JPH0279197U - - Google Patents
Info
- Publication number
- JPH0279197U JPH0279197U JP16025388U JP16025388U JPH0279197U JP H0279197 U JPH0279197 U JP H0279197U JP 16025388 U JP16025388 U JP 16025388U JP 16025388 U JP16025388 U JP 16025388U JP H0279197 U JPH0279197 U JP H0279197U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic
- adsorption
- holding device
- voltage power
- adsorption layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16025388U JPH0279197U (en, 2012) | 1988-12-08 | 1988-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16025388U JPH0279197U (en, 2012) | 1988-12-08 | 1988-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0279197U true JPH0279197U (en, 2012) | 1990-06-18 |
Family
ID=31442158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16025388U Pending JPH0279197U (en, 2012) | 1988-12-08 | 1988-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0279197U (en, 2012) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61107623A (ja) * | 1984-10-30 | 1986-05-26 | 日本電気株式会社 | 遅延動作型圧電リレ−の入力回路 |
| JPS6244332A (ja) * | 1985-08-23 | 1987-02-26 | Canon Inc | 静電吸着装置 |
-
1988
- 1988-12-08 JP JP16025388U patent/JPH0279197U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61107623A (ja) * | 1984-10-30 | 1986-05-26 | 日本電気株式会社 | 遅延動作型圧電リレ−の入力回路 |
| JPS6244332A (ja) * | 1985-08-23 | 1987-02-26 | Canon Inc | 静電吸着装置 |