JPH027605U - - Google Patents
Info
- Publication number
- JPH027605U JPH027605U JP8708488U JP8708488U JPH027605U JP H027605 U JPH027605 U JP H027605U JP 8708488 U JP8708488 U JP 8708488U JP 8708488 U JP8708488 U JP 8708488U JP H027605 U JPH027605 U JP H027605U
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- substrate
- surface protection
- electrode
- protection material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims 1
- 239000003566 sealing material Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
Description
第１図は本考案による光導波路素子の一実施例
を示す断面図、第２図は封止材料を基板と熱膨張
係数が等しい表面保護材料で兼用した構造の断面
図、第３図は光導波路、電極近傍のみを基板と熱
膨張係数が等しい表面保護材料で覆つた構造の断
面図である。
１１，２１，３１…結晶基板、１２，２２，３
２…光導波路、１３，２３，３３…電極、１４，
２４，３４…基板と熱膨張係数が等しい表面保護
材料、１５，２５，３５…容器、１６，３６…封
止材料、１７，２７，３７…ヘリウムガス。
Fig. 1 is a cross-sectional view showing an embodiment of the optical waveguide device according to the present invention, Fig. 2 is a cross-sectional view of a structure in which a surface protection material with the same coefficient of thermal expansion as the substrate serves as the sealing material, and Fig. 3 is a cross-sectional view of an optical waveguide device according to the present invention. FIG. 2 is a cross-sectional view of a structure in which only the wave path and the vicinity of the electrode are covered with a surface protection material having the same coefficient of thermal expansion as the substrate. 11,21,31...Crystal substrate, 12,22,3
2... Optical waveguide, 13, 23, 33... Electrode, 14,
24, 34... Surface protection material having the same coefficient of thermal expansion as the substrate, 15, 25, 35... Container, 16, 36... Sealing material, 17, 27, 37... Helium gas.
Claims (1)
に形成された電極とからなる光導波路素子におい
て、前記電極を覆つて形成された前記基板と熱膨
張係数の等しい表面保護材料と、さらに少なくと
も前記電極上の前記表面保護材料が気密封止によ
り保護されていることを特徴とする光導波路素子
。 In an optical waveguide element comprising an optical waveguide formed on a substrate and an electrode formed near the optical waveguide, a surface protection material having a coefficient of thermal expansion equal to that of the substrate is formed covering the electrode, and further includes at least a surface protection material having a coefficient of thermal expansion equal to that of the substrate. An optical waveguide element characterized in that the surface protection material on the electrode is protected by hermetic sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8708488U JPH027605U (en) | 1988-06-29 | 1988-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8708488U JPH027605U (en) | 1988-06-29 | 1988-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH027605U true JPH027605U (en) | 1990-01-18 |
Family
ID=31311716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8708488U Pending JPH027605U (en) | 1988-06-29 | 1988-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH027605U (en) |
-
1988
- 1988-06-29 JP JP8708488U patent/JPH027605U/ja active Pending