JPH0274366U - - Google Patents
Info
- Publication number
- JPH0274366U JPH0274366U JP15408188U JP15408188U JPH0274366U JP H0274366 U JPH0274366 U JP H0274366U JP 15408188 U JP15408188 U JP 15408188U JP 15408188 U JP15408188 U JP 15408188U JP H0274366 U JPH0274366 U JP H0274366U
- Authority
- JP
- Japan
- Prior art keywords
- polished
- holding
- drive shaft
- moving
- holding rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000002253 acid Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15408188U JPH0274366U (enExample) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15408188U JPH0274366U (enExample) | 1988-11-25 | 1988-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274366U true JPH0274366U (enExample) | 1990-06-06 |
Family
ID=31430494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15408188U Pending JPH0274366U (enExample) | 1988-11-25 | 1988-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274366U (enExample) |
-
1988
- 1988-11-25 JP JP15408188U patent/JPH0274366U/ja active Pending
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