JPH0277318U - - Google Patents
Info
- Publication number
- JPH0277318U JPH0277318U JP15696388U JP15696388U JPH0277318U JP H0277318 U JPH0277318 U JP H0277318U JP 15696388 U JP15696388 U JP 15696388U JP 15696388 U JP15696388 U JP 15696388U JP H0277318 U JPH0277318 U JP H0277318U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- magnetic bearing
- electromagnet
- control means
- levitated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims 2
- 238000013459 approach Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
第１図は本考案装置の概略構成を示すブロツク
図および第２図はロータの浮上位置指令特性図で
ある。
１……ロータ、２ａ，２ｂ……ラジアル電磁石
、３ａ，３ｂ……アキシヤル電磁石、４……アー
マチヤデイスク、５……永久磁石部、８ａ，８ｂ
……ラジアル位置センサ、９……アキシヤル位置
センサ、１０……回転センサ、１１……位置検出
回路、１２……回転数検出回路、１３……浮上位
置指令回路、１４……減算回路、１５……制御回
路、１６……電磁石駆動回路、ａ……磁気軸受本
体、ｂ……制御手段、ｃ……補償回路。
FIG. 1 is a block diagram showing a schematic configuration of the device of the present invention, and FIG. 2 is a characteristic diagram of a rotor floating position command. 1... Rotor, 2a, 2b... Radial electromagnet, 3a, 3b... Axial electromagnet, 4... Armature disk, 5... Permanent magnet section, 8a, 8b
... Radial position sensor, 9 ... Axial position sensor, 10 ... Rotation sensor, 11 ... Position detection circuit, 12 ... Rotation speed detection circuit, 13 ... Floating position command circuit, 14 ... Subtraction circuit, 15 ... ...Control circuit, 16...Electromagnet drive circuit, a...Magnetic bearing body, b...Control means, c...Compensation circuit.
Claims (1)
子ポンプのロータ等のロータの半径方向を電磁石
により浮上保持するとともに、上記ロータの軸方
向を電磁石と永久磁石とにより浮上保持させて軸
支する磁気軸受本体と、前記ロータの半径方向及
び軸方向の浮上位置を検出する位置センサと、該
位置センサの検出信号を入力するとともに、前記
電磁石へ励磁電流を出力する制御手段とからなり
、該制御手段により励磁電流を調整してロータを
所定の目標位置に浮上保持させるようにした磁気
軸受の制御装置において、 前記制御手段には前記ロータの加速時または減
速時に前記磁気軸受本体の共振周波数に近づいた
時点で前記ロータの軸方向位置を変更させる補償
回路が具備されていることを特徴とする磁気軸受
の制御装置。[Scope of Claim for Utility Model Registration] The radial direction of a rotor such as a spindle rotor of a machine tool or the rotor of a turbo molecular pump is levitated and held by an electromagnet, and the axial direction of the rotor is levitated and held by an electromagnet and a permanent magnet. It consists of a supporting magnetic bearing body, a position sensor that detects the floating position of the rotor in the radial direction and axial direction, and a control means that inputs the detection signal of the position sensor and outputs an excitation current to the electromagnet, A control device for a magnetic bearing in which the control means adjusts an excitation current to levitate and hold the rotor at a predetermined target position, wherein the control means adjusts the resonance frequency of the magnetic bearing body when the rotor is accelerated or decelerated. A control device for a magnetic bearing, comprising a compensation circuit that changes the axial position of the rotor when the rotor approaches .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15696388U JPH0277318U (en) | 1988-12-01 | 1988-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15696388U JPH0277318U (en) | 1988-12-01 | 1988-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0277318U true JPH0277318U (en) | 1990-06-13 |
Family
ID=31435979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15696388U Pending JPH0277318U (en) | 1988-12-01 | 1988-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0277318U (en) |
-
1988
- 1988-12-01 JP JP15696388U patent/JPH0277318U/ja active Pending
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