損失
を考慮し、さらに発光管lの寸法、マクネトロン6a。
Incidentally, the arc tube l has a diameter of 10n+m and the filling gas inside it (
For example, mercury and argon) are sealed at a pressure such that when the lights are off, the pressure drops due to mercury condensation, or when the lights are on, the mercury evaporates and the pressure drops from 1 to 2 atmospheres. The microwave cavity wall 4 is designed based on the dimensions of the arc tube 1 and the dimensions of the arc tube 1, taking into consideration the transmission loss that occurs when the microwave energy generated by the mcnetrons 6a and 6b propagates into the arc tube 1.

6bの出力エネルギーの大きさ及びマイクロ波結合モー
ト等によって決められている。
It is determined by the magnitude of the output energy of 6b, the microwave coupling moat, etc.

また、発光装置の発光動作中に、発光管1は約800°
Cの温度以上に上昇しないように発光管lの管壁を均一
に冷却する必要かある。その際、直径か25mmのよう
な太い有電極の放電管の場合は、冷却に際して放電管と
それを覆うミラーとの間隔が狭く、管壁の熱負荷が小さ
いのて、強制排気によって冷却することか行われている
が、この発明のマイクロ波励起型無電極発光管の場合、
管の直径か10−程度の細いものであるため、ミラー3
との間隔が大きいのて、管壁の熱負荷が有電極に比べ大
きいのと、発光管lの管壁のどの部分にも均一に一定の
風圧の風か当たるようにしてやる必要から第2図で矢印
で示す風向の送風冷却を行゛っている。
Also, during the light emitting operation of the light emitting device, the arc tube 1 is rotated at approximately 80°.
It is necessary to uniformly cool the wall of the arc tube l so that the temperature does not rise above C. At that time, in the case of a discharge tube with a thick electrode, such as a diameter of 25 mm, the distance between the discharge tube and the mirror that covers it is narrow, and the heat load on the tube wall is small, so it is necessary to cool it by forced exhaust. However, in the case of the microwave-excited electrodeless arc tube of this invention,
Since the diameter of the tube is narrow, about 10 mm, the mirror 3
The heat load on the tube wall is greater than that of electrodes due to the large distance between the two electrodes, and it is necessary to ensure that the air at a constant pressure hits every part of the tube wall of the arc tube l uniformly, as shown in Figure 2. Cooling is performed by blowing air in the direction shown by the arrow.

前記2つのマグネトロン6a、6bから発生されるマイ
クロ波は、カップリングスロット4a。
The microwaves generated from the two magnetrons 6a and 6b are connected to the coupling slot 4a.

4bから等距離になる部分の発光管lの中央部て、マイ
クロ波の定常波は干渉し合って0または最小となる場合
がある。従って、発光管1の中央部は、その両端に比し
てマイクロ波の結合が少なくて、封入した水銀やアルゴ
ンガスが加熱励起される割合が少ない。そこて、ミラー
3に設ける冷却風の通じる孔の大きさを、長手方向中央
部て小さくしたりして発光管lの中央部の冷却を押えた
り、また第3図のように発光管1の中央部を細くするこ
とが従来から行われている。
At the center of the arc tube l, which is equidistant from the arc tube 4b, the standing microwave waves may interfere with each other and become zero or minimum. Therefore, in the center of the arc tube 1, there is less coupling of microwaves than at both ends, and the rate at which the enclosed mercury or argon gas is heated and excited is small. Therefore, the size of the hole provided in the mirror 3 through which the cooling air flows is reduced at the center in the longitudinal direction to suppress cooling of the center of the arc tube 1, or as shown in FIG. Conventionally, the central part is made thinner.

第3図は従来のマイクロ波励起型無電極発光管の概略を
示す図て、発光管の中央部30を、その両端部31.3
2よりも細くなるようにテーパなつけたものて、ちなみ
に両端部の外径は10□−中央部の外径は8−である。
FIG. 3 is a diagram schematically showing a conventional microwave-excited electrodeless arc tube.
It is tapered so that it is thinner than 2, and the outer diameter at both ends is 10□ - the outer diameter at the center is 8 -.

[発明か解決しようとする課題] 上記のように、従来のマイクロ波励起型無電極発光管は
、励起すべきマイクロ波のカップリング方法との関係か
ら、発光管中央部におけるマイクロ波の吸収が少なく、
中央部の温度が、両端部の温度に比較して上昇せず、発
光管に封入した水銀の気化状態が均一にならない。そこ
で、発□光管の管壁に、テーパなつけて中央部を細く、
両端部を太くして中央部における水銀の再凝縮を防いで
いる。
[Problem to be solved by the invention] As mentioned above, in the conventional microwave-excited electrodeless arc tube, absorption of microwaves at the center of the arc tube is limited due to the coupling method of the microwave to be excited. less,
The temperature at the center does not rise as much as the temperature at both ends, and the vaporization state of the mercury sealed in the arc tube is not uniform. Therefore, the tube wall of the light emitting tube was tapered to make the central part thinner.
Both ends are made thicker to prevent mercury from recondensing in the center.

発光管の管壁は、その性質上、高融点で高透光性である
必要があるので、通常は石英を用いており、石英管を酸
素−水素バーナで加熱して成形することにより製作され
る。ところが、石英管を加工して中央部を両端部に対し
てテーパを有するように細くすることはたやすくなく、
かつばらつきのない製品を生産することは難しく、その
上、作業性か悪く、特に設計値通りの角度を保ってテー
バなつけることは困難である。また、コストも高くなる
Due to its nature, the wall of an arc tube must have a high melting point and high transparency, so quartz is usually used, and it is manufactured by heating and molding a quartz tube with an oxygen-hydrogen burner. Ru. However, it is not easy to process a quartz tube to make the central part tapered to both ends.
Moreover, it is difficult to produce products with no variations, and in addition, workability is poor, and it is particularly difficult to flatten the taber while maintaining the angle as designed. Moreover, the cost also increases.

この発明はかかる課題を解決するためになされたもので
、簡単な構造で、従来から知られている無電極発光装置
に組み込まれたとき、中央部で発光材料の再凝縮かなく
、かつそれを製造するための作業性もよく、加工も容易
でばらつきのない製品を産出することのできるマイクロ
波励起型無電極発光管及びその製造方法を提供すること
を目的とする。
This invention has been made to solve the above problem, and has a simple structure that, when incorporated into a conventionally known electrodeless light emitting device, does not cause recondensation of the luminescent material in the central part. It is an object of the present invention to provide a microwave-excited electrodeless arc tube and a method for manufacturing the same, which can produce products with good workability, easy processing, and no variation.

[課題を解決するための手段] 上記の目的を達成するために、この発明のマイクロ波励
起型無電極発光管は均一な内径を有する第一の直管状ガ
ラス管の管内中央部に、前記第一の直管状ガラス管の内
径寸法に適合した外径寸法を有する第二のガラス管を固
着した構成を有し、その製造方法は前記第一の直管状ガ
ラス管の内径中央部分に前記第二のガラス管を溶着して
固定するものである。
[Means for Solving the Problems] In order to achieve the above object, the microwave-excited electrodeless arc tube of the present invention has the first straight glass tube having the first straight glass tube having a uniform inner diameter. It has a structure in which a second glass tube having an outer diameter that matches the inner diameter of the first straight glass tube is fixed, and the manufacturing method includes fixing the second glass tube to the inner diameter center portion of the first straight glass tube. The glass tube is welded and fixed.

[作用] 上記の構成を有することにより、発光材料の再凝縮のな
い発光管の製作は容易で、ばらつきのない製品を得るこ
とができる。
[Function] With the above configuration, it is easy to manufacture an arc tube without recondensation of the luminescent material, and a product with no variation can be obtained.

[実施例] 第1図はこの発明の一実施例を説明するための断面図で
、同図(a)は発光管の断面図、同図(b)、(c)は
同図(a)の発光管の製造工程を順次示す図である。
[Example] Fig. 1 is a sectional view for explaining an embodiment of the present invention, in which (a) is a sectional view of an arc tube, and (b) and (c) are sectional views of an arc tube. FIG. 3 is a diagram sequentially showing the manufacturing process of the arc tube.

第1図(a)、(b)、(c)において、lOはマイク
ロ波励起型無電極発光管で、スペクトル成分として紫外
線及び可視光線を放射する発光管であり、11はこの発
光管lOを形成する管壁の肉厚1.0.、、外径lO−
の石英からなる第一の直管状ガラス管、12はこの第一
の直管状ガラス管11の管内中央部に内径6 ff1f
fil外径8□、長さ50−の石英からなる第二のガラ
ス管てあり、この第二のガラス管12の外径寸法は、第
一の直管状ガラス管11の内径寸法(8,)に適合する
ようになっている。
In FIGS. 1(a), (b), and (c), 1O is a microwave-excited electrodeless arc tube that emits ultraviolet and visible light as spectral components, and 11 indicates this arc tube 1O. The thickness of the tube wall to be formed is 1.0. ,,outer diameter lO-
A first straight glass tube 12 made of quartz has an inner diameter of 6 ff1f at the center of the first straight glass tube 11.
There is a second glass tube made of quartz with an outer diameter of 8□ and a length of 50 mm, and the outer diameter of the second glass tube 12 is equal to the inner diameter of the first straight glass tube 11 (8,). It is adapted to suit.

次に、発光管10の製造工程について説明すると、第1
図(b)に示すように、まず第一の直管状ガラス管11
内の中央部に第二のガラス管12を挿入して後、同図(
c)のように、酸素−水素ハーナ13て第二のガラス管
12が装着された中央部を加熱して第二のガラス管12
と第一の直管状ガラス管11とを溶着して固定する。そ
の後、第一の直管状ガラス管ll内に水銀やハライド化
した鉄等の発光材料、及びアルゴン等のバッファガス等
を封入した後、その両端をスタブ14で封止して第1図
゛(a)に示すような238−の長さの発光管lOが形
成される。
Next, the manufacturing process of the arc tube 10 will be explained.
As shown in Figure (b), first a straight glass tube 11
After inserting the second glass tube 12 into the center of the
As shown in c), the oxygen-hydrogen heater 13 heats the central part where the second glass tube 12 is attached, and the second glass tube 12 is heated.
and the first straight glass tube 11 are welded and fixed. Thereafter, a luminescent material such as mercury or halide iron, and a buffer gas such as argon are filled in the first straight glass tube ll, and both ends of the tube are sealed with stubs 14, as shown in FIG. An arc tube IO having a length of 238- is formed as shown in a).

上記のような製造工程によって、例えば水銀25□及び
アルゴンガスが非点灯時1′/76o気圧に封入された
発光管10に対して、フュージョン・システムコーポレ
ーション社製のF 450−10ランプシステムを用い
て、出力3kW、周波数2450MH,のマイクロ波を
給金させた結果、第一の直管状ガラス管11の中央部直
下110−の位置で8251″w/。−2の照度が得ら
れた。そのとき、発光管10において水銀の再凝縮は発
見されなかつた。
Through the manufacturing process described above, an F 450-10 lamp system manufactured by Fusion System Corporation is used for the arc tube 10, which is filled with mercury 25□ and argon gas at a pressure of 1'/76 degrees when not lit. As a result of feeding microwaves with an output of 3 kW and a frequency of 2450 MH, an illuminance of 8251"w/.-2 was obtained at a position 110- directly below the center of the first straight glass tube 11. At that time, no recondensation of mercury was found in the arc tube 10.

[発明の効果] 以上説明したとおり、この発明の発光管は均一な内径を
有する第一の直管状ガラス管の管内中央部に、前記第一
の直管状ガラス管の内径寸法に適合した外径寸法を有す
る第二のガラス管を固着した構成を有し、その製造方法
は第一の直管状ガラス管の内径中央部分に前記第二のガ
ラス管を溶着して固定する工程を有するので、製作が容
易で製品にバラツキがなく、コストも安くてきるという
効果がある。
[Effects of the Invention] As explained above, in the arc tube of the present invention, a first straight glass tube having a uniform inner diameter has an outer diameter that matches the inner diameter of the first straight glass tube at the center of the tube. The manufacturing method includes a step of welding and fixing the second glass tube to the center portion of the inner diameter of the first straight glass tube. This has the effect of making it easier to produce products, ensuring that there is no variation in the product, and reducing costs.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例を説明するための断面図で
、同図(a)は発光管の断面図、同図(b)、(C)は
同図(a)の発光管の製造工程を順次示す図、第2図は
従来のマイクロ波励起型無電極発光装置の主要部の概略
を示す断面図、第3図は従来のマイクロ波励起型無電極
発光管の概略を示す図である。 図中。 10:発光管 11:第一の直管状ガラス管 12:第二のガラス管 13:酸素−水素バーナ 14ニスタブ 代理人 弁理士 1)北 嵩 晴 (b) (c) 第1図
FIG. 1 is a cross-sectional view for explaining one embodiment of the present invention, in which (a) is a cross-sectional view of the arc tube, and (b) and (C) are the cross-sectional views of the arc tube in (a). Figure 2 is a cross-sectional view schematically showing the main parts of a conventional microwave-excited electrodeless light emitting device; Figure 3 is a diagram schematically showing a conventional microwave-excited electrodeless arc tube. It is. In the figure. 10: Arc tube 11: First straight glass tube 12: Second glass tube 13: Oxygen-hydrogen burner 14 Nistab agent Patent attorney 1) Haru Kitatake (b) (c) Figure 1

Claims (2)

【特許請求の範囲】[Claims] (1)均一な内径を有する第一の直管状ガラス管の管内
中央部に、前記第一の直管状ガラス管の内径寸法に適合
した外径寸法を有する第二のガラス管を固着した構成を
有することを特徴とするマイクロ波励起型無電極発光管
(1) A second glass tube having an outer diameter matching the inner diameter of the first straight glass tube is fixed to the center of the first straight glass tube having a uniform inner diameter. A microwave-excited electrodeless arc tube comprising:
(2)均一な内径を有する第一の直管状ガラス管の管内
中央部に前記第一の直管状ガラス管の内径寸法に適合し
た外径寸法を有する第二のガラス管を挿入し、前記第一
の直管状ガラス管の内径中央部分に前記第二のガラス管
を溶着して固定することを特徴とするマイクロ波励起型
無電極発光管の製造方法。
(2) Insert a second glass tube having an outer diameter that matches the inner diameter of the first straight glass tube into the center of the first straight glass tube having a uniform inner diameter; 1. A method for manufacturing a microwave-excited electrodeless arc tube, comprising: welding and fixing the second glass tube to the center portion of the inner diameter of the first straight glass tube.
JP63228834A 1988-09-14 1988-09-14 Microwave-excited electrodeless arc tube and method for manufacturing the same Expired - Lifetime JP2561902B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63228834A JP2561902B2 (en) 1988-09-14 1988-09-14 Microwave-excited electrodeless arc tube and method for manufacturing the same

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Application Number Priority Date Filing Date Title
JP63228834A JP2561902B2 (en) 1988-09-14 1988-09-14 Microwave-excited electrodeless arc tube and method for manufacturing the same

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JPH0279354A true JPH0279354A (en) 1990-03-19
JP2561902B2 JP2561902B2 (en) 1996-12-11

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003510773A (en) * 1999-09-20 2003-03-18 ノードソン コーポレーション Apparatus and method for generating ultraviolet light
WO2005071714A1 (en) * 2004-01-22 2005-08-04 Matsushita Electric Industrial Co., Ltd. External-electrode discharge lamp, external-electrode discharge lamp manufacturing method, and backlight unit
JP2006114505A (en) * 2004-10-18 2006-04-27 Heraeus Noblelight Ltd High-power discharge lamp
US7253555B2 (en) 2002-10-24 2007-08-07 Lg Electronics Inc. Electrodeless lamp system and bulb thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003510773A (en) * 1999-09-20 2003-03-18 ノードソン コーポレーション Apparatus and method for generating ultraviolet light
JP4901041B2 (en) * 1999-09-20 2012-03-21 ノードソン コーポレーション Apparatus and method for generating ultraviolet light
US7253555B2 (en) 2002-10-24 2007-08-07 Lg Electronics Inc. Electrodeless lamp system and bulb thereof
WO2005071714A1 (en) * 2004-01-22 2005-08-04 Matsushita Electric Industrial Co., Ltd. External-electrode discharge lamp, external-electrode discharge lamp manufacturing method, and backlight unit
JP2006114505A (en) * 2004-10-18 2006-04-27 Heraeus Noblelight Ltd High-power discharge lamp

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