JPH0276281U - - Google Patents
Info
- Publication number
- JPH0276281U JPH0276281U JP15573688U JP15573688U JPH0276281U JP H0276281 U JPH0276281 U JP H0276281U JP 15573688 U JP15573688 U JP 15573688U JP 15573688 U JP15573688 U JP 15573688U JP H0276281 U JPH0276281 U JP H0276281U
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- air supply
- vacuum
- supply port
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Details Of Valves (AREA)
Description
第１図は本考案の一実施例の断面図、第２図は
従来の高真空直角弁の一例の断面図である。 １……真空弁座、２……駆動軸、３……駆動軸
シール、４，５……シール、６……エアシリンダ
、７……給気口、８……排気口。
従来の高真空直角弁の一例の断面図である。 １……真空弁座、２……駆動軸、３……駆動軸
シール、４，５……シール、６……エアシリンダ
、７……給気口、８……排気口。
Claims (1)
- 給気口と排気口とを互に直角に配置し、前記給
気口および排気口の何れか一方の内面のシール部
に、駆動軸シールを摺動する駆動軸に取付けた真
空弁座を圧接して前記給気口と排気口との流通を
閉成する高真空直角弁において、前記真空弁座の
圧接する面とは逆の面と前記駆動軸シールの外周
部との間にシール部を有することを特徴とする高
真空直角弁。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15573688U JPH0276281U (ja) | 1988-11-29 | 1988-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15573688U JPH0276281U (ja) | 1988-11-29 | 1988-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0276281U true JPH0276281U (ja) | 1990-06-12 |
Family
ID=31433625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15573688U Pending JPH0276281U (ja) | 1988-11-29 | 1988-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0276281U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000075544A1 (fr) * | 1999-06-02 | 2000-12-14 | Tokyo Electron Limited | Clapet et appareil de traitement sous vide comportant ce clapet |
| JP2003042339A (ja) * | 2001-07-26 | 2003-02-13 | Anelva Corp | 真空弁 |
-
1988
- 1988-11-29 JP JP15573688U patent/JPH0276281U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000075544A1 (fr) * | 1999-06-02 | 2000-12-14 | Tokyo Electron Limited | Clapet et appareil de traitement sous vide comportant ce clapet |
| EP1215430A1 (en) * | 1999-06-02 | 2002-06-19 | Tokyo Electron Limited | Valve and vacuum processing device with the valve |
| EP1215430A4 (en) * | 1999-06-02 | 2002-10-30 | Tokyo Electron Ltd | VALVE AND VACUUM PROCESSING APPARATUS COMPRISING THIS VALVE |
| KR100605834B1 (ko) * | 1999-06-02 | 2006-07-31 | 동경 엘렉트론 주식회사 | 진공 게이트 밸브 및 게이트 밸브를 구비한 진공 처리 장치 |
| JP2003042339A (ja) * | 2001-07-26 | 2003-02-13 | Anelva Corp | 真空弁 |