JPH027479A - Piezoelectric element - Google Patents
Piezoelectric elementInfo
- Publication number
- JPH027479A JPH027479A JP63157054A JP15705488A JPH027479A JP H027479 A JPH027479 A JP H027479A JP 63157054 A JP63157054 A JP 63157054A JP 15705488 A JP15705488 A JP 15705488A JP H027479 A JPH027479 A JP H027479A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- electrode material
- contact
- adhesive
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007772 electrode material Substances 0.000 claims abstract description 13
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 7
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 7
- 239000002245 particle Substances 0.000 claims abstract description 7
- 239000002184 metal Substances 0.000 abstract description 12
- 239000000853 adhesive Substances 0.000 abstract description 9
- 230000001070 adhesive effect Effects 0.000 abstract description 9
- 239000000919 ceramic Substances 0.000 abstract description 4
- 239000012790 adhesive layer Substances 0.000 abstract description 2
- 238000003475 lamination Methods 0.000 abstract 3
- 238000007772 electroless plating Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は圧電振動子あるいはセラミックアクチュエータ
等の接着剤を用いて電気的導通を必要とする圧電素子に
関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a piezoelectric element such as a piezoelectric vibrator or a ceramic actuator that requires electrical continuity using an adhesive.
(従来の技術)
従来の圧電素子について第3図および第4図を用いて説
明する。第3図は従来例の断面図であり、第4図は従来
例を用いた圧電素子の貼合せ断面図である。(Prior Art) A conventional piezoelectric element will be described with reference to FIGS. 3 and 4. FIG. 3 is a sectional view of a conventional example, and FIG. 4 is a sectional view of a piezoelectric element bonded together using the conventional example.
第3図において、圧電素子1上に電極材料2極材料2が
薄金属板3に接着剤4を用いて貼合わされている。第4
図(b)は第3図に示す圧電素子上の電極材料2が接着
剤4を用いてバイモルフ状に貼合わされている。このよ
うに構成された圧電振動子セラミックアクチュエータに
電圧を印加すると変位を得ることができるものである。In FIG. 3, two electrode materials 2 are bonded to a thin metal plate 3 using an adhesive 4 on a piezoelectric element 1. As shown in FIG. Fourth
In Figure (b), the electrode material 2 on the piezoelectric element shown in Figure 3 is pasted together in a bimorph shape using an adhesive 4. By applying a voltage to the piezoelectric vibrator ceramic actuator configured in this manner, displacement can be obtained.
(発明が解決しようとする課題)
上記のような構成では、圧電素子と薄金属板あるいは圧
電素子との貼合わせ面において接点が得にくく電気的導
通不良が生じ特性が安定しない欠点があった。(Problems to be Solved by the Invention) The above configuration has the drawback that it is difficult to obtain a contact point on the bonding surface between the piezoelectric element and the thin metal plate or the piezoelectric element, resulting in poor electrical continuity and unstable characteristics.
本発明の目的は、従来の欠点を解消し、圧電素子と薄金
属板あるいは圧電素子との接着面における接点を均一に
増加させ、電気的導通を良好とし、特性を安定させる圧
電素子を提供することである。An object of the present invention is to provide a piezoelectric element that eliminates the conventional drawbacks, uniformly increases the number of contact points on the adhesive surface between the piezoelectric element and the thin metal plate or the piezoelectric element, improves electrical continuity, and stabilizes the characteristics. That's true.
(課題を解決するための手段)
本発明の圧電素子は、電極材料に粒径5〜10I!Wa
の金属酸化物を配合させたものである。(Means for Solving the Problems) The piezoelectric element of the present invention has an electrode material having a particle size of 5 to 10I! Wa
This is a mixture of metal oxides.
(作 用)
上記構成により、圧電素子と薄金属板あるいは圧電素子
との貼合わせ面における接点が均一に増加し電気的導通
不良が生じるということがなくなり特性が安定する。(Function) With the above configuration, the number of contact points on the bonding surface between the piezoelectric element and the thin metal plate or the piezoelectric element increases uniformly, and electrical conductivity failure does not occur, and the characteristics are stabilized.
(実施例)
本発明の一実施例を第1図および第2図に基づいて説明
する。第1図は本発明の圧電素子の断面図、第2図(a
)は圧電素子と薄金属板との貼合わせ断面図、第2図(
b)は圧電素子と圧電素子の貼合わせ断面図である。な
お同図と、第3図および第4図の従来例の同一部分につ
いては同じ符号を付し、その説明を省略する。(Example) An example of the present invention will be described based on FIGS. 1 and 2. FIG. 1 is a sectional view of the piezoelectric element of the present invention, and FIG.
) is a cross-sectional view of the piezoelectric element and thin metal plate bonded together, and Figure 2 (
b) is a sectional view of piezoelectric elements bonded together. Note that the same parts in the conventional example shown in FIG. 3 and FIGS.
第1図において、圧電素子1に粒径5〜lO戸の金属酸
化物5が5〜20%配合された電極材料2に焼付あるい
は無電解メツキ処理が施されている。In FIG. 1, a piezoelectric element 1 is baked or electrolessly plated on an electrode material 2 containing 5 to 20% of metal oxide 5 having a particle size of 5 to 1000 ml.
第2図(a)は第1図に示す圧電素子1および電極材料
2が薄金属板3に接着剤4を用いて貼合すされている。In FIG. 2(a), the piezoelectric element 1 and electrode material 2 shown in FIG. 1 are bonded to a thin metal plate 3 using an adhesive 4. In FIG.
第2図(b)は第1図に示す圧電素子1および電極材料
2を2枚、接着剤4で貼合わされている。In FIG. 2(b), two pieces of the piezoelectric element 1 and the electrode material 2 shown in FIG. 1 are bonded together with an adhesive 4. In FIG.
以上のように本実施例によれば、圧電素子と薄金属板あ
るいは圧電素子との貼合わせ面において。As described above, according to this embodiment, on the bonding surface between the piezoelectric element and the thin metal plate or the piezoelectric element.
接着層は2〜31M程度であり、圧電素子の電極面は5
〜10μあるため、貼合わせ面の接点は確実に接触し、
かつ接点は従来品に比べ増加するので電気的導通不良が
生じることがなくなり、電気特性が良好となり、かつ安
定する。The adhesive layer is about 2 to 31M, and the electrode surface of the piezoelectric element is about 5M.
Since the thickness is ~10μ, the contact points on the bonding surface will surely make contact,
In addition, since the number of contacts is increased compared to conventional products, there is no possibility of electrical continuity failure, and the electrical characteristics are good and stable.
(発明の効果)
本発明によれば、電極材料に粒径5〜10戸の金属酸化
物を5〜20%配合した圧電素子を使用した圧電振動子
およびセラミックアクチュエータの貼合わせ面は接点が
確実に接触し、接点も増加するので電気的導通が良好と
なり特性が安定し、その実用上の効果は大である。(Effects of the Invention) According to the present invention, the bonding surfaces of a piezoelectric vibrator and a ceramic actuator using a piezoelectric element containing 5 to 20% of metal oxide with a particle size of 5 to 10 particles in the electrode material have a reliable contact point. Since the number of contact points increases, electrical continuity becomes good and the characteristics become stable, which has a great practical effect.
第1図は本発明の一実施例による圧電素子の断面図、第
2図(a)は第1図に示す圧電素子と薄金属板の貼合わ
せ断面図、第2図(b)は同圧電素子と圧電素子の貼合
わせ断面図、第3図は従来の圧電素子の断面図、第4図
(a)は第3図に示す圧電素子と薄金属板の貼合わせ断
面図、′第4図(b)は同圧電素子と圧電素子の貼合わ
せ断面図である。
1 ・・・圧電素子、 2・・・電極材料。
3・・・薄金属板、4・・・接着剤、
5・・・金属酸化物。
第
図
特許出願人 松下電鼎産業株式会社
第2図FIG. 1 is a sectional view of a piezoelectric element according to an embodiment of the present invention, FIG. 2(a) is a sectional view of the piezoelectric element shown in FIG. 1 and a thin metal plate laminated together, and FIG. 3 is a cross-sectional view of a conventional piezoelectric element; FIG. 4(a) is a cross-sectional view of the piezoelectric element and thin metal plate shown in FIG. 3; (b) is a sectional view of the piezoelectric elements bonded together. 1... Piezoelectric element, 2... Electrode material. 3... Thin metal plate, 4... Adhesive, 5... Metal oxide. Figure 2 Patent applicant: Matsushita Denkin Sangyo Co., Ltd.
Claims (1)
酸化物を配合させたことを特徴とする圧電素子。A piezoelectric element characterized in that a metal oxide having a particle size of 5 μm to 10 μm is blended into the electrode material of the piezoelectric element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63157054A JPH027479A (en) | 1988-06-25 | 1988-06-25 | Piezoelectric element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63157054A JPH027479A (en) | 1988-06-25 | 1988-06-25 | Piezoelectric element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH027479A true JPH027479A (en) | 1990-01-11 |
Family
ID=15641199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63157054A Pending JPH027479A (en) | 1988-06-25 | 1988-06-25 | Piezoelectric element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH027479A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006284165A (en) * | 2005-03-07 | 2006-10-19 | Denso Corp | Exhaust gas heat exchanger |
US20090309936A1 (en) * | 2005-12-13 | 2009-12-17 | Tsuyoshi Mita | Method of manufacturing a piezoelectric actuator and liquid ejection head |
US20100107390A1 (en) * | 2005-12-08 | 2010-05-06 | Murata Manufacturing Co., Ltd. | Multilayer Piezoelectric Device and Method for Manufacturing the Same |
US20100192341A1 (en) * | 2006-04-03 | 2010-08-05 | Canon Kabushiki Kaisha | Piezoelectric element and manufacturing method thereof, electronic device, ink jet device |
US20120236084A1 (en) * | 2011-03-16 | 2012-09-20 | Ricoh Company, Ltd., | Piezoelectric actuator, method of producing piezoelectric actuator, and liquid discharge head |
-
1988
- 1988-06-25 JP JP63157054A patent/JPH027479A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006284165A (en) * | 2005-03-07 | 2006-10-19 | Denso Corp | Exhaust gas heat exchanger |
US20100107390A1 (en) * | 2005-12-08 | 2010-05-06 | Murata Manufacturing Co., Ltd. | Multilayer Piezoelectric Device and Method for Manufacturing the Same |
US20090309936A1 (en) * | 2005-12-13 | 2009-12-17 | Tsuyoshi Mita | Method of manufacturing a piezoelectric actuator and liquid ejection head |
US8500253B2 (en) * | 2005-12-13 | 2013-08-06 | Fujifilm Corporation | Piezoelectric actuator and liquid ejection head |
US20100192341A1 (en) * | 2006-04-03 | 2010-08-05 | Canon Kabushiki Kaisha | Piezoelectric element and manufacturing method thereof, electronic device, ink jet device |
US8387220B2 (en) * | 2006-04-03 | 2013-03-05 | Canon Kabushiki Kaisha | Method of manufacturing a piezoelectric element |
US20120236084A1 (en) * | 2011-03-16 | 2012-09-20 | Ricoh Company, Ltd., | Piezoelectric actuator, method of producing piezoelectric actuator, and liquid discharge head |
US8713768B2 (en) * | 2011-03-16 | 2014-05-06 | Ricoh Company, Ltd. | Method of producing piezoelectric actuator |
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