JPH027479A - Piezoelectric element - Google Patents

Piezoelectric element

Info

Publication number
JPH027479A
JPH027479A JP63157054A JP15705488A JPH027479A JP H027479 A JPH027479 A JP H027479A JP 63157054 A JP63157054 A JP 63157054A JP 15705488 A JP15705488 A JP 15705488A JP H027479 A JPH027479 A JP H027479A
Authority
JP
Japan
Prior art keywords
piezoelectric element
electrode material
contact
adhesive
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63157054A
Other languages
Japanese (ja)
Inventor
Norio Kitamasu
北升 法男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63157054A priority Critical patent/JPH027479A/en
Publication of JPH027479A publication Critical patent/JPH027479A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To bring a contact of a lamination surface of a piezoelectric oscillator and a ceramic actuator into secure contact, to increase the contact and to realize good electric conductivity by using a piezoelectric element which is made by mixing metal oxide of particle diameter of 5-10mum for an electrode material at 5-20%. CONSTITUTION:Burning or electroless plating of electrode material 2 whereto metal oxide 5 of particle diameter of 5-10mum is mixed at 5-20% is applied to a piezoelectric element 1. The piezoelectric element 1 and an electrode material 2 are laminated to a thin metal plate 3 with an adhesive 4. Two sheets of piezoelectric element 1 and electrode material 2 are laminated with the adhesive 4. An adhesive layer is about 2-3mum at a lamination surface of the piezoelectric element 1 and the thin metal plate or that of piezoelectric elements while an electrode surface of the piezoelectric element is 5-10mum. Therefore, a contact of a lamination surface comes into secure contact and also increases. Electric conductive failure does not generate and good and stable electric characteristics are acquired.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は圧電振動子あるいはセラミックアクチュエータ
等の接着剤を用いて電気的導通を必要とする圧電素子に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a piezoelectric element such as a piezoelectric vibrator or a ceramic actuator that requires electrical continuity using an adhesive.

(従来の技術) 従来の圧電素子について第3図および第4図を用いて説
明する。第3図は従来例の断面図であり、第4図は従来
例を用いた圧電素子の貼合せ断面図である。
(Prior Art) A conventional piezoelectric element will be described with reference to FIGS. 3 and 4. FIG. 3 is a sectional view of a conventional example, and FIG. 4 is a sectional view of a piezoelectric element bonded together using the conventional example.

第3図において、圧電素子1上に電極材料2極材料2が
薄金属板3に接着剤4を用いて貼合わされている。第4
図(b)は第3図に示す圧電素子上の電極材料2が接着
剤4を用いてバイモルフ状に貼合わされている。このよ
うに構成された圧電振動子セラミックアクチュエータに
電圧を印加すると変位を得ることができるものである。
In FIG. 3, two electrode materials 2 are bonded to a thin metal plate 3 using an adhesive 4 on a piezoelectric element 1. As shown in FIG. Fourth
In Figure (b), the electrode material 2 on the piezoelectric element shown in Figure 3 is pasted together in a bimorph shape using an adhesive 4. By applying a voltage to the piezoelectric vibrator ceramic actuator configured in this manner, displacement can be obtained.

(発明が解決しようとする課題) 上記のような構成では、圧電素子と薄金属板あるいは圧
電素子との貼合わせ面において接点が得にくく電気的導
通不良が生じ特性が安定しない欠点があった。
(Problems to be Solved by the Invention) The above configuration has the drawback that it is difficult to obtain a contact point on the bonding surface between the piezoelectric element and the thin metal plate or the piezoelectric element, resulting in poor electrical continuity and unstable characteristics.

本発明の目的は、従来の欠点を解消し、圧電素子と薄金
属板あるいは圧電素子との接着面における接点を均一に
増加させ、電気的導通を良好とし、特性を安定させる圧
電素子を提供することである。
An object of the present invention is to provide a piezoelectric element that eliminates the conventional drawbacks, uniformly increases the number of contact points on the adhesive surface between the piezoelectric element and the thin metal plate or the piezoelectric element, improves electrical continuity, and stabilizes the characteristics. That's true.

(課題を解決するための手段) 本発明の圧電素子は、電極材料に粒径5〜10I!Wa
の金属酸化物を配合させたものである。
(Means for Solving the Problems) The piezoelectric element of the present invention has an electrode material having a particle size of 5 to 10I! Wa
This is a mixture of metal oxides.

(作 用) 上記構成により、圧電素子と薄金属板あるいは圧電素子
との貼合わせ面における接点が均一に増加し電気的導通
不良が生じるということがなくなり特性が安定する。
(Function) With the above configuration, the number of contact points on the bonding surface between the piezoelectric element and the thin metal plate or the piezoelectric element increases uniformly, and electrical conductivity failure does not occur, and the characteristics are stabilized.

(実施例) 本発明の一実施例を第1図および第2図に基づいて説明
する。第1図は本発明の圧電素子の断面図、第2図(a
)は圧電素子と薄金属板との貼合わせ断面図、第2図(
b)は圧電素子と圧電素子の貼合わせ断面図である。な
お同図と、第3図および第4図の従来例の同一部分につ
いては同じ符号を付し、その説明を省略する。
(Example) An example of the present invention will be described based on FIGS. 1 and 2. FIG. 1 is a sectional view of the piezoelectric element of the present invention, and FIG.
) is a cross-sectional view of the piezoelectric element and thin metal plate bonded together, and Figure 2 (
b) is a sectional view of piezoelectric elements bonded together. Note that the same parts in the conventional example shown in FIG. 3 and FIGS.

第1図において、圧電素子1に粒径5〜lO戸の金属酸
化物5が5〜20%配合された電極材料2に焼付あるい
は無電解メツキ処理が施されている。
In FIG. 1, a piezoelectric element 1 is baked or electrolessly plated on an electrode material 2 containing 5 to 20% of metal oxide 5 having a particle size of 5 to 1000 ml.

第2図(a)は第1図に示す圧電素子1および電極材料
2が薄金属板3に接着剤4を用いて貼合すされている。
In FIG. 2(a), the piezoelectric element 1 and electrode material 2 shown in FIG. 1 are bonded to a thin metal plate 3 using an adhesive 4. In FIG.

第2図(b)は第1図に示す圧電素子1および電極材料
2を2枚、接着剤4で貼合わされている。
In FIG. 2(b), two pieces of the piezoelectric element 1 and the electrode material 2 shown in FIG. 1 are bonded together with an adhesive 4. In FIG.

以上のように本実施例によれば、圧電素子と薄金属板あ
るいは圧電素子との貼合わせ面において。
As described above, according to this embodiment, on the bonding surface between the piezoelectric element and the thin metal plate or the piezoelectric element.

接着層は2〜31M程度であり、圧電素子の電極面は5
〜10μあるため、貼合わせ面の接点は確実に接触し、
かつ接点は従来品に比べ増加するので電気的導通不良が
生じることがなくなり、電気特性が良好となり、かつ安
定する。
The adhesive layer is about 2 to 31M, and the electrode surface of the piezoelectric element is about 5M.
Since the thickness is ~10μ, the contact points on the bonding surface will surely make contact,
In addition, since the number of contacts is increased compared to conventional products, there is no possibility of electrical continuity failure, and the electrical characteristics are good and stable.

(発明の効果) 本発明によれば、電極材料に粒径5〜10戸の金属酸化
物を5〜20%配合した圧電素子を使用した圧電振動子
およびセラミックアクチュエータの貼合わせ面は接点が
確実に接触し、接点も増加するので電気的導通が良好と
なり特性が安定し、その実用上の効果は大である。
(Effects of the Invention) According to the present invention, the bonding surfaces of a piezoelectric vibrator and a ceramic actuator using a piezoelectric element containing 5 to 20% of metal oxide with a particle size of 5 to 10 particles in the electrode material have a reliable contact point. Since the number of contact points increases, electrical continuity becomes good and the characteristics become stable, which has a great practical effect.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例による圧電素子の断面図、第
2図(a)は第1図に示す圧電素子と薄金属板の貼合わ
せ断面図、第2図(b)は同圧電素子と圧電素子の貼合
わせ断面図、第3図は従来の圧電素子の断面図、第4図
(a)は第3図に示す圧電素子と薄金属板の貼合わせ断
面図、′第4図(b)は同圧電素子と圧電素子の貼合わ
せ断面図である。 1 ・・・圧電素子、 2・・・電極材料。 3・・・薄金属板、4・・・接着剤、 5・・・金属酸化物。 第 図 特許出願人 松下電鼎産業株式会社 第2図
FIG. 1 is a sectional view of a piezoelectric element according to an embodiment of the present invention, FIG. 2(a) is a sectional view of the piezoelectric element shown in FIG. 1 and a thin metal plate laminated together, and FIG. 3 is a cross-sectional view of a conventional piezoelectric element; FIG. 4(a) is a cross-sectional view of the piezoelectric element and thin metal plate shown in FIG. 3; (b) is a sectional view of the piezoelectric elements bonded together. 1... Piezoelectric element, 2... Electrode material. 3... Thin metal plate, 4... Adhesive, 5... Metal oxide. Figure 2 Patent applicant: Matsushita Denkin Sangyo Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 圧電素子の電極材料に粒径5μmないし10μmの金属
酸化物を配合させたことを特徴とする圧電素子。
A piezoelectric element characterized in that a metal oxide having a particle size of 5 μm to 10 μm is blended into the electrode material of the piezoelectric element.
JP63157054A 1988-06-25 1988-06-25 Piezoelectric element Pending JPH027479A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63157054A JPH027479A (en) 1988-06-25 1988-06-25 Piezoelectric element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63157054A JPH027479A (en) 1988-06-25 1988-06-25 Piezoelectric element

Publications (1)

Publication Number Publication Date
JPH027479A true JPH027479A (en) 1990-01-11

Family

ID=15641199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63157054A Pending JPH027479A (en) 1988-06-25 1988-06-25 Piezoelectric element

Country Status (1)

Country Link
JP (1) JPH027479A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006284165A (en) * 2005-03-07 2006-10-19 Denso Corp Exhaust gas heat exchanger
US20090309936A1 (en) * 2005-12-13 2009-12-17 Tsuyoshi Mita Method of manufacturing a piezoelectric actuator and liquid ejection head
US20100107390A1 (en) * 2005-12-08 2010-05-06 Murata Manufacturing Co., Ltd. Multilayer Piezoelectric Device and Method for Manufacturing the Same
US20100192341A1 (en) * 2006-04-03 2010-08-05 Canon Kabushiki Kaisha Piezoelectric element and manufacturing method thereof, electronic device, ink jet device
US20120236084A1 (en) * 2011-03-16 2012-09-20 Ricoh Company, Ltd., Piezoelectric actuator, method of producing piezoelectric actuator, and liquid discharge head

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006284165A (en) * 2005-03-07 2006-10-19 Denso Corp Exhaust gas heat exchanger
US20100107390A1 (en) * 2005-12-08 2010-05-06 Murata Manufacturing Co., Ltd. Multilayer Piezoelectric Device and Method for Manufacturing the Same
US20090309936A1 (en) * 2005-12-13 2009-12-17 Tsuyoshi Mita Method of manufacturing a piezoelectric actuator and liquid ejection head
US8500253B2 (en) * 2005-12-13 2013-08-06 Fujifilm Corporation Piezoelectric actuator and liquid ejection head
US20100192341A1 (en) * 2006-04-03 2010-08-05 Canon Kabushiki Kaisha Piezoelectric element and manufacturing method thereof, electronic device, ink jet device
US8387220B2 (en) * 2006-04-03 2013-03-05 Canon Kabushiki Kaisha Method of manufacturing a piezoelectric element
US20120236084A1 (en) * 2011-03-16 2012-09-20 Ricoh Company, Ltd., Piezoelectric actuator, method of producing piezoelectric actuator, and liquid discharge head
US8713768B2 (en) * 2011-03-16 2014-05-06 Ricoh Company, Ltd. Method of producing piezoelectric actuator

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