JPH0274365U - - Google Patents
Info
- Publication number
- JPH0274365U JPH0274365U JP15060488U JP15060488U JPH0274365U JP H0274365 U JPH0274365 U JP H0274365U JP 15060488 U JP15060488 U JP 15060488U JP 15060488 U JP15060488 U JP 15060488U JP H0274365 U JPH0274365 U JP H0274365U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- plasma processing
- exhaust hole
- exhaust
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15060488U JPH0274365U (hu) | 1988-11-18 | 1988-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15060488U JPH0274365U (hu) | 1988-11-18 | 1988-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274365U true JPH0274365U (hu) | 1990-06-06 |
Family
ID=31423899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15060488U Pending JPH0274365U (hu) | 1988-11-18 | 1988-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274365U (hu) |
-
1988
- 1988-11-18 JP JP15060488U patent/JPH0274365U/ja active Pending